A method for producing fluorine gas including a fluorination step of obtaining a reaction mixture containing a major fluorinated substance that is a target component generated by fluorination of a raw material compound and by-product hydrogen fluoride, a separation step of separating the reaction mixture to obtain a main product component containing the major fluorinated substance and a by-product component containing the by-product hydrogen fluoride, a purification step of purifying the by-product component to obtain a recovered hydrogen fluoride component in which a concentration of an organic substance is reduced and a concentration of the by-product hydrogen fluoride is increased, an electrolysis step of performing electrolysis using the recovered hydrogen fluoride component as at least a part of an electrolyte to produce fluorine gas, and an introduction step of introducing the fluorine gas obtained in the electrolysis step into a reaction field for fluorination in the fluorination step.

There is provided a method for producing high-purity bromine pentafluoride while leaving a less amount of an unreacted fluorine gas. The method for producing bromine pentafluoride includes a reaction step of feeding a bromine-containing compound, which is at least one of a bromine gas and bromine trifluoride, and a fluorine gas to a reactor to give a (fluorine atom):(bromine atom) molar ratio, that is, F/Br of 3.0 or more and 4.7 or less and reacting the bromine-containing compound and the fluorine gas to each other to obtain a reaction mixture containing bromine pentafluoride and bromine trifluoride; and a separation step of separating bromine pentafluoride and bromine trifluoride in the reaction mixture from each other.

There is provided a halon purification method capable of simply, safely, and efficiently removing mixed bromine molecules to obtain high purity halon. The halon purification method is a method for removing bromine molecules from crude halon containing halon and the bromine molecules, and the method includes: a contact step of bringing the crude halon into contact with an absorbing liquid containing an aqueous solution containing metal iodide to obtain a mixed liquid containing the crude halon and the absorbing liquid; and a separation step of separating the halon from the mixed liquid to obtain the halon and the absorbing liquid having absorbed the bromine molecules.

A filtering cartridge for storage and separation of gases from chamber emissions. The invention further discloses a method to separate the waste streams of gases from the effluents on the basis of physical properties such as polarity, thermal stability, molecular weight, molecular size and others. The toxic components from the effluent are safely stored and recycled, and high-pressure storage of gases is avoided and they are stored at or below atmospheric pressure.

A system is provided, wherein the system includes a remote plasma source, a process chamber, a pressure swing adsorption filter and a chemical adsorption filter. The pressure swing adsorption filter and the chemical adsorption filter the exhaust from the process chamber to produce a filtered exhaust being a fluorine rich gas stream.

The present invention relates to a method for producing a molding catalyst for obtaining chlorine (Cl.sub.2) through an oxidation reaction of hydrogen chloride (HCl), and more specifically, to a method for producing an oxidation reaction molding catalyst by adding heterogeneous material to a ruthenium oxide (RuO.sub.2)-supported catalyst having titanium oxide (TiO.sub.2) as a supporting body, and molding so as to be usable in a fixed bed reactor to produce chlorine (Cl.sub.2) from hydrogen chloride (HCl).

A method for separating a fluorocarbon gas including feeding a mixed gas that includes two or more kinds of fluorocarbon gases having different molecular diameters from each other to a porous membrane and separating a gas composition in which a mixing ratio of one kind of a fluorocarbon gas selected from the two or more kinds of fluorocarbon gases is increased or a single gas, where the porous membrane includes amorphous silica formed by a sol-gel method.

There is disclosed a fluid separation system (16) for recovering a target fluid from a fluid mixture. The fluid recovery system (16) comprises an inlet (18) that is configured to receive the fluid mixture; a first compressor (24) for compressing the fluid mixture; a return line (26) that comprises a return line inlet (28) that is disposed downstream of the first compressor, such that, in use, 2024/023507 the fluid mixture is divided into a first portion (34) and a second portion (36); and a separation device (30) that is disposed downstream of the return line inlet (28). The return line (26) is configured to return the second portion (36) to upstream of the first compressor (22). In use, the first portion (34) is provided to the separation device (30) at a predetermined flow rate.

The present invention relates to a method for producing a molding catalyst for obtaining chlorine (Cl.sub.2) through an oxidation reaction of hydrogen chloride (HCl), and more specifically, to a method for producing an oxidation reaction molding catalyst by adding heterogeneous material to a ruthenium oxide (RuO.sub.2)-supported catalyst having titanium oxide (TiO.sub.2) as a supporting body, and molding so as to be usable in a fixed bed reactor to produce chlorine (Cl.sub.2) from hydrogen chloride (HCl).