Patent classifications
B01D2251/10
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.
Method and apparatus for treating combustible and/or reactive particles, method of operating a system for producing a three-dimensional work piece and system for producing a three-dimensional work piece
In a method for treating combustible and/or reactive particles (34) which have been separated from a gas stream (32) by means of a separation device (36) an oxidizing agent is supplied to an atmosphere surrounding the particles (34) so as to cause a passivating oxidation of at least a part of the particles (34). A content of the oxidizing agent in the atmosphere surrounding the particles (34) is detected and the supply of the oxidizing agent to the atmosphere surrounding the particles (34) is controlled in dependence on the detected content of the oxidizing agent in the atmosphere surrounding the particles (34).
Decontamination of Sulfur Contaminants from a Vessel
A method for treating sulfur contaminants is provided. The method comprises introducing a methylmorpholine-N-oxide solution to a vessel, wherein the vessel comprises a water layer and a gas layer, wherein the water layer and the gas layer comprise the hydrogen sulfide; introducing methylmorpholine-N-oxide into the water layer; and treating the water layer by allowing the methylmorpholine-N-oxide to react with the hydrogen sulfide.
Method for the treatment of a flue gas stream
A sorbent composition such as for the removal of a contaminant species from a fluid stream, a method for manufacturing a sorbent composition and a method for the treatment of a flue gas stream to remove heavy metals such as mercury (Hg) therefrom. The sorbent composition includes a porous carbonaceous sorbent such as powdered activated carbon (PAC) and a solid particulate additive that functions as a flow-aid to enhance the pneumatic conveyance properties of the sorbent composition. The solid particulate additive may be a flake-like material, for example a phyllosilicate mineral or graphite.
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.
System for the Treatment of Mercaptan Contaminated Hydrocarbon Streams
A system for removing mercaptan contaminants from both liquid and gaseous hydrocarbon streams and methods thereof are described. An additive that reacts with said contaminant to form water-soluble compounds is injected into the hydrocarbon streams.
System for the Treatment of a Contaminated Hydrocarbon Streams
A system for removing contaminants from both liquid and gaseous hydrocarbon streams and methods thereof are described. An additive that reacts with said contaminant to form water-soluble compounds is injected into the hydrocarbon streams.
Method and apparatus for treating combustible and/or reactive particles, method of operating a system for producing a three-dimensional work piece and system for producing a three-dimensional work piece
In a method for treating combustible and/or reactive particles (34) which have been separated from a gas stream (32) by means of a separation device (36) an oxidizing agent is supplied to an atmosphere surrounding the particles (34) so as to cause a passivating oxidation of at least a part of the particles (34). A content of the oxidizing agent in the atmosphere surrounding the particles (34) is detected and the supply of the oxidizing agent to the atmosphere surrounding the particles (34) is controlled in dependence on the detected content of the oxidizing agent in the atmosphere surrounding the particles (34).
METHOD AND APPARATUS FOR REMOVING SULFUR OXIDES FROM GAS
Methods, apparatus, and compositions for cleaning gas. The use of segmented multistage ammonia-based liquid spray with different oxidation potentials to remove sulfur compounds from gas. The use of different oxidation potentials may reduce unwanted ammonia slip.
Method for Removing Amine From a Contaminated Hydrocarbon Streams
A method for removing amine contaminants from both liquid and gaseous hydrocarbon streams and methods thereof are described. An additive that reacts with said contaminant to form water-soluble compounds is injected into the hydrocarbon streams.