A method for removing boron is provided, which includes (a) mixing a carbon source material and a silicon source material in a chamber to form a solid state mixture, (b) heating the solid state mixture to a temperature of 1000 C. to 1600 C., and adjusting the pressure of the chamber to 1 torr to 100 torr. The method also includes (c) conducting a gas mixture of a first carrier gas and water vapor into the chamber to remove boron from the solid state mixture, and (d) conducting a second carrier gas into the chamber.

Disclosed are a graphene material production device and a system including the device. The device includes: a first reaction component, a second reaction component and a negative pressure generating component. The first reaction component includes a first reaction chamber and a first material outlet arranged at a bottom of the first reaction chamber. The second reaction component includes a second reaction chamber and a second material inlet. A connecting passage between the first material outlet and the second material inlet is provided with a valve. A suction hole of the negative pressure generating component is provided inside the second reaction chamber. The use of the device in the process of producing a graphene material by a redox method can overcome the problem that the viscous material is difficult to transfer, thereby reducing the production difficulty and effectively improving the production efficiency of graphene materials.

The present invention relates to a preparation method of trifluoroamine oxide comprising the steps of producing an intermediate product by reacting nitrogen trifluoride and nitrous oxide in the presence of a reaction catalyst; and producing trifluoroamine oxide by reacting the intermediate product with sodium fluoride in vacuum condition up to 100 mmHg.

Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.

A coupling structure of a UHV characterization instrument-interconnected in-situ reaction cell and a built-in mass spectrometer electro quadrupole is provided. One end of a stainless steel capillary is connected to a segregated in-situ reaction cell gas output pipeline, and the other end of the stainless steel capillary is a sampling port. A sampling gas flowing out of the sampling port is divided into two gas paths, wherein, one gas path enters a vacuum buffer chamber through a valve with a low flow control ratio, and the other gas path enters a mass spectrometer electro quadrupole through a valve with a high flow control ratio. When the mass spectrometer electro quadrupole performs sampling gas composition analysis on the interconnected in-situ reaction cell, its sampling time delay is negligible and the sampling analysis requirements for in-situ analysis of continuity, real-time and high time resolution are met.

Disclosed are a graphene material production device and a system including the device. The device includes: a first reaction component, a second reaction component and a negative pressure generating component. The first reaction component includes a first reaction chamber and a first material outlet arranged at a bottom of the first reaction chamber. The second reaction component includes a second reaction chamber and a second material inlet. A connecting passage between the first material outlet and the second material inlet is provided with a valve. A suction hole of the negative pressure generating component is provided inside the second reaction chamber. The use of the device in the process of producing a graphene material by a redox method can overcome the problem that the viscous material is difficult to transfer, thereby reducing the production difficulty and effectively improving the production efficiency of graphene materials.

A coupling structure of a UHV characterization instrument-interconnected in-situ reaction cell and a built-in mass spectrometer electro quadrupole is provided. One end of a stainless steel capillary is connected to a segregated in-situ reaction cell gas output pipeline, and the other end of the stainless steel capillary is a sampling port. A sampling gas flowing out of the sampling port is divided into two gas paths, wherein, one gas path enters a vacuum buffer chamber through a valve with a low flow control ratio, and the other gas path enters a mass spectrometer electro quadrupole through a valve with a high flow control ratio. When the mass spectrometer electro quadrupole performs sampling gas composition analysis on the interconnected in-situ reaction cell, its sampling time delay is negligible and the sampling analysis requirements for in-situ analysis of continuity, real-time and high time resolution are met.

Various embodiments may provide an apparatus for maintaining a pressure different from atmospheric pressure. The apparatus may include a plurality of structural members coupled together to at least partially define a space which is configured to have a pressure different from atmospheric pressure, a structural member of the plurality of structural members being a support structure having an array of holes. The apparatus may also include a film covering a surface of the support structure having an array of holes. The film maybe adapted to allow a predetermined range of wavelengths of electromagnetic waves to pass through.

A system and a method for producing silicon from a SiO.sub.2-containing material that includes solid SiO.sub.2. The method uses a reaction vessel including a first section and a second section in fluid communication with said first section. The method includes: heating the SiO.sub.2-containing material that includes the solid SiO.sub.2 to a SiO.sub.2-containing material that includes liquid SiO.sub.2, at a sufficient temperature to convert the solid SiO.sub.2 into the liquid SiO.sub.2; converting, in the first section, the liquid SiO.sub.2 into gaseous SiO.sub.2 that flows to the second section by reducing the pressure in the reaction vessel to a subatmospheric pressure; and reducing, in the second section, the gaseous SiO.sub.2 into liquid silicon using a reducing gas. The reducing of the pressure is performed over a continuous range of interim pressure(s) sufficient to evaporate contaminants from the SiO.sub.2-containing material, and removing by vacuum, the one or more evaporated gaseous contaminants.

A method of manufacturing bulked continuous carpet filament from recycled polymer. In various embodiments, the method includes: (1) reducing recycled polymer material into polymer flakes; (2) cleansing the polymer flakes; (3) melting the flakes into a polymer melt; (4) removing water and contaminants from the polymer melt by dividing the polymer melt into a plurality of polymer streams and exposing those streams to pressures below 25 millibars or another predetermined pressure; (5) recombining the streams; and (6) using the resulting purified polymer to produce bulked continuous carpet filament.