A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.

There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.

A jointed mechanical device is provided. The device includes at least one element having a fixed end and a deflectable end. The device also includes at least one actuating structure having a first end coupled to at least the deflectable end of the element, where the actuating structure includes at least one elastic element in series with at least one non-elastic element. The device further includes at least one force actuator configured to apply an actuator force to a second end of the actuating structure. Additionally, the device includes a control system for adjusting an operation of the force actuator based at least one actuation input, an amount of the actuator force, and an amount of displacement generated by the force actuator.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

An industrial robot provided with a drive shaft in which a power transmission unit is arranged between a servomotor and a power output unit includes: a first brake unit integrally incorporated in the servomotor; and a second brake unit which is connected to the power transmission unit to branch to a power transmission path of the power transmission unit. The drive shaft is braked by using both the first brake unit and the second brake unit.

A joint driving device includes: a reduction gear output shaft that transmits a torque to a second link; a transmission shaft that transmits reaction of the torque to a first link; a transmission shaft outer cylinder arranged on the outer circumference of the transmission shaft and connected to the transmission shaft; a reduction gear output shaft outer cylinder arranged in the outer circumference of the reduction gear output shaft and connected to the reduction gear output shaft; and a wire body arranged between the first link and the second link and including at least one of a wire and a pipe. The transmission shaft includes the motor frame as at least a part. The wire body is housed in a space between the transmission shaft outer cylinder and the transmission shaft, and a space between the reduction gear output shaft outer cylinder and the reduction gear output shaft.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.

A multiple joint robot includes a movable body, a motor for generating power to actuate the movable body, a motor housing for accommodating the motor, and a cooling structure for dissipating heat generated from the motor. The cooling structure includes a heat conductor in the motor housing, and the heat conductor forms a heat conductive path for transmitting heat from the motor to the motor housing. The heat conductor has a first surface in contact with a heat generating surface of the motor and a second surface in contact with an inner surface of the motor housing. A position of the heat conductor can be adjusted to form the heat conductive path by sliding the first surface and/or the second surface along the opposed heat generating surface or inner surface.

A robot includes a link portion including a plurality of link members and a drive portion to rotate the link members, and axes of rotation of the drive portion extending from end portions of the link members is positioned at an identical point.