Disclosed is a system for integrally treating a composite waste gas including nitrogen oxides (NO.sub.x and N.sub.2O), chlorofluorocarbons (CFCs), hydrochlorofluorocarbons (HCFCs), hydrofluorocarbons (HFCs), and perfluorinated compounds (PFCs). The system includes a first wet processor configured to wash and adsorb dust including gases, SO.sub.x, and ash dissolved in water, a decomposing reactor configured to receive waste gas processed in the first wet processor and process nitrogen oxides (NO.sub.x and N.sub.2O), fluorocarbons (CFCs), hydrochlorofluorocarbons (HCFCs), hydrofluorocarbons (HFCs), and perfluorinated compounds (PFCs) in the waste gas, and a second wet processor configured to receive the waste gas processed in the decomposing reactor and wash and adsorb the received waste gas. The system can efficiently treat a large amount of composite waste gas.

Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.

A material for removing a contaminant, a filter for removing a contaminant including the material, and a device for removing a contaminant including the filter, the material including an adsorption material for adsorption of a contaminant and a decomposition material for decomposition of a contaminant, wherein the adsorption material and the decomposition material are complexed with each other, and a contaminant decomposition onset temperature of the decomposition material is equal to or lower than a contaminant desorption onset temperature of the adsorption material.

The present invention discloses a gas hydrate-based particulate/waste gas simultaneous removal system and method. R134a can be used to synthesize particulates/coking waste gases into gas hydrate, which can realize the simultaneous removal of particulates/coking waste gases with no pollution and low energy consumption. The system comprises a waste heat recovery device, a gas hydrate primary dust removal tower, a solid-liquid separation primary tower, a gas hydrate secondary dust removal tower, a solid-liquid separation secondary tower, a gas hydrate decomposition pool, a gas-solid separation tower and a low temperature fractionation device. The present invention can achieve the removal of harmful substances such as heavy metals and coking waste gases while removing particulates. Compared with the current particulate control and waste gas treatment device, the gas hydrate method-based device is greatly simplified and can effectively remove multiple pollutants and realize energy saving and environmental protection.

An apparatus, method and system remove contaminants from a vapor. In an embodiment, a contaminant removal apparatus includes a vacuum box. The vacuum box is a vessel. The apparatus also includes a demister pad disposed in the vacuum box. A vapor is introduced to the vacuum box on an opposing side of the demister pad from a vapor exit from the vacuum box.

Presented are processes for the beneficial conversion of CO.sub.2 and other environmentally destructive compounds to their constituent parts by the application of thermal plasma containing activated species whereby the interaction of the plasma with the compounds and reactions of CO.sub.2 and H.sub.2 generate more environmentally friendly compounds comprising in part oxygen and hydrogen. The thermal plasma may be vibro-shear plasma generated by the superheating of either steam, gas or a combination of both.

An exhaust gas purifying and heat recovering system and method for sludge treatment. The system comprises: a first heat exchange flow path including first, second, and third heat exchangers, a first heat exchange medium that is circulated in the first heat exchange flow path to heat process gas for sludge treatment in the first heat exchanger, a second purification and heat exchange flow path including a heat exchange tank containing a second liquid heat exchange medium and which receives the exhaust gas after sludge treatment, and a third dirty liquid separation flow path including a dirty liquid separation tank provided between a dirty liquid outlet of the heat exchange tank and a clean liquid inlet of the heat exchange tank for separating the dirty liquid after purging the exhaust gas, the separated liquid being again directed to the clean liquid inlet of the heat exchange tank.

A particle detecting module is disclosed and includes a main body, which is consist of an air guiding part and a detecting part, by driving a plurality of heating elements disposed within a plurality of storage chambers of the air guiding part, air inside these storage chambers is heated and the moisture of the air is removed, and then the air is transported to the detecting part, so that a sensor of the detecting part could detect the sizes and the concentrations of the suspended particles, and the interference of the humidity is reduced.

An apparatus for the inactivation of airborne pathogens and pathogens on the surface of an object. The apparatus including a housing with an intake region and an exhaust region and an airflow path disposed between the intake and exhaust regions. The apparatus also includes a space within the housing for placement of the object as well as an intake fan and an oxidant generator proximate the intake fan. The apparatus includes an air filter disposed in the airflow path for removing particulates and pathogens and passes the intake air through either or both of an activated carbon filter and a catalyst to convert the oxidant into oxygen.

Disclosed is an apparatus having a cooling line for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing cooling channel (111) on an inner wall thereof to cooling exhaust gas which is temperature-controlled by a heater (140) while being introduced through a gas inlet of an upper plate; an internal collecting tower (150) including multiple vertical plates and multiple horizontal plates that are assembled, and condensing and collecting a by-product from the exhaust gas; a main cooling channel (160) having a serpentine shape and cooling the exhaust gas uniformly by using coolant while passing through the internal collecting tower (150); and a multi-connection pipe (170) sequentially supplying the coolant to the upper plate cooling channel, the housing cooling channel, and the main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe that are provided outside the housing.