A reheating collection device for a gas phase process is provided with a container elongated in an axial direction along an axis to define a chamber, an inflow path and an exhaust path respectively in communication with the chamber and apart in the axial direction from each other, and a heater heating the chamber between the inflow path and the exhaust path.

Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.

An exhaust system including a process chamber in which a semiconductor processing is performed, a buffer connected to the process chamber, the buffer configured to receive waste gas generated during the semiconductor processing and dualize and disperse powder generated from the waste gas may be provided, a reactor configured to burn the waste gas, a wet tank connected to the reactor, arranged below the reactor, and configured to store cleaning water, and a wet tower configured to decompose the powder in the waste gas by using the cleaning water may be provided.

A system configured to capture CO.sub.2 and able to be washed of the captured CO.sub.2 includes a material including an ionic liquid configured to capture CO.sub.2 in response to exposure to a gas comprising CO.sub.2 and to a thermal energy source and an aerogel holding the ionic liquid therein. The system may also include a washing solution configured to wash the captured CO.sub.2 from the material.

Sweep-based gas separation processes for reducing carbon dioxide emissions from gas-fired power plants. The invention involves at least two compression steps, a combustion step, a carbon dioxide capture step, a power generate step, and a sweep-based membrane separation step. One of the compression steps is used to produce a low-pressure, low-temperature compressed stream that is sent for treatment in the carbon dioxide capture step, thereby avoiding the need to expend large amounts of energy to cool an otherwise hot compressed stream from a typical compressor that produces a high-pressure stream, usually at 20-30 bar or more.

A particle detecting module includes a main body, a particle monitoring base, an actuator, a heater and a sensor. The main body has a first and a second compartment. The main body has an inlet, a hot gas exhausting opening and an outlet. The inlet and the hot gas exhausting opening are in fluid communication with the first compartment. The outlet is in fluid communication with the second compartment. A communicating opening is communicated with the first and the second compartment. The particle monitoring base is disposed between the first compartment and the supporting partition plate. The first compartment is heated to maintain a monitor standard level of humidity in the first compartment. The sensor is disposed adjacent to the supporting partition plate and located in a monitoring channel of the particle monitoring base, thereby monitoring the gas. The particle detecting module can be applied to a slim portable device.

A particle detecting module is disclosed and includes a main body, which is consist of an air guiding part and a detecting part, by driving a plurality of heating elements disposed within a plurality of storage chambers of the air guiding part, air inside these storage chambers is heated and the moisture of the air is removed, and then the air is transported to the detecting part, so that a sensor of the detecting part could detect the sizes and the concentrations of the suspended particles, and the interference of the humidity is reduced.

A flue gas condensation water extraction system includes a flue gas condensation-end system and a flue gas refrigeration source-end system. The flue gas condensation-end system includes a desulfurization absorption tower, a flue gas purification and condensation tower, and a condensed water storage tank. The flue gas purification and condensation tower is arranged above the desulfurization absorption tower. A flue gas outlet, a water inlet, and a water outlet are provided on the flue gas purification and condensation tower. The flue gas refrigeration source-end system includes a cooling tower. The water outlet is connected to the condensed water storage tank via a condensed water downcomer. The water inlet is connected to the cooling tower via a circulating water supply pipe. A condensation circulation water pump is provided on the circulating water supply pipe. The cooling tower is connected to the condensed water storage tank via a circulating water return pipe.

A method for decomposing a nitroso compound, comprising: adding an aqueous solution containing hydrogen halide to a liquid to be treated that contains the nitroso compound in such a manner that the hydrogen halide is present in an amount of 2 mol or more and 20 mol or less per mol of a nitroso group in the nitroso compound; and subsequently heating the resulting liquid to be treated at a temperature of not lower that 75 C. and not higher than a boiling point of water under ordinary pressure, thereby an amines are recovered.

A semiconductor processing system includes a semiconductor processing chamber, a scrubber, an exhaust line in fluid communication with the chamber and the scrubber for delivering exhaust from the chamber to the scrubber, and a steam generation device in fluid communication with the exhaust line for injecting steam into the exhaust line.