The present invention provides a low cost surge tank design for pressure swing adsorption plants that does not contain internal structures, achieves good mixing and is 15-20% less expensive than the conventional designs. The surge tank is characterized by having a first inlet located in the upper quadrant of said surge tank and a second inlet located in the lower quadrant of said surge tank, wherein said inlets configured to fluidly couple the interior of said surge tank with the exterior of said surge tank; and wherein said first and second inlets are tangentially configured to allow flow to enter said surge tank in diametrically opposite directions.

The present disclosure generally provides methods of providing at least metastable radical molecular species and/or radical atomic species to a processing volume of a process chamber during an electronic device fabrication process, and apparatus related thereto. In one embodiment, the apparatus is a gas injection assembly disposed between a remote plasma source and a process chamber. The gas injection assembly includes a body, a dielectric liner disposed in the body that defines a gas mixing volume, a first flange to couple the gas injection assembly to a process chamber, and a second flange to couple the gas injection assembly to the remote plasma source. The gas injection assembly further includes one or more gas injection ports formed through the body and the liner.

A device for mixing and metering of at least two gases, comprising two bodies that can be displaced relative to each other, wherein margins of the bodies are in contact with one another and between these margins at least two rectangular openings for one gas each can be formed, wherein a displacement of the bodies relative to each other automatically causes an increase of one opening and a decrease of the other opening, wherein the resulting total cross-section of the openings remains constantly the same here. Moreover, the device comprises a control element which is arranged adjacent to the two bodies and in contact therewith, wherein the control element can be translationally displaced in a continuous manner between a closed position and an open position in order to close or to open the openings.

Embodiments of the subject invention are directed to methods and apparatus for inducing mixing in a fluid using one or more plasma actuators. In an embodiment, a pair of electrodes is positioned near a fluid and a voltage potential is applied across the pair of electrodes such that a plasma discharge is produced in the fluid. In an embodiment, the plasma discharge creates turbulence in the fluid thereby mixing the fluid. In an embodiment, flow structures, such as vortices are generated in the fluid. In an embodiment, the fluid is mixed in three dimensions. In an embodiment, a plurality of fluids are mixed. In an embodiment, solids are dispersed in at least one fluid. In an embodiment, heat or other properties are dispersed within at least one fluid. In an embodiment, at least one of the pair of electrodes has a serpentine shape.

A hydrogen supply apparatus includes: an air path having an inlet and an outlet; a fan that is disposed in the air path and produces a flow of air from the inlet to the outlet; a first pipe having an end that forms a first supply port through which to supply hydrogen gas to the air path; a flow control device that is attached to the first pipe and adjusts a flow rate of the hydrogen gas; and a hydrogen gas sensor, disposed downstream of the fan or the end in a direction of flow of the air that detects a concentration of the hydrogen gas in the air path, where the end is disposed between the fan and the outlet or between the fan and the inlet in the air path.

A fuel cell system includes a fuel cell stack, a mixed gas supply passage, and an agitation mixer. The fuel cell stack includes a plurality of fuel cells each including a power generation portion. The fuel cells are stacked. The mixed gas supply passage is configured to communicate with the fuel cell stack. The mixed gas supply passage is configured to supply a mixed gas to the fuel cell stack. The mixed gas is a mixture of a fuel gas and a fuel off-gas that has been discharged from the fuel cell stack. The agitation mixer is provided in the mixed gas supply passage. The agitation mixer is configured to apply a swirling force to the mixed gas. The agitation mixer includes a guide rib configured to guide liquid water contained in the mixed gas to a side opposite to the power generation portion-side.

A device for mixing two gas streams, the device includes: an inner pipe, wherein: the inner pipe is arranged substantially concentrically within an outer pipe and forms an annulus between an outer diameter of the inner pipe and an inner diameter of the outside pipe; the inner pipe is closed at a downstream end; and the inner pipe comprises a plurality of perforations; and the outer pipe, wherein: a downstream end of the outer pipe extends into a reactor; the outer pipe is closed at the downstream end; and the downstream end of the outer pipe comprises a plurality of perforations. The mixed gas stream can enter the reactor. The reactor can be an Oxidative Coupling of Methane (OCM) reactor.

A system for producing a high precision blended gas product (BGP), the system comprising: a supply of a volatile analyte in liquid form; a supply of an inert carrier gas; a supply of at least one diluent gas; an analyte gasifier (AG) subsystem for receiving the volatile analyte in liquid form, nebulizing the volatile analyte and mixing the nebulized volatile analyte with the inert carrier gas so as to form an analyte gas stream (AGS); and a gas mixer (GM) subsystem for receiving the AGS from the AG subsystem and mixing the AGS with the supply of at least one diluent gas so as to produce the BGP, wherein the GM subsystem comprises: a gas analyzer (GA) for receiving the AGS and analyzing the same; a gas proportioner for receiving the AGS from the GA, receiving the at least one diluent gas, and proportioning the AGS and the at least one diluent gas based on the results of the GA so as to provide a proportioned AGS and a proportioned at least one diluent gas; and a gas mixing chamber for receiving the proportioned AGS and the proportioned at least one diluent from the gas proportioner so as to produce the BGP.

The present teachings provide apparatus and methods for mixing a reformable fuel and/or steam with an oxygen-containing gas and/or steam to provide a gaseous reforming reaction mixture suitable for reforming with a reformer and/or a fuel cell stack of a fuel cell unit and/or fuel cell system.

Examples of a substrate processing apparatus includes a chamber, a manifold including a tubular portion provided above the chamber, a first introduction pipe provided on a side surface of the tubular portion, a second introduction pipe provided on the side surface of the tubular portion, and a gas guide portion configured to once guide, in a direction opposite to the chamber, gases introduced from the first introduction pipe and the second introduction pipe into the tubular portion, and then introduce the gases into the chamber, a first gas source configured to supply gas into the first introduction pipe, and a second gas source configured to supply gas into the second introduction pipe.