A pump cassette is disclosed. The pump cassette includes a housing having at least, one fluid inlet line and at least one fluid outlet line. The cassette also includes at least one reciprocating pressure displacement membrane pump within the housing. The pressure pump pumps a fluid from the fluid inlet line to the fluid outlet line. A hollow spike is also included on the housing as well as at least one metering pump The metering pump is fluidly connected to the hollow spike on the housing and to a metering pump fluid line. The metering pump fluid line is fluidly connected to the fluid outlet line.

Hemodialysis and similar dialysis systems including a variety of systems and methods that make hemodialysis more efficient, easier, and/or more affordable, and include new fluid circuits for fluid flow in hemodialysis systems and a reciprocating diaphragm pump for pumping fluids. The reciprocating diaphragm pump includes a flexible diaphragm, a first rigid body having a curved pumping chamber wall, a second rigid body having an opposing curved control chamber wall. The diaphragm is interposed between the pumping chamber wall and the control chamber wall to define a pumping chamber and a control chamber. The diaphragm of the pump has a peripheral bead arranged to locate the diaphragm between the first rigid body and the second rigid body and a diaphragm body having a curved, semi-spheroid or domed shape. The diaphragm is pre-formed or molded so that during a delivery stroke of the pump, the elastic force of the diaphragm resisting its deployment into the pumping chamber prevents a peripheral portion of the diaphragm body from fully contacting the pumping chamber wall.

A processing liquid supply system includes a tank that stores a processing liquid supplied from a processing liquid supply, a circulation passage that is connected to the tank, a plurality of supply passages that is connected to the circulation passage and supplies the processing liquid to each of a plurality of liquid processing units that perform a liquid processing on a substrate, a first pump filter set that is a combination of a first pump and a plurality of first filters provided downstream of the first pump, and a second pump filter set that is a combination of a second pump and a plurality of second filters provided downstream of the second pump. The first pump filter set and the second pump filter set are arranged in series in the circulation passage such that the first pump filter set is located upstream of the second pump filter set.

Hemodialysis and similar dialysis systems including a variety of systems and methods that make hemodialysis more efficient, easier, and/or more affordable, and include new fluid circuits for fluid flow in hemodialysis systems and a reciprocating diaphragm pump for pumping fluids. The reciprocating diaphragm pump includes a flexible diaphragm, a first rigid body having a curved pumping chamber wall, a second rigid body having an opposing curved control chamber wall. The diaphragm is interposed between the pumping chamber wall and the control chamber wall to define a pumping chamber and a control chamber. The diaphragm of the pump has a peripheral bead arranged to locate the diaphragm between the first rigid body and the second rigid body and a diaphragm body having a curved, semi-spheroid or domed shape. The diaphragm is pre-formed or molded so that during a delivery stroke of the pump, the elastic force of the diaphragm resisting its deployment into the pumping chamber prevents a peripheral portion of the diaphragm body from fully contacting the pumping chamber wall.