Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas from a process chamber into a plasma source via a foreline; injecting a reagent into the foreline; forming a plasma in the plasma source from the exhaust gas and the reagent; and injecting a cleaning gas into the foreline, wherein the cleaning gas and the reagent are different gases.

An ionization device may be configured to be portable, and to rest on a surface such as a floor or desk top. The ionization device includes an air-intake port, an ion generator, an ozone catalyst for removing at least some ozone from air, and an air discharge. Air enters the device through the air-intake port, and at least some of the air is ionized to remove particulates. The air is then moved past or through the ozone catalyst to remove at least some of the ozone from the air. A controller may be used to monitor particulates, temperature, humidity, and/or other relevant factors and/or to adjust the ionization level.

Provided are a method for treating sulfur hexafluoride and an apparatus for collecting and treating by-products. The method for treating sulfur hexafluoride, and the apparatus for collecting and treating by-products according to the present invention are a significantly effective method and apparatus capable of safely treating sulfur hexafluoride at low cost.

Systems and methods for treating automotive vehicle emissions on board an automotive vehicle include the use of waste heat recovery, electrochemical water splitting, phototcatalytic water splitting, and selective catalytic reduction. Waste heat recovery is used to power electrochemical water splitting, or photocatalytic water splitting. Photons collected from a solar panel are used in photocatalytic water splitting, or in photo-assisted selective catalytic reduction. Hydrogen gas generated by water splitting is used in conjunction with catalytic reduction units to catalytically reduce NOx in an engine exhaust gas.

A carbon dioxide recovery device includes: an adsorption unit that includes a plurality of electrochemical cells, each of which includes a working electrode and a counter electrode; a receiver that receives the adsorption unit; a plurality of gas inlets, each of which is provided to the receiver and is configured to introduce a subject gas containing carbon dioxide; and a plurality of doors, each of which is configured to open and close a corresponding one of the gas inlets. The gas inlets are respectively configured to introduce the subject gas into an inside of the receiver in a corresponding direction perpendicular to a cell stacking direction of the electrochemical cells and are configured to introduce the subject gas into the receiver from all around the receiver along a circumferential direction of the receiver that is perpendicular to the cell stacking direction.

The present disclosure is directed to ion generator device supports. An ion generator device support is configured to retain an ion generator device in a cavity formed by a plurality of walls of the ion generator device support.

An isolation chip for separating and isolating target particles from a bioliquid sample includes a reagent reservoir, a first filtration membrane, a second filtration membrane, a first chamber, and a second chamber. The reagent reservoir includes a first sidewall and a second sidewall opposite to the first sidewall. The first filtration membrane is disposed at an upper portion of the first sidewall. The reagent reservoir defines a first window at a lower portion of the first sidewall. The second filtration membrane is disposed at the second sidewall. The first chamber is connected to the reagent reservoir through the first filtration membrane. The second chamber is connected to the reagent reservoir through the second filtration membrane. A device and a method for detecting the target particles are further provided.

The present invention discloses a near-infrared regenerative intelligent fiber-based adsorptive material and a preparation method and use thereof. The material is obtained by chemically grafting a stepwise dual-temperature stimuli-responsive polyethyleneimine onto a carboxylated cellulose nanofiber matrix to prepare a stepwise dual-temperature stimuli-responsive intelligent nanofiber, and combining the stepwise dual-temperature stimuli-responsive intelligent nanofiber with a photosensitizer having near-infrared stimuli-response to prepare a stepwise dual-temperature/near-infrared stimuli-responsive intelligent nanofiber, and then by using a crosslinking agent to directly crosslink and combine the stepwise dual-temperature/near-infrared stimuli-responsive intelligent nanofiber with a hyperbranched polyamine in one step. The material has a stepwise dual-temperature/near-infrared stimuli-response, high density of amino group (greater than 14 mmol/g), and nano cavities.

A system and method for reduction of Nitrogen Oxide emissions from marine engines by converting Nitrogen Oxide into Nitrogen is disclosed. The modular reactive cyclic induction apparatus connects to the exhaust of a conventional diesel marine engine and uses air pressure and the sodium chloride in seawater to create a molecular reaction to break down Nitrogen Oxide into Nitrogen by use of an induction apparatus. The system can also include a loop for removing Carbon Dioxide through electrolysis, and removes other environmental pollutants as well, including for example Sulphur oxides, hydrocarbons, and particulate matter during the process.

An acid component removal device for removing an acid component from an acid gas absorbent containing an amine, comprising: an anode; a cathode; and an electrodialysis structure having four compartments formed by arranging an first membrane which is either an anion exchange membrane or a cation exchange membrane, a second membrane which is a bipolar membrane, and a third membrane which is either an anion exchange membrane or a cation exchange membrane and which is the other of the first membrane, in this order, from the anode end to the cathode end between the anode and the cathode, with a space each between the membranes.