B01D2256/10

SORPTION CHAMBER WALLS FOR SEMICONDUCTOR EQUIPMENT
20220319821 · 2022-10-06 ·

A sorption structure defined in a plasma process chamber includes an inner layer having one or more heating elements to heat the sorption structure, a middle section having a coolant flow delivery network through which a coolant circulates to cool the sorption structure to a temperature to allow selective adsorption of by-products released in the process chamber, and a vacuum flow network that is connected to a vacuum line to create low pressure vacuum and remove the by-products released from the sorption structure. A lattice structure is defined over the middle section, the lattice structure includes network of openings defined in a plurality of layers to increase surface area for improved by-products adsorption. The inner section is disposed adjacent to the middle section. An outer layer of the lattice structure faces an interior region of the chamber. The openings in the layers of the lattice structure progressively increase in size from the inner layer to the outer layer, such that the outer layer provides a larger surface area for adsorbing the by-products. The vacuum line is activated during adsorption step to create a low pressure region in the lattice structure relative to a pressure in the chamber so as to adsorb the by-products. Desorption step is performed in conjunction with WAC/CWAC to reliably remove the accumulated by-products from the sorption wall.

Active controlled atmosphere systems

A method is provided for operating an active controlled atmosphere (CA) system to regulate the atmosphere in a cargo storage space. The controlled atmosphere system comprises: a plurality of gas exchange modules, each being operable to vary the level of a respective component gas in the cargo storage space, and/or at least one gas exchange module operable in a plurality of different modes to vary the level of a respective component gas in the cargo storage space; and a control module configured to control operation of each gas exchange module according to a plurality of different predetermined atmospheric control logics. Each atmospheric control logic defines operational gas exchange modules and/or operational modes for use over respective operational ranges of atmospheric conditions, and each atmospheric control logic is configured to cause operation of a different combination of gas exchange modules and/or modes over a comparable operational range, independently of any setpoints for gas component levels. The method comprises: the control module selecting an operational atmospheric control logic from the plurality of different predetermined atmospheric control logics for atmospheric control of the cargo storage space; and the control module controlling operation of each gas exchange module dependent on the selected operational atmospheric control logic to regulate the atmosphere in the cargo storage space.

Systems and methods for sequencing operation of compressed air dryers

Compressed air dryer systems are described. In an aspect, a system includes, but is not limited to, a plurality of dryer modules and a controller operable to regulate a run-time of each of the plurality of dryer modules. Each dryer module is configured to direct a portion of cooling medium past a stream of compressed air. Each dryer module includes a temperature sensor in thermal communication with the portion of cooling medium, and a chiller configured to reduce a temperature of the portion of cooling medium based on the sensed temperature and a temperature set-point. The controller communicatively is coupled with the plurality of dryer modules and operable to monitor a plurality of run-times. Each run-time is associated with a corresponding dryer module. The controller is further operable to direct operation of each dryer module based on its run-time by modifying the temperature set-point of the dryer module.

MONOLAYER, COMPOSITE, GAS SEPARATION MATERIAL, FILTER, GAS SEPARATION DEVICE AND METHOD FOR MANUFACTURING COMPOSITE

A monolayer membrane containing gelling polymer particles having at least one of a basic functional group and an acidic functional group, and having a thickness of less than 5 μm. A composite having a porous carrier and gelling polymer particles having at least any one of a basic functional group and an acidic functional group and filling up the surface pores of the porous carrier. The invention can provide a novel material capable of efficiently separating an acid gas from a mixed gas.

METHOD OF CAPTURING CARBON DIOXIDE FROM A GAS MIXTURE

An aminated siliceous adsorbent, which is the reaction product of dried acidified rice husk ash having disordered mesopores and an amino silane, wherein amine functional groups are present on an external surface and within the mesopores of the dried acidified rice husk ash, and wherein the aminated siliceous adsorbent has a carbon content of 24 to 30 wt. %, based on a total weight of the aminated siliceous adsorbent. A method of making the aminated siliceous adsorbent and a method of capturing CO.sub.2 from a gas mixture with the aminated siliceous adsorbent.

Enhanced tail gas treatment of sulfur recovery unit with steam swept membranes

This invention relates to a system and method for improving sulfur recovery from a Claus unit. More specifically, this invention provides a steam swept membrane tail gas treatment system and method for treating acid gas streams and minimizing sulfur dioxide emissions therefrom.

Cyclical method of producing high-purity nitrogen and optionally a high-purity hydrocarbon from a feedstock containing nitrogen and a hydrocarbon

The invention relates to a cyclical method for producing a nitrogen fraction, the purity of which is greater than or equal to 95 mol %, and a hydrocarbon-enriched fraction from a filler containing nitrogen and a hydrocarbon, said method using a specific class of porous hybrid solids as an adsorbent in a pressure-swing adsorption (PSA) process. The invention also relates to equipment for implementing said method.

Pressure swing adsorption apparatus
09844749 · 2017-12-19 · ·

A pressure swing adsorption apparatus for the removal of one or more components such as oxygen from a mixture of gases such as air is disclosed. The apparatus includes pairs of columns (14, 16) for receiving a stream of compressed air with one column operating in a working mode whilst the other said column operates in a purging mode. The columns contain carbon molecular sieve material (26) for adsorbing oxygen and a desiccant material formed into a plurality of tubes (28).

Carbon dioxide adsorbents, production methods therof, and methods for separating carbondioxide using the same

A carbon dioxide adsorbent includes a porous metal oxide represented by Chemical Formula 1, the porous metal oxide having a specific surface area of greater than or equal to about 30 m.sup.2/g, and an average pore size of greater than or equal to about 2 nm.

Surface modified membranes for gas separation, and a method for preparing thereof

The present invention relates to a CO.sub.2 selective gas separation membrane and a method for preparing the gas separation membrane and the use thereof. The CO.sub.2 selective gas separation membrane comprises a gas permeable or porous support layer; and at least one gas permeable polymer layer, which is surface modified with polymer chains having CO.sub.2 philic groups, wherein the gas permeable polymer layer has a spatially controlled distribution of the CO.sub.2 philic groups on the surface thereof. The method of preparing the CO.sub.2 selective gas separation membrane, comprises the steps of: depositing at least one gas permeable polymer layer on a porous or gas permeable support layer to form a dense membrane, and surface modifying the dense membrane with polymer chains having CO.sub.2 philic groups, to obtain spatially controlled distribution of the CO.sub.2 philic groups on the surface thereof.