A method of controlling the flow of a fluid in a pipe system includes controlling a sleeve valve in the pipe system, the sleeve valve includes a valve body having an inner surface and an outer surface defining an inlet, an outlet, and a body cavity between the inlet and the outlet, a sleeve disposed at least partially within the body cavity, the sleeve including at least one opening fluidly connecting the inlet to the outlet, a gate proximate to the sleeve, and a drive assembly including a pair of drive lines, each drive line including a drive shaft, a first drive line of the pair of drive lines including a sync cam on the first drive line movably positioned between the front stop and the back stop, and moving the gate to uncover the at least one opening to allow fluid to flow from the inlet to the outlet.

A method of controlling the flow of a fluid in a pipe system includes controlling a valve in the pipe system, the valve including a valve body having an inlet, an outlet, and a body cavity, a gate moveable over a portion of the valve body at least partially between the inlet and the outlet, the gate including a cam stop, and a drive assembly, the drive assembly including a pair of drive lines, a first drive line of the pair of drive lines including a sync cam, the sync cam of the first drive line movably positioned on the drive shaft of the first drive line and positioned relative to the cam stop, moving the sync cam in a first direction to a front stop position; and moving the gate in the first direction to allow fluid to flow from the inlet to the outlet.

According to an embodiment, a valve assembly is provided for use with a fluid system for controlling flow rate to a fluid circuit for cooling and/or lubricating a clutch assembly in a transmission. The spool valve has a first outlet and a second outlet in fluid communication with the fluid circuit. The spool valve has a first configuration with zero flow to the fluid circuit, a second configuration providing a first flow to the fluid circuit through the first outlet, and a third configuration providing a second flow to the fluid circuit through the first and second outlets. The first outlet has a metering orifice. The flow across the valve is a function of the stroke distance of the spool.

A thermal management control valve includes a first housing defining a first fluid chamber, a second housing coupled to the first housing and defining a second fluid chamber, a rotary actuator having a drive shaft that defines a drive axis, a cam coupled to the drive shaft and having a cam slot, and a louver plate sealed between the first housing and the second housing and having a plurality of louver slots extending through the louver plate along a louver flow direction. The louver plate is coupled to the cam slot so that rotation of the cam selectively moves the louver plate along a radial direction relative to the drive axis. The radial direction is perpendicular to the louver flow direction.

A thermal management control valve includes a first housing section, a second housing section, and a louver plate assembly defining a flow path. The louver plate assembly includes a louver plate, a first seal plate in engagement with a first louver surface of the louver plate, a first biasing element in engagement with the first seal plate, a second seal plate in engagement with a second louver surface of the louver plate arranged opposite to the first louver surface, and a second biasing element in engagement with the second seal plate. The louver plate is selectively movable relative to the first seal plate and the second seal plate to inhibit or provide fluid flow along the flow path.

A cam-driven valve assembly includes a valve housing that defines a plurality of fluid passageways and supports an array of fluid valves in the fluid passageways to control the flow of fluid therethrough. The assembly includes a plurality of cams supported on a cam shaft. The cam shaft is arranged so that each cam is associated with a corresponding valve. Rotation of the cam shaft results in actuation of the valves via the cams. Each cam includes a pair of cam disks that cooperate to define an internal cam track. A valve body of each fluid valve includes a cam follower that is received in the cam track of a corresponding cam. The cam tracks may be configured such that at least one of the valves is actuated at time that is different relative to an actuation time of another valve.

Embodiments of symmetric flow valves for use in substrate processing chambers are provided herein. In some embodiments, a symmetric flow valve includes: a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes a plurality of axisymmetrically disposed openings arranged in a non-linear manner, and wherein the bottom plate includes a port opening; an actuator disposed above the top plate and coupled to a central region of the top plate radially inward of the plurality of axisymmetrically disposed openings; and a poppet disposed in the interior volume and coupled to the actuator to move the poppet vertically within the interior volume, wherein the poppet is configured to selectively seal the plurality of axisymmetrically disposed openings or the port opening.

A cam-driven valve assembly includes a valve housing that defines a plurality of fluid passageways and supports an array of fluid valves in the fluid passageways to control the flow of fluid therethrough. The assembly includes a plurality of cams supported on a cam shaft. The cam shaft is arranged so that each cam is associated with a corresponding valve. Rotation of the cam shaft results in actuation of the valves via the cams. Each cam includes a pair of cam disks that cooperate to define an internal cam track. A valve body of each fluid valve includes a cam follower that is received in the cam track of a corresponding cam. The cam tracks may be configured such that at least one of the valves is actuated at time that is different relative to an actuation time of another valve.