A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

To provide a flux recovery device which can remove a flux in a pipe and a method for removing a flux. A flux recovery device 200 according to the present invention recovers a flux from a gaseous mixture containing a flux component, the flux recovery device 200 including: a separation unit 400 configured to separate the flux from the gaseous mixture using water, and to discharge the water containing the flux; a pipe 500 including a second connection port 540, an inclined portion 580, and a first connection port 520, the water containing the flux flowing into the pipe 500 from the second connection port 540, the inclined portion 580 being positioned on a downstream side of the second connection port 540, and extending in a direction intersecting with a vertical line extending in a gravity direction, and the first connection port 520 being positioned on an upstream side of the inclined portion 580; and a pump 220 configured to supply water from the first connection port 520.

An audio speaker having a speaker housing surrounding a back volume that is divided into a rear cavity behind a speaker driver and an adsorption cavity separated from the rear cavity by a permeable partition, is disclosed. More particularly, the adsorption cavity may be defined between the speaker housing and the permeable partition, and may be directly filled with adsorptive particles to adsorb gas during sound generation. The permeable partition may allow the gas to flow between the rear cavity and the adsorption cavity, and may retain the adsorptive particles within the adsorption cavity. Other embodiments are also described and claimed.

A biogas collection and purification system that includes a plurality of sources of biogas and a network of conduits configured to convey the biogas from the sources to a central processing facility for processing the biogas into methane. The central processing facility removes impurities to convert biogas to biomethane and may include an H.sub.2S removal stage; an activated carbon scrubber; a gas drier; and a carbon dioxide removal stage. The facility also has a biomethane gas compressor configured to deliver the biomethane for use in power plants, for CNG production. Ancillaries to the system include fuel cells for direct electricity generation from biogas/biomethane.

A system including biogas purification and provides biogas as feedstock to a solid oxide fuel cell. The biogas purification treatment process provides a polished biogas that is substantially free of carbonyl sulfides and hydrogen sulfide. The system uses a biogas treatment apparatus, that includes apparatus such as a packed columns, comprising copper oxide or potassium permanganate packing material, and an activated carbon component configured to treat the biogas by polishing it to remove carbonyl sulfides and deleterious trace residues, such as hydrogen sulfide, that were not removed by any prior bulk H2S removal steps. In addition, an oil removal device is used to remove any entrained fine oil droplets in the biogas. A polished biogas having in the range of 60% methane is charged to the fuel cell. Electricity generated may be fed into a grid or used directly as energy to charge electrical-powered vehicles, for example. Energy credits are tracked in real time and are appropriately assigned.

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A gas solution production apparatus includes a gas dissolving unit that dissolves gas of a second raw material into a liquid of a first raw material to generate a mixture liquid, and a gas-liquid separation unit that subjects the liquid mixture generated by the gas dissolving unit to gas-liquid separation into a gas solution that is supplied to a use point and an exhaust gas that is discharged from an exhaust port. The gas-liquid separation unit includes a capacity variable section that changes a capacity of an internal space of the gas-liquid separation unit.

An audio speaker having a speaker housing surrounding a back volume that is divided into a rear cavity behind a speaker driver and an adsorption cavity separated from the rear cavity by a permeable partition, is disclosed. More particularly, the adsorption cavity may be defined between the speaker housing and the permeable partition, and may be directly filled with adsorptive particles to adsorb gas during sound generation. The permeable partition may allow the gas to flow between the rear cavity and the adsorption cavity, and may retain the adsorptive particles within the adsorption cavity. Other embodiments are also described and claimed.

Various example embodiments described herein relate to a sensor assembly. The sensor assembly includes a first sensor cover and a second sensor cover. The first sensor cover is disposed on a first end of the sensor assembly and the second sensor cover is disposed on a second end of the sensor assembly. The first sensor cover defines a first capillary and the second sensor cover defines a second capillary therethrough. The sensor assembly further includes a first sensing unit, a second sensing unit, and a filter. The first sensing unit and the second sensing unit are disposed between the first sensor cover and the second sensor cover. In some example embodiments, the filter is reactive to a target gas and thereby prevents an inflow of the target gas through the second capillary into the sensor assembly.

An air-regulating freshness-preserving storage device comprises a container having a first storage space defined therein; and an oxygen removal device configured to remove a part or all of oxygen in air in the first storage space, so as to obtain the air rich in nitrogen, low in oxygen, and favorable for food preservation.

An oxygen generation device having a compressed air supply device, air cooling coil, a fan, pneumatic valve system, a housing, at least one media insert, an on-off switch, a printed circuit board, and a touch screen. The pneumatic valve system includes an air inlet port, a first air outlet port connected to the inlet of the first media insert, a second air outlet port connected to the inlet of the second media insert. The air inlet port receives compressed air from the compressed air supply device and alternatingly provides the compressed air to one of the first media insert and the second media insert. The lower housing includes check valve ball moveable between the first position and the second position and alternatingly controlling a flow of compressed air through the first media insert and the second media insert.