A substrate processing method includes a liquid film forming step of forming a liquid film, a liquid film heat retaining step of keeping the liquid film warm, a gas phase layer forming step of forming a gas phase layer which holds the processing liquid on a center portion of the liquid film, an opening forming step of forming an opening in the center portion of the liquid film by excluding the processing liquid held by the gas phase layer, a substrate rotating step of rotating the substrate around a rotation axis, and an opening expanding step of expanding the opening, while a state in which the gas phase layer is formed on an inner circumferential edge of the liquid film is maintained, by moving the irradiation region toward a circumferential edge portion of the substrate while the liquid film heat retaining step and the substrate rotating step are performed.

A substrate processing method includes a liquid film forming step of forming a liquid film, a liquid film heat retaining step of keeping the liquid film warm, a gas phase layer forming step of forming a gas phase layer which holds the processing liquid on a center portion of the liquid film, an opening forming step of forming an opening in the center portion of the liquid film by excluding the processing liquid held by the gas phase layer, a substrate rotating step of rotating the substrate around a rotation axis, and an opening expanding step of expanding the opening, while a state in which the gas phase layer is formed on an inner circumferential edge of the liquid film is maintained, by moving the irradiation region toward a circumferential edge portion of the substrate while the liquid film heat retaining step and the substrate rotating step are performed.

A pulsed waterjet apparatus comprising a water pump for generating a pressurized waterjet, an ultrasonic signal generator for generating an ultrasonic signal and an ultrasonic nozzle comprising an ultrasonic transducer for converting the ultrasonic signal into vibrations that pulse the pressurized waterjet to generate a pulsed waterjet, an exit orifice through which the pulsed waterjet exits and an inflow inlet axially aligned with the exit orifice.

A pulsed waterjet apparatus comprising a water pump for generating a pressurized waterjet, an ultrasonic signal generator for generating an ultrasonic signal and an ultrasonic nozzle comprising an ultrasonic transducer for converting the ultrasonic signal into vibrations that pulse the pressurized waterjet to generate a pulsed waterjet, an exit orifice through which the pulsed waterjet exits and an inflow inlet axially aligned with the exit orifice.

Microfluidic delivery systems for dispensing a fluid composition into the air comprising microfluidic die and at least one heating element that is configured to receive an electrical signal comprising a certain on-time and wave form to deliver a fluid composition into the air.

Microfluidic delivery systems for dispensing a fluid composition into the air comprising microfluidic die and at least one heating element that is configured to receive an electrical signal comprising a certain on-time and wave form to deliver a fluid composition into the air.

Various examples are provided related to low pressure delivery, e.g., less than 250 psi at the point of application, of plural component system from unpressurized parts A and B material supplies. In one example, a system includes a polyurethane spray foam (SPF) raw material supply including parts A and B and a fluid handling system that can deliver the SPF raw material at low pressure to a metal spray gun in metered amounts through separate material fluid paths/conduits via a heated hose length and a whip hose. The fluid handling system can also deliver air at low pressure to the spray gun through separate air stream paths so that the air is communicated to the part A and B material conduits forward of the part A and B material input locations, where they are supplied separately to a mixing nozzle that is engaged at an end of the spray gun.

Various examples are provided related to low pressure delivery, e.g., less than 250 psi at the point of application, of plural component system from unpressurized parts A and B material supplies. In one example, a system includes a polyurethane spray foam (SPF) raw material supply including parts A and B and a fluid handling system that can deliver the SPF raw material at low pressure to a metal spray gun in metered amounts through separate material fluid paths/conduits via a heated hose length and a whip hose. The fluid handling system can also deliver air at low pressure to the spray gun through separate air stream paths so that the air is communicated to the part A and B material conduits forward of the part A and B material input locations, where they are supplied separately to a mixing nozzle that is engaged at an end of the spray gun.

An indirectly heated capillary aerosol generator comprises a capillary tube adapted to form an aerosol when liquid material in the capillary tube is heated to volatilize at least some of the liquid material therein and a thermally conductive material in thermal contact with the capillary tube. The indirectly heated capillary aerosol generator provides substantially even and uniform heating across the heated length of the capillary tube.

An indirectly heated capillary aerosol generator comprises a capillary tube adapted to form an aerosol when liquid material in the capillary tube is heated to volatilize at least some of the liquid material therein and a thermally conductive material in thermal contact with the capillary tube. The indirectly heated capillary aerosol generator provides substantially even and uniform heating across the heated length of the capillary tube.