A filter element assembly includes a filter body and an auxiliary filter. The filter body includes a sidewall around a hollow core. Further the filter body and auxiliary filter are both received and held on a support including a base and a cage.

A filter module for the separation of overspray from overspray-laden cabin air of coating plants, in particular of painting plants, having a filter housing which delimits a filter chamber through which overspray-laden cabin air can be conducted in a main flow direction. A plurality of separation elements composed of a separation material which is permeable to the cabin air is arranged in the filter chamber such that a flow labyrinth is formed between the separation elements. A separation device and a plant for coating articles having such a filter module is also provided.

A filter element assembly includes a filter body and an auxiliary filter. The filter body includes a sidewall around a hollow core. Further the filter body and auxiliary filter are both received and held on a support including a base and a cage.

The disclosed technology relates generally to semiconductor manufacturing, and more particularly to precursor delivery in cyclic deposition. In one aspect, a thin film deposition system comprises a thin film deposition chamber configured to deposit a thin film. The thin film system additionally comprises a precursor source connected to the thin film deposition chamber by a precursor delivery line, wherein the precursor delivery line comprises a filter connected to the precursor source via a first valve, and a by-pass line connected to the precursor source via a second valve.

A multi-channel particle separator includes a plurality of vanes. Each vane is spaced apart from at least one other adjacent vane to define a flow channel, and includes a leading edge, a trailing edge, a first side wall, a second sidewall, and a splitter. The first side wall extends between the leading edge and the trailing edge. The second side wall is spaced apart from the first side wall and extends from the leading edge toward the trailing edge. The splitter may be rotationally coupled to the trailing edge and extend toward the leading edge. The splitter is spaced apart from the first side wall to define a scavenge volume and is rotatable between an extended position and a retracted position. The vanes may also or instead be coupled to a ring-shaped structure.

A filter element assembly includes a filter body and an auxiliary filter. The filter body includes a sidewall around a hollow core. Further the filter body and auxiliary filter are both received and held on a support including a base and a cage.

A method of oxidation-combusting an ingot grower comprises a) blocking between the filter housing and the exhaust pipe, b) forming the filter housing in a vacuum state, and c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust the filter housing.

A filter element is disclosed having an annular filter medium surrounding an open interior, and an end plate secured on an axial end face of the filter medium, the end plate having radially extending crossflow channels formed in the interior of the end plate with flow controlled by a bypass valve. A filter housing is also disclosed cooperating with the filter element to provide a fluid drainage arrangement.

An air filtration equipment, the air filtration equipment is installed in an ventilation area at an interface between indoor and outdoor spaces of a fixed space, the equipment including: a sensor configured to sense information on inhalable particles in outside air; at least one filtering layer configured to filter out inhalable particles in air entering from the ventilation area into the indoor space; and a control device connected with the sensor and the at least one filtering layer and configured to control the at least one filtering layer to expand according to the information sensed by the sensor, such that the expanded at least one filtering layer covers the ventilation area. Also, a screen window and a window are provided.

Disclosed is an air filtration system for filtering air of an enclosed volume comprising a channel for receiving external air; a recirculation channel for receiving recirculated air from the enclosed volume; an air filter device for filtering an air flow into the enclosed volume, the air flow comprising at least one of the external air and the recirculated air; and an electronic control unit for determining a loading status of at least one air filter of the air filter device, based on: a level of particulate pollution in the external air, a level of particulate pollution in the recirculated air, a flow of the external air in the channel, a flow of the recirculated air in the recirculation channel, and an efficiency of the at least one filter of the air filter device. Further disclosed is a control device for the system, and a method for operating the system.