A novel method, composition and storage and delivery container for using antimony-containing dopant materials are provided. The composition is selected with sufficient vapor pressure to flow at a steady, sufficient and sustained flow rate into an arc chamber as part of an ion implant process. The antimony-containing material is represented by a non-carbon containing chemical formula, thereby reducing or eliminating the introduction of carbon-based deposits into the ion chamber. The composition is stored in a storage and delivery vessel under stable conditions, which includes a moisture-free environment that does not contain trace amounts of moisture. The storage and delivery container is specifically designed to allow delivery of high purity, vapor phase antimony-containing dopant material at a steady, sufficient and sustained flow rate.

Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.

A microfluidic device may include a first fluid chamber, a second fluid chamber, a first microfluidic passage extending between the first fluid chamber and the second fluid chamber, a second microfluidic passage extending from the second fluid chamber, a first fluid actuator adjacent the first microfluidic passage and proximate the first fluid chamber to inertially pump fluid away from the first fluid chamber and a second fluid actuator adjacent the first microfluidic passage and proximate the second fluid chamber to menially pump fluid towards the first fluid chamber.

An on-demand vapour generator includes a vapour chamber configured to produce a vapour and a vapour absorption assembly configured to receive flows of vapour from the vapour chamber. The vapour absorption assembly includes a first vapour-permeable passage having a passage outlet and at least one second vapour-permeable passage that is closed. When vapour absorption assembly receives a flow of vapour from the vapour chamber, the flow of vapour passes through the first vapour-permeable passage to the passage outlet at least substantially without absorption of vapour from the flow of vapour. However, when a flow of vapour is not received from the vapour chamber, vapour entering the vapour absorption assembly from the vapour chamber passes into the first vapour-permeable passage and the at least one second vapour-permeable passage and is at least substantially absorbed.

A system of generating an aerosol, by: (a) placing a liquid into a liquid chamber in an ultrasonic nebulization system having a cylindrical aerosol production chamber received within a cylindrical master chamber, and having top and bottom ultrasonic transducers; (b) passing air up through the aerosol production chamber; and (c) producing acoustic standing waves above the surface of the liquid with the top and bottom ultrasonic transducers, thereby generating an aerosol of the liquid by action of the standing waves.

A liquid-to-vapor conversion device includes a chamber having an opening connected to a liquid intake, a pressure relief opening, and a vapor outlet. The device also includes a flow controller arranged at the level of the liquid intake, and a burst disk installed at the level of the pressure relief opening. Further, the device includes pressure-limiting means arranged at the level of the liquid intake. The pressure-limiting means is configured to decrease the flow rate in the liquid intake when the pressure in the liquid intake exceeds a threshold value smaller than a bursting pressure of the burst disk.

An evaporator body for a PVD coating system comprises a basic body and an evaporator surface, to which a titanium dihydride layer is applied. A titanium hydride layer comprises an organic carrier agent and titanium hydride as the single inorganic solid. The thickness of the layer is less than or equal to 10 m.

An evaporator comprising an evaporator body (3) surrounded by an evaporator housing (5), wherein the evaporator housing (5) is provided with a feed line (1) for feeding a liquid into the evaporator housing (5) and with an outlet (6) for emitting any vapour produced, wherein the evaporator body (3) comprises a multiplicity of plates (7) which are arranged in a planar manner one above another, wherein a void (8) is formed in each case between adjacent plates (7), wherein each of the voids (8) is fluidically connected to the outlet,
wherein a liquid distributor is interconnected between the feed line (1) and the evaporator body (3), wherein the liquid distributor branches off from the feed line (1) in the direction of the evaporator body (3) in at least two distributor lines (VR), and
wherein each distributor line (VR) is connected to at least one void (8).

The treatment unit includes an evaporation device including a gas circulation pipe, and a material with a large specific surface filling an evaporation section of the circulation pipe; a device for circulating the gas through the circulation pipe; a liquid impregnating the material with a large specific surface, the liquid containing at least one product or a mixture of volatile biocide and/or phytoprotective products, with a boiling temperature between 130 and 280 C., the material with a large specific surface having a liquid retention capacity greater than 50 L/m.sup.3 of material with a large specific surface at 20 C.; a recharging device, arranged to re-impregnate the material with a large specific surface with liquid or to replace the spent material with a large specific surface with a new material with a large specific surface impregnated with liquid.

In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13) disposed between adjacent fluid heating sections.