A desiccant member is disclosed that comprises a polymer material and a bentonite material. The desiccant member is capable of absorbing moisture from an atmosphere containing siloxanes, organic compounds having a boiling point greater than 60 C, or mixtures thereof. The desiccant member is contamination resistant and may be regenerable. The desiccant member may have a high working moisture capacity that is suited for demanding environments.

A perception and planning system includes a system frame and one or more cooling fans mounted on a first side of the system frame to generate an airflow flowing outwardly to remove at least a portion of the heat generated by the processors. The system further includes an air filtering module mounted on a second side of the system frame to filter the air flow flowing inwardly to remove durst or contaminated material from the airflow. The air filtering module includes an air filter, a mounting plate, and a cover plate. The mounting plate can be mounted on the second side of the system frame to receive the air filter. The mounting plate includes one or more magnets. The cover plate can be attached to the mounting plate by a magnetic force generated from the magnets to keep the air filter between the mounting plate and the cover plate.

A coolant gas, multi-filter filtering unit, for use with servers and other electrical equipment that can be utilized as a retrofit device for existing servers or provided as OEM equipment with the server is described. A series of static centrifugal force filtering units are position upstream of a replaceable surface filter. The surface filter can be a HEPA filter, or alternatively include an absorbent layer or separate third filter of charcoal to remove VOCs.

The present disclosure provides styrene/acrylonitrile fine fibers, filter media including styrene/acrylonitrile fine fibers, a recirculation filter including a styrene/acrylonitrile fine fiber or filter media, and methods.

The application describes MEMS devices and associated methods of fabrication. The MEMS devices comprise a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate.

In a gas supply device that supplies gas to a target space through a filter unit, the filter unit is composed of a filter box and an air filter housed in the filter box, and the air filter is a filter having a filter substrate made of a membrane filter and a fibrous coating layer covering a surface of the filter substrate through which air is sucked.

A filter holding device includes an opening portion and a filter. The opening portion communicates an inside of the filter holding device with an outside of the filter holding device. The filter includes a first side and a second side. The first side faces the inside of the filter holding device. The second side faces the outside of the filter holding device. The filter has a lower weight density per unit volume at the first side than at the second side. At least a side face of the first side of the filter is covered with an air-impermeable member. The side face is a lateral face of the filter at the first side.

The technology disclosed herein relates to filter assemblies and methods of making filter assemblies. One filter assembly has a first sheet of filter media having a first perimeter region and a second sheet of filter media having a second perimeter region. The first perimeter region and the second perimeter region are bonded in a rim region. A plurality of adsorbent beads are disposed between the first sheet of filter media and the second sheet of filter media, and a substantial portion of the plurality of adsorbent beads are unbonded. Other embodiments are also described.

The inventive concepts provide apparatuses for transferring a substrate and/or apparatuses for processing a substrate including the same. The substrate transferring apparatus including a chamber, a filter assembly disposed in a chamber to provide external air into the chamber, and an additional assembly including a moisture removing part and a purge gas providing part sequentially stacked on the filter assembly may be provided. The filter assembly may be coupled to the additional assembly.

An extreme ultraviolet radiation source is provided, including a vessel, an optical collector, and a gas scrubber. The vessel has a gas inlet and a gas outlet. The optical collector is disposed within the vessel and configured to collect and reflect extreme ultraviolet light produced in the vessel. A cleaning gas is introduced into the vessel through the gas inlet to clean the surface of the optical collector. The gas scrubber is disposed within the vessel, arranged such that the cleaning gas leaves the vessel through the gas outlet after flowing through the gas scrubber. The gas scrubber has a number of gas passages to allow the cleaning gas to flow through, and the size of the gas passage close to the gas outlet is smaller than the size of the gas passage away from the gas outlet.