Patent classifications
B01D2256/14
METHODS FOR PRODUCING OZONE
A method for producing ozone is disclosed. The ozone is separated by an adsorbent separation system from a mixture of oxygen and ozone. The adsorbent separation system operates by adsorbing ozone at higher pressures, then desorbing the ozone at normal pressures. Increased ozone concentrations result from these steps while the oxygen component can be recovered and used in producing the mixture of oxygen and ozone.
OZONE CONCENTRATOR, SUBSTRATE PROCESSING APPARATUS, AND OZONE SUPPLY METHOD
An ozone concentrator includes: a pump provided in a supply passage through which an ozone gas flows; a flow rate controller provided in the supply passage downstream of the pump; and a pressure controller configured to control a pressure of the supply passage between the pump and the flow rate controller to a set pressure.
Perforated adsorbent particles
An adsorption vessel comprising a packed bed region of adsorbent particles contiguously arranged, comprising a perforated adsorbent particles, a gas separation process using the perforated adsorbent particles, and methods for making the perforated adsorbent particles. The perforated adsorbent particles each comprise an adsorbent material where the perforated adsorbent particles each have at least 10 channels extending through the particle. The equivalent diameter of the channels may range from 0.05 mm to 1.5 mm, and the void fraction of the channels may range from 0.05 to 0.5.
Perforated Adsorbent Particles
An adsorption vessel comprising a packed bed region of adsorbent particles contiguously arranged comprising a perforated adsorbent particles, a gas separation process using the perforated adsorbent particles, and methods for making the perforated adsorbent particles. The perforated adsorbent particles each comprise an adsorbent material where the perforated adsorbent particles each have at least 10 channels extending through the particle. The equivalent diameter of the channels may range from 0.05 mm to 1.5 mm, and the void fraction of the channels may range from 0.05 to 0.5.