The present invention controls the pressure and flow rate of fluid, in order to obtain uniform performance, configure a closed loop magnetic circuit so as to include an electromagnet, a flapper, and a yoke material, and elastically deform the flapper itself by Maxwell attractive force generated between a magnetic pole of the electromagnet and the flapper to make the separation distance between the nozzle and the flapper variable. As opposed to a rigid flapper structure that swingably moves around a supporting point, like a conventional servo valve, the electromagnet, the magnetic pole, the nozzle, the flapper, and the like are arranged such that a change in magnetic gap directly leads to a change in air gap.

A hydraulic stage includes a hydraulic element located between and sealing a first and second chamber, wherein the first chamber comprises at least one aperture through which fluid is arranged to flow into or out of the first chamber; and at least one piezoelectric element which is positioned adjacent to the at least one aperture and is arranged to deform in response to an applied potential difference such that it blocks or obstructs the at least one aperture to a varying degree according to the level of deformation, so as to control fluid flow into or out of the first chamber. The level of deformation of the piezoelectric element thus reduces or increases an effective size of the inlet or outlet aperture to which it is adjacent, restricting or permitting an increase in fluid flow accordingly.

The present invention controls the pressure and flow rate of fluid, in order to obtain uniform performance, configure a closed loop magnetic circuit so as to include an electromagnet, a flapper, and a yoke material, and elastically deform the flapper itself by Maxwell attractive force generated between a magnetic pole of the electromagnet and the flapper to make the separation distance between the nozzle and the flapper variable. As opposed to a rigid flapper structure that swingably moves around a supporting point, like a conventional servo valve, the electromagnet, the magnetic pole, the nozzle, the flapper, and the like are arranged such that a change in magnetic gap directly leads to a change in air gap.

A spool assembly for a second stage of a servo valve comprises a spool having an axis (L) and an opening for a feedback member provided in a central region of the spool extending perpendicular to the axis. An adjustable joint is provided within the spool for securing a feedback member relative to the spool, comprising first and second jaw arms being displaceable relative to each other along the axis of the spool. The jaw arms have opposing clamping surfaces, wherein the clamping surfaces are arranged to be drawn towards each other as the jaw arms are drawn away from each other, such that a feedback member can be clamped between the opposed clamping surfaces of the jaw arms and thereby secured relative to the spool.

Example split valves for regulating a first flowrate and a second flowrate of a fluid within a closed loop systems are disclosed herein. An example split valve includes an electrohydraulic servo valve coupled to a first piston via a first hydraulic flowline and a second hydraulic flowline, the first piston to include a piston shaft, a first head, and a second head; one or more bellows fixed to at least one of the first head or the second head, the one or more bellows to hermetically seal the fluid from a hydraulic fluid; and a control system connected to the electrohydraulic servo valve, the control system to adjust the first flowrate and the second flowrate of the fluid through a first fluid chamber, the first piston to be located in the first fluid chamber.

Example split valves for regulating a first flowrate and a second flowrate of a fluid within a closed loop systems are disclosed herein. An example split valve includes an electrohydraulic servo valve coupled to a first piston via a first hydraulic flowline and a second hydraulic flowline, the first piston to include a piston shaft, a first head, and a second head, the first hydraulic flowline to output a first pressure of a hydraulic fluid, the second hydraulic flowline to output a second pressure of the hydraulic fluid, a bellows fixed to at least one of the first head or the second head, the bellows to hermetically seal the fluid from the hydraulic fluid, and a control system connected to the electrohydraulic servo valve, the control system to adjust the first flowrate and the second flowrate of the fluid through a first fluid chamber.

A spool assembly for a second stage of a servo valve comprises a spool having an axis (L) and an opening for a feedback member provided in a central region of the spool extending perpendicular to the axis. An adjustable joint is provided within the spool for securing a feedback member relative to the spool, comprising first and second jaw arms being displaceable relative to each other along the axis of the spool. The jaw arms have opposing clamping surfaces, wherein the clamping surfaces are arranged to be drawn towards each other as the jaw arms are drawn away from each other, such that a feedback member can be clamped between the opposed clamping surfaces of the jaw arms and thereby secured relative to the spool.

A method of detecting failure of a two-stage servo-valve in which the power-controlling movable member is connected to the rotor of a torque motor of a pilot stage by mechanical feedback. A malfunction signal is generated in response to detecting that the rotor of the torque motor has engaged a stop. The invention also provides a servo-valve for implementing such a method.

A device for providing an output fluid at a regulated output pressure includes a pressure control unit controlled via a pilot control pressure and a pilot control unit that provides the pilot control pressure. The pressure control unit includes an inlet chamber for an input fluid having an input pressure, an outlet chamber for the output fluid having the regulated output pressure and a first valve unit that acts between the inlet chamber and the outlet chamber. A first diaphragm of the pressure control unit is acted upon by the pilot control pressure. A second diaphragm, which is mechanically coupled to the first diaphragm is acted upon by the output fluid having the output pressure acts. At least the second diaphragm mechanically acts on the first valve unit.

A two-position, two-stage servo valve includes a valve body, a valve element, a control pressure chamber, and a control element. The valve body has an inner surface that defines a valve element chamber that includes a first control chamber and a second control chamber. The first control chamber is larger than the second control chamber. The valve element has first and second ends and is disposed within the valve element chamber and is movable between a first valve position and a second valve position. The first end is larger than the second end and is disposed within the first control chamber, and the second end is disposed within the second control chamber. The control pressure chamber includes a control pressure port that is in continuous fluid communication with the first control chamber. The control element is movable between a first control position and a second control position.