A first driving signal is supplied to a first electrode of a vibrating body. A second driving signal is supplied to a second electrode of the vibrating body. A common driving signal is supplied to a common electrode of the vibrating body. A phase of the first driving signal is set changeable with respect to a phase of the common driving signal. A phase of the second driving signal is set changeable with respect to the phase of the common driving signal. Then, it is possible to switch a driving direction of a piezoelectric motor according to which phase of the first driving signal or the second driving signal is varied from the phase of the common driving signal. If the phase is simply changed, a switch is unnecessary. It is possible to reduce a driving circuit in size.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A robot according to an embodiment includes a first link, a second link, an actuator, and an external gear. The second link is rotatably connected to the first link. The actuator rotationally drives the second link. The external gear is connected to the actuator. The second link includes an internal gear engaged with the external gear.

A robot includes a body, a first arm, and a second arm. The first arm includes one joint, an adjacent joint that is adjacent to the one joint, and another adjacent joint that is adjacent to the adjacent joint. When the first arm is extended in a vertical orientation relative to the body, the one joint of the first arm has a rotation axis that is offset by a first distance in a first horizontal direction from a rotation axis of the adjacent joint of the first arm, and the another adjacent joint of the first arm has a rotation axis that is offset by a second distance in a second horizontal direction from the rotation axis of the adjacent joint of the first arm. The first horizontal direction is opposite to the second horizontal direction.

The present invention is to provide an industrial robot, which is placed in vacuum for use, capable of efficiently cooling down hand- or arm-driving motors which are arranged inside the arm in air. The industrial robot is provided with a motor for rotating a second arm unit with respect to a first arm unit, a motor for rotating a hand with respect to the second arm unit, a reduction gear for reducing the rotation of the motor and transmitting it to the second arm unit, and a reduction gear for reducing the rotation of the motor and transmitting it to the hand; the hand and the arm are placed in vacuum. The reduction gears and are coaxially arranged so that the center of rotation of the second arm unit with respect to the first arm unit coincides with the axial centers of the reduction gears. The interior space of the hollow first arm unit is kept at atmospheric pressure in which the motors and the reduction gears are arranged.

A legged robotic device is disclosed. The legged robotic device can include a plurality of support members coupled together for relative movement defining a plurality of degrees of freedom, which can correspond to degrees of freedom of a human leg. The legged robotic device can also include actuators to apply forces or torques to the support members in the degrees of freedom. In addition, the legged robotic device can include potential energy storage mechanisms associated with the degrees of freedom operable to store potential energy as a result of relative movement of the support members in the degrees of freedom and to provide at least a portion of the stored potential energy to the support members as compensating forces or torques to assist the actuators. In one aspect, elastic potential energy can be stored. A spring rate and/or a zero position of the potential energy storage mechanisms can be dynamically variable.

A robotic tool changer for machining center includes a drive mechanism, a first motor, and a rotary seat which are mounted on a body. The drive mechanism includes a first rotating shaft, a second rotating shaft, a first swing arm, a second swing arm, and a linkage member. The first rotating shaft and the second rotating shaft are arranged in parallel. The first swing arm is connected to the first rotating shaft while the second swing arm is connected to the second rotating shaft. Two ends of the linkage member are pivotally connected to the first swing arm and the second swing arm respectively. An end of the second rotating shaft is fixed to the rotary seat. Thereby, when the first motor drives the first rotating shaft to rotate, the rotary seat is driven to turn over. Thereby, with the configuration of the first motor and the drive mechanism, the hydraulic oil leakage and the environmentally unfriendly subsequent treatment of the hydraulic oil when the hydraulic cylinder is used as a power source can be improved.

A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.