Provided is a deposition apparatus for an organic light emitting diode, in which maint operations with deposition material are carried out independently by including an auxiliary chamber, thereby shortening the evaluation time of a deposition material.

The present disclosure relates to an apparatus and a method of delivering a liquid to a downstream process. The apparatus can include a vessel configured to retain a liquid, a bellow in fluid communication with the vessel to receive the liquid from the vessel and in fluid communication with the downstream process to deliver the liquid. The bellow can be exposed to a constant external pressure and configured to deliver the liquid under the constant external pressure when the bellow stops receiving the liquid from the vessel. In some embodiments, the constant external pressure is atmospheric pressure. The bellow can include a pressure deformable material. The apparatus can further include a vaporizer configured to receive the liquid and to produce a vapor, one or more chemical vapor deposition chambers configured to receive the vapor and to hold a substrate for deposition of a component of the vapor on a substrate.

A system of generating an aerosol, by: (a) placing a liquid into a liquid chamber in an ultrasonic nebulization system having a cylindrical aerosol production chamber received within a cylindrical master chamber, and having top and bottom ultrasonic transducers; (b) passing air up through the aerosol production chamber; and (c) producing acoustic standing waves above the surface of the liquid with the top and bottom ultrasonic transducers, thereby generating an aerosol of the liquid by action of the standing waves.

A cabinet for a solid material container comprises a main body having a top wall, a side wall, and a bottom wall; an entry/exit portion which is attached to a portion of the main body, for putting in and taking out the solid material container; an exhaust duct attached to a portion of the main body; a heating portion for heating the solid material container; a temperature measuring portion for measuring a temperature of the solid material container, or of the heating portion; and a cooling blower for blowing cooling air toward the solid material container.

There is provided a film-forming material mixed-gas forming device including: a film-forming material supply unit that supplies a film-forming material in liquid form at a predetermined flow rate; a carrier gas supply unit that supplies a carrier gas at a predetermined flow rate; a main vaporization unit that vaporizes the film-forming material by heating the film-forming material supplied from the film-forming material supply unit and the carrier gas supplied from the carrier gas supply unit; and an auxiliary vaporization unit having a porous vaporization member which captures carried over droplets of the film-forming material in gas flowing out from the main vaporization unit and vaporizes the captured droplets of the film-forming material.

An evaporator is provided for evaporating water from an ambient body of water having a water surface. The evaporator includes a housing that has a proximal end proximate to the water surface, a distal end distal to the water surface, and a housing air flow channel directed toward the water surface. The housing is disposed on a support, such as a float assembly, that positions the housing above the water surface. The evaporator also includes an air flow induction device, preferably an impeller, disposed to direct an air flow stream from the distal end toward the proximal end through the housing air flow channel and toward the water surface so that the air contacts the water. The impeller preferably is made of a fiberglass material. The support preferably includes at least one float assembly air flow channel that receives the air flow stream from the housing and directs it outwardly from the evaporator. Water injection devices such as spray nozzles or atomizing nozzles preferably are disposed in the float assembly channel or channels to inject the water into the air flow stream.

An evaporator that includes a porous sintering body is provided. The sintering body is made of a composite consisting of at least one first electrically conductive material and at least one second electrically conductive material as well as at least one dielectric material. The sintering body has an open porosity ranging from 10 to 90%, and the dielectric material is selected from the group consisting of crystallizable glass and/or glass ceramic, wherein the first electrically conductive material has a lower electric conductivity than the second electrically conductive material; the content of dielectric material in the composite equals 5 to 70 vol. %; the content of the first electrically conductive material in the composite equals 10 to 90 vol. %; the content of the second electrically conductive material equals 5 to 50 vol. %; and the sintering body has an electrical conductivity ranging from 0.1 to 105 S/m.

Methods and apparatus for vaporizing liquid into the surrounding environment, including directing liquid from a liquid source to a vaporization port where the vaporization port has lateral dimensions varying from 10 um to 300 um, applying heat to the liquid in the vaporization port with an at least one heating element located in thermal communication to the vaporization port, and releasing vaporized liquid from the vaporization port into the surrounding environment so that fluid is transported through the depth of the structure.

Disclosed is a swirl generator for an evaporator, having: a body that extends along a body-center axis between opposing inlet and outlet ends, and includes: a fluid inlet at the inlet end; an outer surface that, at that the outlet end, defines an outlet region with a curved outer boundary forming a convex curve that extends radially inward from an outer diameter surface of the body to an outer axial surface of the body; a center passage formed within the body that extends from the inlet towards the outlet along the body-center axis; and a swirl passage formed at the outlet end of the body, the swirl passage extending between the center passage and the curved outer boundary along a swirl passage axis, whereby a fluid entering from the inlet exits the body at the curved outer boundary, the swirl passage axis forming an acute angle with the body-center axis.

Methods and apparatus for vaporizing liquid into the surrounding environment, including directing liquid from a liquid source to a vaporization port where the vaporization port has lateral dimensions varying from 10 um to 300 um, applying heat to the liquid in the vaporization port with an at least one heating element located in thermal communication to the vaporization port, and releasing vaporized liquid from the vaporization port into the surrounding environment so that fluid is transported through the depth of the structure.