Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas from a process chamber into a plasma source via a foreline; injecting a reagent into the foreline; forming a plasma in the plasma source from the exhaust gas and the reagent; and injecting a cleaning gas into the foreline, wherein the cleaning gas and the reagent are different gases.

Ionization systems configured with a catalyst-bearing sleeve provide improved filtration while filtering ozone. Modular configurations provide for serviceability and replaceability. System controls may be used to monitor particulates, temperature, humidity, and other relevant factors and adjust an ionization level accordingly.

A water-harvesting system can operate with a material that can take up and release water with minimum energy requirements and powered by low-grade energy sources, such as sunlight, in order to potentially allow its deployment into households, especially those located in sunny regions. A water-harvesting method and system can include vapor adsorption using a porous metal-organic framework. In certain embodiments, the porous metal-organic framework can include metal-organic framework in ambient air with low relative humidity, typical of the levels found in most dry regions of the world.

Ionization systems configured with a catalyst-bearing sleeve provide improved filtration while keeping ozone levels within acceptable limits. Modular configurations provide for serviceability and replaceability. System controls monitor particulates, temperature, humidity, and other relevant factors and adjust an ionization level accordingly for optimal performance.

Ionization systems configured with a catalyst-bearing sleeve provide improved filtration while filtering ozone. Modular configurations provide for serviceability and replaceability. System controls may be used to monitor particulates, temperature, humidity, and other relevant factors and adjust an ionization level accordingly.

A piezoelectric deionization system uses a piezoid bed made up of multiple piezoids for deionization of a working fluid containing charged particles, ions, and/or ionic complexes. The working fluid may be salt water in various embodiments. A uniaxial compressive force is applied to the piezoid bed causing a piezoelectric effect in the piezoids, resulting in a piezoelectric field generated by each particle, which attracts charged particles, ions, and/or ionic complexes contained in the working fluid. The piezoid bed is contained in a closed chamber to which the uniaxial compressive force is applied. Monocrystalline quartz particles or another suitable piezoid, natural or synthetic, may be used. A fluid is used to purge the piezoid bed of charged particles, ions, and/or ionic complexes after the piezoid bed becomes saturated through use. The working fluid may be used to purge the piezoid.

An acid component removal device for removing an acid component from an acid gas absorbent containing an amine, comprising: an anode; a cathode; and an electrodialysis structure having four compartments formed by arranging an first membrane which is either an anion exchange membrane or a cation exchange membrane, a second membrane which is a bipolar membrane, and a third membrane which is either an anion exchange membrane or a cation exchange membrane and which is the other of the first membrane, in this order, from the anode end to the cathode end between the anode and the cathode, with a space each between the membranes.

An assembly for treating gaseous emissions has a substrate along which extend cells for the passage of emissions gas. Lengths of conducting wire are located in a set of the cells and an induction heating coil is used to generate a varying electromagnetic field, so as to inductively heat the lengths of conducting wire. The substrate body has a front for entry of flowing emissions gas to be treated into the substrate body and a back for exit of treated gaseous emissions gas. The lengths of conducting wire have projections extending from the front and/or back of the substrate body so that when inductively heated, the wire parts in the substrate body heat the surrounding substrate and the wire projections heat the flowing emissions gas directly.

The present invention generally relates to methods and systems for capturing a Lewis acid gas (e.g., CO.sub.2). In some embodiments, the methods and systems utilize an ionic liquid incorporated into one or more electrochemical cells.

An air purification system that includes a housing including a pedestal and an outer shell, wherein the outer shell is operable between an extended configuration and a compacted configuration, and includes a filter arranged within the housing along a flow path between an inlet and an outlet of the housing.