An abatement apparatus and method are disclosed. The abatement apparatus for treating an effluent stream from a semiconductor processing tool comprises: a first treatment stage operable to combust the effluent stream to provide a combusted effluent steam and to treat the combusted effluent stream with water to provide a first stage treated effluent stream comprising treated fluid together with combustion particles and water; and a second treatment stage operable to receive the first stage treated effluent stream at an inlet and to separate centrifugally at least some of the combustion particles and the water from the treated fluid which is provided at a treated fluid outlet as a second stage treated effluent stream. In this way, particles and water may be removed effectively from the combusted effluent stream without the need for an inconvenient electrostatic precipitator. Instead, the second treatment stage provides for improved particle capture within a smaller footprint. Also, utilising water helps to retain the particles separately from the treated fluid.

A system and method in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through a vortex chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. In further embodiments, a system and method is offered for harnessing fields created by a system having rotating rotors and/or disks having waveform patterns on at least one side to produce current within a plurality of coils. In at least one embodiment, the waveform patterns include a plurality of hyperbolic waveforms axially aligned around a horizontal center of the system.

A system and method in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through a vortex chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. In further embodiments, a system and method is offered for harnessing fields created by a system having rotating rotors and/or disks having waveform patterns on at least one side to produce current within a plurality of coils. In at least one embodiment, the waveform patterns include a plurality of hyperbolic waveforms axially aligned around a horizontal center of the system.

A pair of waveform disks for use in a disk-pack turbine used, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid into an expansion chamber and then through at least a portion of a waveform pattern present between at least two disks. The disks having waveform patterns on at least one side.

A pair of waveform disks for use in a disk-pack turbine used, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid into an expansion chamber and then through at least a portion of a waveform pattern present between at least two disks. The disks having waveform patterns on at least one side.

A rotor for rotating packed bed units (RPBs) is described. The rotor comprises a first plate and a second plate. The rotor further comprises a plurality of sets of rings concentrically interposed between the first plate and the second plate. Each set of rings comprises a plurality of rings are arranged cylindrically. Further, each ring comprises a plurality of packing elements. The rotor further comprises at least one metallic ring interposed between the plurality of sets of rings.

An air purifier includes: a case having an air inlet and an air outlet; a tank that stores a liquid, the tank disposed in the case; a plasma generator that generates a plasma which is to be in contact with the liquid, the plasma generator including a pair of electrodes and a power supply which applies a voltage between the pair of electrodes; a fan that generates an air flow from the air inlet to the air outlet; a filter through which the air flow comes into contact with the liquid, the filter disposed in the case; and a controller that causes the power supply to start application of the voltage, and causes the fan to start generation of the air flow after elapse of a predetermined time period since the start of the application of the voltage.

A disk-pack turbine for use, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through a vortex chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. The rotors and/or disks having waveform patterns on at least one side. In at least one embodiment, the waveform patterns include a plurality of hyperbolic waveforms axially aligned around a horizontal center of the system.

A disk-pack turbine for use, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through a vortex chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. The rotors and/or disks having waveform patterns on at least one side. In at least one embodiment, the waveform patterns include a plurality of hyperbolic waveforms axially aligned around a horizontal center of the system.

A disk-pack turbine for use, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through a fluid intake chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. The rotors and/or disks having waveform patterns on at least one side.