A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.

A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.

Provided is a gas separation membrane that can be used continuously. The gas separation membrane comprises: a porous support membrane that contains an aromatic polyamide in which an aromatic ring has been replaced with a chloro group; and a separation functional layer that is disposed on the surface of the porous support membrane and contains a cross-linked polyamide obtained by polycondensation of a polyfunctional amine and a polyfunctional acid halide.

Apparatus, methods and uses for separating gas mixtures of at least two different gases under magnetic field and employing a membrane are described.

The invention relates to a novel storage material on the basis of nanoporous silicon dioxide particles for the adsorption of chlorine, to the use of said storage material for chlorine recovery and for chlorine liquefaction for the purpose of storing, transport and cleaning.

A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

A xenon capture system that reduces the concentration of xenon in a carrier gas is disclosed. An example xenon capture system includes a carrier gas with a first concentration of xenon that flows through an intake into a chamber. Within the chamber is a reaction area that has at least one peripheral sidewall. The reaction area operates at a predetermined temperature, flow rate, and low pressure. Within the reaction area is at least one xenon capture mechanism that is at least partially formed of a transition metal. When the carrier gas is exposed to the xenon capture mechanism, the xenon capture mechanism adsorbs xenon from the carrier gas. The carrier gas, with a second concentration of xenon, exits the chamber through the exhaust outlet.

Device and method for purifying a gas mixture to produce a concentrated gas, notably neon, starting from a mixture comprising neon, said device including, in a cold box housing a cryogenic purification circuit comprising, in series, at least one unit for purifying the mixture by cryogenic adsorption at a temperature between 65K and 100K and notably 65K, then a unit for cooling the mixture to a temperature between 25 and 65 K and then a unit for cryogenic distillation of the mixture to produce the concentrated liquid at the outlet of the cryogenic distillation unit, characterized in that the unit for cooling the mixture to a temperature between 25 and 65 K comprises at least one cryocooler that extracts thermal power from the mixture via a heat exchanger.

Recovering helium from a gaseous stream includes contacting an acid gas removal membrane with a gaseous stream to yield a permeate stream and a residual stream, removing a majority of the acid gas from the residual stream to yield a first acid gas stream and a helium depleted clean gas stream, removing a majority of the acid gas from the permeate stream to yield a second acid gas stream and a helium rich stream, and removing helium from the helium rich stream to yield a helium product stream and a helium depleted stream. A helium removal system for removing helium from a gaseous stream including hydrocarbon gas, acid gas, and helium includes a first processing zone including a first acid gas removal unit, a second processing zone including a second acid gas removal unit, a third processing zone, and a helium purification unit.

An ultrathin high permselectivity carbon molecular sieve membrane (CMSM) for industrial gas separations is provided. The CMSM includes porous metal or ceramic supports to provide superior stability at high temperatures, pressures and chemical environments. The CMSM also offers the potential for cost-effective gas processing while overcoming disadvantages found in alternative media that are fragile and susceptible to shock due to thermal cycling and prone to end-sealing problems under industrial conditions.