Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

An indoor pollution prevention system includes a plurality of gas detection modules, one or more intelligent control-driving processing devices, one or more gas-exchange processing devices, one or more intake passages, and one or more discharge passages. The intake passage is connected to the gas-exchange processing device and has an intake opening for guiding the outdoor gas into an indoor space. The discharge passage is connected to the gas-exchange processing device and has a discharge opening for discharging the air pollution source to the outdoor space. The intelligent control-driving processing device controls the gas-exchange processing device to be enabled under a surveillance condition of the gas detection module, so that the air pollution source passes through the discharge passage, filtered and purified by a cleaning and filtration assembly, and is discharged to the outdoor space, thereby allowing the indoor space to have a clean air.

An indoor pollution prevention system includes a plurality of gas detection modules, one or more intelligent control-driving processing devices, one or more gas-exchange processing devices, one or more intake passages, and one or more discharge passages. The intake passage is connected to the gas-exchange processing device and has an intake opening for guiding the outdoor gas into an indoor space. The discharge passage is connected to the gas-exchange processing device and has a discharge opening for discharging the air pollution source to the outdoor space. The intelligent control-driving processing device controls the gas-exchange processing device to be enabled under a surveillance condition of the gas detection module, so that the air pollution source passes through the discharge passage, filtered and purified by a cleaning and filtration assembly, and is discharged to the outdoor space, thereby allowing the indoor space to have a clean air.

A VOC removal system removes VOCs from an exhaust fluid of a semiconductor process. The VOC removal system measures current VOC removal parameters and passes them to an analysis model trained with a machine learning process. The analysis model predicts a future VOC removal efficiency based on the current VOC removal parameters. The analysis model generates adjustment parameters based on the current VOC removal parameters and the predicted future VOC removal efficiency. A control system adjusts the VOC removal system based on the adjustment parameters.

A VOC removal system removes VOCs from an exhaust fluid of a semiconductor process. The VOC removal system measures current VOC removal parameters and passes them to an analysis model trained with a machine learning process. The analysis model predicts a future VOC removal efficiency based on the current VOC removal parameters. The analysis model generates adjustment parameters based on the current VOC removal parameters and the predicted future VOC removal efficiency. A control system adjusts the VOC removal system based on the adjustment parameters.

Deleterious gas is captured from atmospheric air using capture units dispersed across a geographic region. Each unit has a filter that is capable of capturing compounds from the gas from air when air is passed through the filter by fans. The units additionally include a sensor for sensing a level of the gas in the air. An electronic processor controls the fan, and communicates data from the sensor to other units and/or a central electronic processor. The electronic processors of the units or the central processor controls the fan speed of units in areas of higher concentration of the gas, selecting which units to become active based upon a proximity of each unit to the gas concentration, as well as a direction of movement of the concentration. A communicated presence of errors or a low battery state of a unit, is used by the processor to select other units nearby for operation instead of the affected unit.

The disclosed embodiments relate to the design of a preconcentrator system for preconcentrating air samples. This preconcentrator system includes a plurality of preconcentrators that preconcentrate the air samples prior to chemical analysis, and a delivery structure comprising a manifold that selectively routes a sample airflow to the plurality of concentrators so that the plurality of preconcentrators receive a sample airflow concurrently or individually.

A system is disclosed for providing inerting gas to a protected space. The system includes an electrochemical cell comprising a cathode and an anode separated by a separator comprising a proton transfer medium. The cathode receives air from an air source and discharges an inerting gas to the protected space. The anode receives process water and discharges oxygen and unreacted process water to a process water fluid flow path. The process water fluid flow path includes a liquid-gas separator, and the liquid-gas separator includes an inlet and a liquid outlet each in operative fluid communication with the process water fluid flow path, and a gas outlet that discharges gas removed from the process water fluid flow path.

A system is disclosed for providing inerting gas to a protected space. The system includes an electrochemical cell comprising a cathode and an anode separated by a separator comprising a proton transfer medium. The cathode receives air from an air source and discharges an inerting gas to the protected space. The anode receives process water and discharges oxygen and unreacted process water to a process water fluid flow path. The process water fluid flow path includes a liquid-gas separator, and the liquid-gas separator includes an inlet and a liquid outlet each in operative fluid communication with the process water fluid flow path, and a gas outlet that discharges gas removed from the process water fluid flow path.

A method for controlling a carbon dioxide utilization in a fuel cell assembly includes: measuring a voltage across the fuel cell assembly; determining an estimated carbon dioxide utilization of the fuel cell assembly based on at least the measured voltage across the fuel cell assembly by determining an expected voltage of the fuel cell assembly based on at least a temperature of the fuel cell assembly, a current density across the fuel cell assembly, a fuel utilization of the fuel cell assembly, and a cathode oxygen utilization of the fuel cell assembly; determining the estimated carbon dioxide utilization based on a comparison between the measured voltage and the determined expected voltage; comparing the determined estimated carbon dioxide utilization to a predetermined threshold utilization; and upon determining that the determined estimated carbon dioxide utilization is higher than the predetermined threshold utilization, reducing the carbon utilization of the fuel cell assembly.