A robot includes a base, a first arm rotatably provided on the base via a first connecting section, a second arm rotatably provided on the first arm via a second connecting section, and a movable shaft section provided in the second arm and movable with respect to the second arm. When a movable range of the movable shaft section is represented as S and the height between a distal end of the movable shaft section on the opposite side of the first arm at the time when the movable shaft section moves to the first arm side most with respect to the second arm and a first connection surface, which is a connection surface of the base and the first connecting section, is represented as H.sub.1, a relation H.sub.13S is satisfied.

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

A robot includes a first arm and a second arm. The first arm and the second arm have different mechanisms from each other.

Feedback control is carried out on respective servomotors so that detection angles detected by respective input-side encoders become target angles to be obtained when a leading end of a robot has moved to a positioning completion position of a first motion. Subsequently, the position of the leading end of the robot is obtained on the basis of the detection angles detected by the respective output-side encoders. The time from a time point at which the detection angles detected by the input-side encoders are brought to the target angles through the feedback control to a time point at which a vibration width of the calculated position of the leading end of the robot relative to the positioning completion position converges within a convergence range is obtained. The obtained time is set in the stopping duration of the robot.

A robot arm increases a plurality of arm sections that are turnably connected. The arm sections include a plurality of links and an actuator section that turns the plurality of links. The actuator section includes: a cylindrical cover provided on an outer surface; a motor that turns the plurality of links; a motor frame included in the motor; a reduction gear that decelerates rotation from the motor and outputs a torque; a collar fixed to the reduction gear; and a wire body including at least one of a wire and a pipe. At least a part of the wire body is housed between a surface including a first small body section formed by the motor frame and the collar and a surface including a second small body section of the cylindrical cover.

An analyzer is disclosed for optical analysis of a biological specimen. In at least one embodiment, the analyzer includes optics which includes a camera, intermediate optics and front optics. The intermediate optics is movably arranged and the front optics is fixedly arranged. An analyzer for optical analysis of a biological specimen, in at least one embodiment includes a robot for transporting a slide to be analyzed. The robot is controlled by at least three motors to allow movement of the robot in three dimensions. The robot includes a handling device configured to grip the slide.

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

Feedback control is carried out on respective servomotors so that detection angles detected by respective input-side encoders become target angles to be obtained when a leading end of a robot has moved to a positioning completion position of a first motion. Subsequently, the position of the leading end of the robot is obtained on the basis of the detection angles detected by the respective output-side encoders. The time from a time point at which the detection angles detected by the input-side encoders are brought to the target angles through the feedback control to a time point at which a vibration width of the calculated position of the leading end of the robot relative to the positioning completion position converges within a convergence range is obtained. The obtained time is set in the stopping duration of the robot.

There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.

An analyzer is disclosed for optical analysis of a biological specimen. In at least one embodiment, the analyzer includes optics which includes a camera, intermediate optics and front optics. The intermediate optics is movably arranged and the front optics is fixedly arranged. An analyzer for optical analysis of a biological specimen, in at least one embodiment includes a robot for transporting a slide to be analyzed. The robot is controlled by at least three motors to allow movement of the robot in three dimensions. The robot includes a handling device configured to grip the slide.