A device, such as a wet scrubber for cleaning a stream of gas by removing gaseous, liquid and solid impurities, has a gas inlet and a gas outlet. At the gas inlet there is a first structured packing. A spray-scrubber area with atomizing nozzles is provided above the first structured packing. A first demister is provided for separating larger drops above the spray-scrubber area. A woven fabric is above the first demister, and spray nozzles are arranged around this woven fabric to spray washing liquid in the direction of the gas stream onto the surface of the woven fabric. A final demister is located above the woven fabric and has a demister rinsing apparatus. The device may be used to dispose of industrial waste gases encountered in the semiconductor industry, particularly for the disposal of waste gases stemming from CVD processes in microelectronics production.

A device, such as a wet scrubber for cleaning a stream of gas by removing gaseous, liquid and solid impurities, has a gas inlet and a gas outlet. At the gas inlet there is a first structured packing. A spray-scrubber area with atomizing nozzles is provided above the first structured packing. A first demister is provided for separating larger drops above the spray-scrubber area. A woven fabric is above the first demister, and spray nozzles are arranged around this woven fabric to spray washing liquid in the direction of the gas stream onto the surface of the woven fabric. A final demister is located above the woven fabric and has a demister rinsing apparatus. The device may be used to dispose of industrial waste gases encountered in the semiconductor industry, particularly for the disposal of waste gases stemming from CVD processes in microelectronics production.

A packed tower includes a packed tower housing having an inlet for receiving an effluent stream; an outlet for venting the effluent stream; a packed substrate housed within the packed tower housing between the inlet and the outlet, the packed substrate being configured to entrain at least some of particles from a fluid as the effluent stream flows therethrough; and a fan housed within the packed tower housing, the fan being configured to propel the effluent stream from the inlet towards the outlet and to remove at least some of the particles from the fluid. The fan helps to generate a negative pressure to draw the effluent stream into the packed tower and through the packed substrate, which reduces the back pressure improves the flow of effluent stream through the packed tower and upstream abatement apparatus and helps to improve the removal of particles from within the effluent stream.

A packed tower includes a packed tower housing having an inlet for receiving an effluent stream; an outlet for venting the effluent stream; a packed substrate housed within the packed tower housing between the inlet and the outlet, the packed substrate being configured to entrain at least some of particles from a fluid as the effluent stream flows therethrough; and a fan housed within the packed tower housing, the fan being configured to propel the effluent stream from the inlet towards the outlet and to remove at least some of the particles from the fluid. The fan helps to generate a negative pressure to draw the effluent stream into the packed tower and through the packed substrate, which reduces the back pressure improves the flow of effluent stream through the packed tower and upstream abatement apparatus and helps to improve the removal of particles from within the effluent stream.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

An air purification device includes a reactor having a hollow shape and extending in one direction, a discharge plasma generator comprising a first electrode disposed on an outer wall of the reactor and a second electrode disposed inside the reactor, where the discharge plasma generator is configured to generate a discharge plasma in a discharge region, a plurality of dielectric particles disposed on a packed-bed of the reactor, a liquid supplier which supplies a liquid into the reactor, and a liquid recoverer which recovers the liquid discharged from the reactor.

Techniques for drift elimination in a liquid-gas contactor system include configuring a pre-fabricated mechanical frame coupled to a drift eliminator material to produce a framed drift eliminator assembly with substantially no air gaps between the drift eliminator material and the pre-fabricated mechanical frame, and coupling the framed drift eliminator assembly to the liquid-gas contactor system.

Techniques for drift elimination in a liquid-gas contactor system include configuring a pre-fabricated mechanical frame coupled to a drift eliminator material to produce a framed drift eliminator assembly with substantially no air gaps between the drift eliminator material and the pre-fabricated mechanical frame, and coupling the framed drift eliminator assembly to the liquid-gas contactor system.

The invention provides a scrubbing column for cleaning gas streams laden with absorbent residues, for example with methanol, and also with solid particles, for example with fuel dust. The gas scrubbing is effected by means of a random packing disposed in the lower region of the scrubbing column and the gas scrubbing of the gas stream laden solely with absorbent residues but not with solid particles by means of a structured packing disposed in the upper region of the scrubbing column. The use of the scrubbing column according to the invention in the integrated plant system between a gasification plant and a plant for gas scrubbing which is operated by the Rectisol process, for example, offers particular advantages with regard to its industrial employability owing to the possible connections described, which bring synergies for efficient operation of the integrated plant system.