A pumping system configured to pump fluid from the ambient environment to a target reservoir, the pumping system including: a fluid pump configured to statically mount to a rotating surface, the pump configured to rotate about an axis of rotation; a pump reservoir statically coupled to the fluid pump and configured to fluidly couple to the target reservoir, the pump reservoir including a collection area defined along a portion of the pump reservoir radially outward of the axis of rotation; and a liquid separation member arranged along a portion of the collection area, the liquid separation member including a membrane configured to preferentially permit liquid flow therethrough.

Embodiments of mechanisms for processing a wafer are provided. A method for processing a wafer includes creating an exhaust flow in a fluid conduit assembly that is connected to a process module used for processing the wafer. The method also includes detecting the exhaust pressure in the fluid conduit assembly. The method further includes determining whether the exhaust pressure meets a set point. In addition, the method includes regulating the exhaust flow if the exhaust pressure fails to meet the set point.

A fluid sprayer is provided and includes a fluid pump assembly having an outlet path and a motor assembly configured to drive the fluid pump assembly to pressurize fluid. The motor assembly is controlled by a throttle mechanism. The fluid sprayer also includes a fluid pressure control assembly including a mechanical pressure transducer configured to be displaced as a function of fluid pressure in the outlet path. The fluid pressure control assembly is configured to control the throttle mechanism as a function of displacement of the mechanical pressure transducer.

A tire inflation system and method for a tire supported by a wheel, the tire inflation system including a pump system including a pump cavity configured to fluidly connect to the tire, an actuating element configured to actuate relative the pump cavity, a drive mechanism rotatably coupled to the wheel, the drive mechanism including a motion transformer and an eccentric mass, a valve fluidly connecting the pump cavity to a fluid reservoir; and a control system configured to operate the valve.

A fluid system includes a boost pump and a variable displacement pump along a main leg configured to output fluid within a pressure range and at variable flow rates. An auxiliary leg of the fluid system includes an auxiliary pump configured to receive a portion of the fluid from the main leg and to output pressurized fluid to a control valve of the variable displacement pump and multiple actuator modules. Each actuator module includes an electromechanical actuator and a collocated control unit.

A fluid system includes a boost pump and a variable displacement pump along a main leg configured to output fluid within a pressure range and at variable flow rates. An auxiliary leg of the fluid system includes an auxiliary pump configured to receive a portion of the fluid from the main leg and to output pressurized fluid to a control valve of the variable displacement pump and multiple actuator modules. Each actuator module includes an electromechanical actuator and a collocated control unit.