Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

An apparatus and method for delivery of additives(s), e.g., catalyst, co-catalyst, scavengers, and/or other reaction- or product-modifying agents, to a reaction or mixing site, such as a reaction vessel, offers the capability for multi-additive delivery and customization of additive selection, flow and flow rate, and if desired, mixing thereof, without production train shutdowns. The invention includes at least two additive sources that are detachably connected, with conduit, to the reaction or mixing site, and a process control means, preferably automated, that is capable of initiating, terminating, and determining the rate of flow from the additive sources.

A chemical solution supply part for supplementing the chemical solution to the chemical solution storage tank and a purge gas supply part for supplying N.sub.2 gas as a purge gas to the chemical solution storage tank are in communication with the chemical solution storage tank, and a first manometer serving as a pressure measurement part is arranged on the chemical solution storage tank. In addition, a drain piping is connected to a head portion of the plunger pump, and an automatically controlled air-bleed valve, which is an air-bleed mechanism, is arranged on the drain piping. On the other hand, a second manometer is arranged in the middle of the chemical solution supply pipe, and a front end of the solution supply pipe on the downstream side serves as an injection point for the chemical solution S.

A chemical solution supply part for supplementing the chemical solution to the chemical solution storage tank and a purge gas supply part for supplying N.sub.2 gas as a purge gas to the chemical solution storage tank are in communication with the chemical solution storage tank, and a first manometer serving as a pressure measurement part is arranged on the chemical solution storage tank. In addition, a drain piping is connected to a head portion of the plunger pump, and an automatically controlled air-bleed valve, which is an air-bleed mechanism, is arranged on the drain piping. On the other hand, a second manometer is arranged in the middle of the chemical solution supply pipe, and a front end of the solution supply pipe on the downstream side serves as an injection point for the chemical solution S.

The present disclosure is directed to a system and a method for hydride generation. In some embodiments, the system includes an assembly for introducing hydride generation reagents into a mixing path or mixing container, where the assembly includes first chamber configured to contain a first hydride generation reagent and a second chamber configured to contain a second hydride generation reagent. A first plunger is configured to translate within the first chamber and cause a displacement of the first hydride generation reagent, and a second plunger is configured to translate within the second chamber and cause a displacement of the second hydride generation reagent. The assembly further includes base coupling the first plunger and the second plunger together.

The present invention is directed to a process for the production of exhaust catalysts. In particular, the process describes a way of coating a substrate in a manner which finally leads to reduced coating times.

A reverse-phase suspension polymerization process for the manufacture of polymer beads comprising forming aqueous monomer beads comprising an aqueous solution of water-soluble ethylenically unsaturated monomer or monomer blend and polymerizing the monomer or monomer blend to form polymer beads while suspended in a non-aqueous liquid, and recovering polymer beads, in which the process comprises, providing in a vessel (1) a volume (2) of non-aqueous liquid wherein the volume of non-aqueous liquid extends between at least one polymer bead discharge point (3) and at least one monomer feed point (4), feeding the aqueous monomer or monomer blend through orifices (5) into, or onto, the non-aqueous liquid to form aqueous monomer beads, allowing the aqueous monomer beads to flow towards the polymer bead discharge point subjecting the aqueous monomer beads to polymerization conditions to initiate polymerization to form polymerizing beads, wherein the polymerizing beads have formed polymer beads when they reach the polymer bead discharge point, removing a suspension of the polymer beads in non-aqueous liquid from the vessel at the polymer bead discharge point and recovering water soluble or water swellable polymer beads from the suspension. The invention also relates to the apparatus suitable for carrying out a reverse-phase suspension polymerization and polymer beads obtainable by the process or employing the apparatus.

A distance measuring device includes a measuring member holding a length measuring instrument and at least one rail member (base member) on which the measuring member is movably disposed. When a straight line parallel to a direction in which the measuring member disposed on the base member moves is defined as a reference line, an angle formed by a straight line parallel to an axial length direction of a reaction tube and the reference line, which are on an identical plane, is constant for the plurality of reaction tubes disposed side by side along the reference line. A measurement direction of the length measuring instrument is parallel to the axial length direction of the reaction tube in a state where the measuring member is disposed on the base member. The measuring member is disposed on the base member to be able to sequentially move.

A processing system and method of producing a particulate material are provided. The processing system includes a system inlet connected to one or more gas lines to deliver one or more gases into the processing system, a buffer chamber, a dispersion chamber, a heating assembly, a reaction chamber and a system outlet for delivering particulate material out of the processing system. The method includes delivering one or more gases via a system inlet into a buffer chamber of a processing system, jetting a liquid mixture into one or more streams of droplets using one or more power jet modules into the processing system, delivering flows of one or more heated gases via a heating assembly, forming a reaction mixture and processing the reaction mixture at a reaction temperature into a product material inside the reaction chamber.