A mixing valve includes a mixing chamber, a first flow control valve having a first flow control opening, and a second flow control valve having a second flow control opening. The first and second flow control openings each have a diameter of approximately six millimeters and the mixing valve has a flow coefficient of approximately 2.5 when both flow control valves are in a mid-open position.

The present application provides a detaching and installing device for a gas distribution plate of an etching machine, and the etching machine, and relates to the field of semiconductor manufacturing technologies, aiming at addressing the problems that it is quite difficult to detach and install the gas distribution plate of the etching machine and that the gas distribution plate is highly likely to be polluted. The detaching and installing device for the gas distribution plate of the etching machine includes a gripping member, a connecting member and a fixing member, the fixing member is detachably connected to the gas distribution plate of the etching machine, and the gripping member and the fixing member are connected through the connecting member; the gripping member is provided thereon with a gripping portion for grip by a user hand.

A hose nozzle assembly which is capable of heating water comprising an internal heating chamber with at least one heating element. The hose nozzle assembly is able to heat water from a common garden hose with the ability to control both flow rates and temperature.

A hose nozzle assembly which is capable of heating water comprising an internal heating chamber with at least one heating element. The hose nozzle assembly is able to heat water from a common garden hose with the ability to control both flow rates and temperature.

A microfluidic delivery device is provided. The microfluidic delivery device includes a housing electrically connectable with a power source. A cartridge is releasably connectable with the housing. The cartridge has a reservoir for containing a fluid composition and microfluidic die in fluid communication with the reservoir. The microfluidic die is configured to dispense substantially all of the fluid composition in an upward direction relative to horizontal. The microfluidic delivery device also includes a fan that is connected with the housing. The fan is configured to generate air flow that converges with and redirects the fluid composition dispensed from the microfluidic die in a first direction to a second direction that is different from the first direction.

A microfluidic delivery device is provided. The microfluidic delivery device includes a housing electrically connectable with a power source. A cartridge is releasably connectable with the housing. The cartridge has a reservoir for containing a fluid composition and microfluidic die in fluid communication with the reservoir. The microfluidic die is configured to dispense substantially all of the fluid composition in an upward direction relative to horizontal. The microfluidic delivery device also includes a fan that is connected with the housing. The fan is configured to generate air flow that converges with and redirects the fluid composition dispensed from the microfluidic die in a first direction to a second direction that is different from the first direction.

The invention includes an upper sealing member fixed near a ceiling wall of a processing chamber and a lower sealing member provided movably in a vertical direction below the upper sealing member. A sealed space is formed by moving down the lower sealing member to a lower limit position where an upper end part of the lower sealing member is aligned or partially overlapped with a lower end part of the upper sealing member in the vertical direction. On the other hand, a conveyance space for carrying the substrate to and from a substrate holder is formed by moving up the lower sealing member to a retracted position above the lower limit position.

The invention includes an upper sealing member fixed near a ceiling wall of a processing chamber and a lower sealing member provided movably in a vertical direction below the upper sealing member. A sealed space is formed by moving down the lower sealing member to a lower limit position where an upper end part of the lower sealing member is aligned or partially overlapped with a lower end part of the upper sealing member in the vertical direction. On the other hand, a conveyance space for carrying the substrate to and from a substrate holder is formed by moving up the lower sealing member to a retracted position above the lower limit position.

A mixing valve that includes a housing having a first outlet, a second outlet, and a mixing chamber; a first flow control valve for controlling flow through the first outlet to the mixing chamber; and a second flow control valve for controlling flow through the second outlet to the mixing chamber; wherein the housing has a length dimension, a width dimension, and a thickness dimension, and the largest of these dimensions is no more than approximately 65 millimeters.

A mixing valve that includes a housing having a first outlet, a second outlet, and a mixing chamber; a first flow control valve for controlling flow through the first outlet to the mixing chamber; and a second flow control valve for controlling flow through the second outlet to the mixing chamber; wherein the housing has a length dimension, a width dimension, and a thickness dimension, and the largest of these dimensions is no more than approximately 65 millimeters.