Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

An air cleaner including a case comprising an upper surface and a side surface, a sensor to measure a degree of contamination of air introduced into the case, a round portion in a shape that is curved on the upper surface of the case, and a sensor air inlet on the round portion and through which air is introduced.

An onboard inert gas system has an electrochemical and a membrane gas separator. The electrochemical separator includes an electrochemical cell including a cathode and anode separated by an electrolyte separator. An electrical power source provides power to the electrical circuit at a voltage that electrolyzes water at the anode and forms water at the cathode, or reduces oxygen at the cathode and forms oxygen at the anode. Oxygen is consumed at the cathode, providing nitrogen-enriched air. Nitrogen-enriched air from the cathode is connected by a flow path to the membrane gas separator, which comprises a membrane having a greater permeability to oxygen or water than to nitrogen. Nitrogen-enriched air from the membrane gas separator that is further enriched in nitrogen, reduced in water content, or both, is connected by a flow path to a fuel tank, a fire suppression system, or both a fuel tank and a fire suppression system.

An onboard inert gas system has an electrochemical and a membrane gas separator. The electrochemical separator includes an electrochemical cell including a cathode and anode separated by an electrolyte separator. An electrical power source provides power to the electrical circuit at a voltage that electrolyzes water at the anode and forms water at the cathode, or reduces oxygen at the cathode and forms oxygen at the anode. Oxygen is consumed at the cathode, providing nitrogen-enriched air. Nitrogen-enriched air from the cathode is connected by a flow path to the membrane gas separator, which comprises a membrane having a greater permeability to oxygen or water than to nitrogen. Nitrogen-enriched air from the membrane gas separator that is further enriched in nitrogen, reduced in water content, or both, is connected by a flow path to a fuel tank, a fire suppression system, or both a fuel tank and a fire suppression system.

In some embodiments, an indoor air cleaning apparatus and a method for removing at least a portion of at least one type of gas from an indoor airflow are disclosed. The apparatus may comprise a cabinet; at least one sorbent bank comprising at least one cartridge; a fan assembly comprising at least one housing including at least one housing inlet and at least one housing outlet, at least one motor and at least one impeller; and a heating element configured to operate in at least one of two modes: an active mode and an inactive mode; and a controller configured to operate in at least two modes: an adsorption mode and a regeneration mode.

In some embodiments, an indoor air cleaning apparatus and a method for removing at least a portion of at least one type of gas from an indoor airflow are disclosed. The apparatus may comprise a cabinet; at least one sorbent bank comprising at least one cartridge; a fan assembly comprising at least one housing including at least one housing inlet and at least one housing outlet, at least one motor and at least one impeller; and a heating element configured to operate in at least one of two modes: an active mode and an inactive mode; and a controller configured to operate in at least two modes: an adsorption mode and a regeneration mode.

An enclosure system can include an enclosure comprising at least one wall forming a first cavity. The enclosure system can further include a moisture control system in communication with the enclosure, wherein the moisture control system controls at least one condition within the cavity of the enclosure, where the at least one condition affects an amount of moisture within the first cavity. The moisture control system can include a sensor that measures an amount of moisture in desiccant disposed within a desiccant vessel. The moisture control system can include a structural filter and a desiccant vessel, where the structural filter is coupled to an enclosure and disposed within a cavity formed by the enclosure, where the desiccant vessel is removably coupled to the structural filter, and where the desiccant vessel is accessible from outside the enclosure.

A carrier gas recovery system for use in cold spray manufacturing recovers carrier gas utilized during the cold spray process and recycles the carrier gas for immediate use or stores the carrier gas for future use. The carrier gas recovery system includes an enclosure subsystem, a filtration subsystem, a reclamation subsystem, and a compensation subsystem. An article is placed in the enclosure and particulate matter is carried to the article on a carrier gas stream. Carrier gas in the enclosure is filtered through the filtration subsystem to remove particulate from the carrier gas, and the filtered carrier gas is fed to the reclamation subsystem. The carrier gas either flows to a gas separator, to increase the concentration of carrier gas, or to the compensation subsystem if the carrier gas concentration is sufficiently high. The carrier gas can be stored in the compensation subsystem or used in further cold spray manufacturing.

A carrier gas recovery system for use in cold spray manufacturing recovers carrier gas utilized during the cold spray process and recycles the carrier gas for immediate use or stores the carrier gas for future use. The carrier gas recovery system includes an enclosure subsystem, a filtration subsystem, a reclamation subsystem, and a compensation subsystem. An article is placed in the enclosure and particulate matter is carried to the article on a carrier gas stream. Carrier gas in the enclosure is filtered through the filtration subsystem to remove particulate from the carrier gas, and the filtered carrier gas is fed to the reclamation subsystem. The carrier gas either flows to a gas separator, to increase the concentration of carrier gas, or to the compensation subsystem if the carrier gas concentration is sufficiently high. The carrier gas can be stored in the compensation subsystem or used in further cold spray manufacturing.

Ionization systems configured with a catalyst-bearing sleeve provide improved filtration while keeping ozone levels within acceptable limits. Modular configurations provide for serviceability and replaceability. System controls monitor particulates, temperature, humidity, and other relevant factors and adjust an ionization level accordingly for optimal performance.