The present disclosure provides a method for removing silicon powder in a coolant for monocrystalline silicon slicing with a diamond wire, including following steps: preparing an inorganic coagulation-inducing saline solution; mixing the inorganic coagulation-inducing saline solution with a waste coolant of the coolant after monocrystalline silicon slicing to obtain a mixture, and leaving the mixture to stand to carry out agglomeration and precipitation of the silicon powder. The inorganic coagulation-inducing saline solution has advantages of being inexpensive, non-toxic, easy to obtain, and achieving good agglomeration and precipitation. It is inexpensive to remove the silicon powder in the waste coolant for the monocrystalline silicon slicing with the diamond wire, and does not cause environmental pollution. The recovered silicon powder can be recycled and sold again, and the coolant can be reused for cutting after simple treatment.

A method is provided. The method includes: flowing chemical mechanical polishing (CMP) slurry into a filter assembly, the filter assembly including a filter element extending along a filter element axis, the flowing being via an inlet defined in a body of the filter assembly and located at a first location adjacent a first end of the filter element, the inlet extending along an inlet axis non-parallel to the filter element axis; and after flowing the CMP slurry into the filter assembly, flowing the CMP slurry out of the filter assembly via a first outlet, the first outlet defined in the body of the filter assembly and located at a second location adjacent a second end of the filter element, the first outlet extending along a first outlet axis non-parallel to the filter element axis.

A deaeration apparatus of the present invention includes a tank that stores a liquid to be deaerated, a circulation pipe having one end connected to an outflow port of the tank and the other end connected to an inflow port of the tank, a pump that is provided in the circulation pipe and sucks and feeds the liquid in the tank, and a foaming device that is provided in the circulation pipe and causes the liquid to flow through a throttle portion having a narrowed flow path section to generate air bubbles from the liquid, wherein deaeration of the liquid stored in the tank is performed by circulating the liquid between the tank and the foaming device.

A pre-filter (200) for a heavy-duty dust extractor (100), the pre-filter (200) comprising a filter aperture (210) and a filter side wall (220), where the side wall is arranged to permit a flow of air to pass the side wall and to prevent at least some particulate matter from passing the side wall, wherein the filter side wall (220) extends away from the filter aperture (210) and tapers inwards towards a center axis (260) of the filter (200) to define a filter interior volume (V), where the pre-filter (200) is arranged to hold a separating wall in position in the filter interior volume (V) to divide the filter interior volume (V) in at least two parts.