Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.

A device controls levels of carbon dioxide and water in a controlled environment. The device comprises a first electrode chamber, which receives an input fluid comprising first concentrations of carbon dioxide and water and is configured to deliver a first output fluid having concentrations of carbon dioxide and water lower than the first concentrations to a first environment, and a second electrode chamber having an outlet configured to deliver a second output fluid having third concentrations of carbon dioxide and water to a second environment. A reduction catalyst layer in the first electrode chamber reduces carbon dioxide and water in the input fluid to form ionic carrier species, an ion-transporting membrane is positioned between the first and second electrode chambers and comprises carrier species, and an oxidation catalyst layer in the second electrode chamber oxidizes the ionic carrier species to form carbon dioxide and water.

The abatement apparatus includes a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of an effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This allows the apparatus to be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials.

A fluid injection system includes a mixing chamber locatable in an exhaust gas conduit upstream of a selective catalytic reduction device for providing an exhaust gas flow path and space for receiving injected fluid, an injector with a plurality of bundled capillary tubes each having an inlet configured to receive a fluid for injection into the chamber and an outlet wherein the injector is mounted on the chamber with the tube outlets in fluid communication with the chamber space, a base plate disposed in the chamber spaced from and aligned with the bundled tubes, a voltage supply connected to the tubes and to the base plate for providing a charge to the tubes and to the base plate to create an electric field to the fluid in the tubes, and a valve disposed on a wall of the chamber for at least one of priming and purging of the tubes.

The present invention generally relates to methods and systems for carrying out a pH-influenced chemical and/or biological reaction. In some embodiments, the pH-influenced reaction involves the conversion of CO.sub.2 to a dissolved species.

An air purification system that includes a housing including a pedestal and an outer shell, wherein the outer shell is operable between an extended configuration and a compacted configuration, and includes a filter arranged within the housing along a flow path between an inlet and an outlet of the housing.

The present invention generally relates to methods and systems for carrying out a pH-influenced chemical and/or biological reaction. In some embodiments, the pH-influenced reaction involves the conversion of CO.sub.2 to a dissolved species.

The present invention achieves a moisture absorbing material which enables efficient dehumidification without supercooling or large heat quantity; and a dehumidifier in which the moisture absorbing material is used. The moisture absorbing material can be a dried product of a polymer gel in which an interpenetrating polymer network structure or a semi-interpenetrating polymer network structure is formed by (a) a stimuli-responsive polymer whose affinity with water changes reversibly in response to an external stimulus and (b) a hydrophilic polymer.

Described herein are various embodiments of an oxygen concentrator system. In some embodiments, oxygen concentrator system includes one or more components that improve the useful lifetime of gas separation adsorbents.

A system for flameless catalytic destruction of fugitive hydrocarbons which preferably includes multiple catalytic heaters placed face to face in an array and spaced such that an optional infrared absorber may be placed between the face to face heaters. The heater, absorber and air are preferably held in equilibrium and keep the heater surface below the ignition temperature of any hydrocarbon which might be present in the drafted air.