In processing a peripheral edge part of a substrate by a processing liquid, upward scattered liquid droplets may be produced. Accordingly, in the invention, the processing liquid is caused to land on the peripheral edge part of the substrate from a discharge port while the discharge port is positioned to a bevel processing position lower than an eaves part of a cup in a vertical direction with the peripheral edge part of the substrate covered vertically from above by the eaves part. Thus, the eaves part collects upward scattered liquid droplets. As a result, the re-adhesion of the upward scattered liquid droplets to the substrate and the scattering thereof to a surrounding atmosphere are suppressed.

In processing a peripheral edge part of a substrate by a processing liquid, upward scattered liquid droplets may be produced. Accordingly, in the invention, the processing liquid is caused to land on the peripheral edge part of the substrate from a discharge port while the discharge port is positioned to a bevel processing position lower than an eaves part of a cup in a vertical direction with the peripheral edge part of the substrate covered vertically from above by the eaves part. Thus, the eaves part collects upward scattered liquid droplets. As a result, the re-adhesion of the upward scattered liquid droplets to the substrate and the scattering thereof to a surrounding atmosphere are suppressed.

The invention includes an upper sealing member fixed near a ceiling wall of a processing chamber and a lower sealing member provided movably in a vertical direction below the upper sealing member. A sealed space is formed by moving down the lower sealing member to a lower limit position where an upper end part of the lower sealing member is aligned or partially overlapped with a lower end part of the upper sealing member in the vertical direction. On the other hand, a conveyance space for carrying the substrate to and from a substrate holder is formed by moving up the lower sealing member to a retracted position above the lower limit position.

The invention includes an upper sealing member fixed near a ceiling wall of a processing chamber and a lower sealing member provided movably in a vertical direction below the upper sealing member. A sealed space is formed by moving down the lower sealing member to a lower limit position where an upper end part of the lower sealing member is aligned or partially overlapped with a lower end part of the upper sealing member in the vertical direction. On the other hand, a conveyance space for carrying the substrate to and from a substrate holder is formed by moving up the lower sealing member to a retracted position above the lower limit position.

A programmable, electronically controlled sprinkler system has a hermetically sealed internal chamber which encloses all of the internal water flow, valves, mechanical and rotational components and a plurality of magnetic coupling arrangements which allow external motors to control operation of the internal mechanical components without requiring any hydraulic seals.

A programmable, electronically controlled sprinkler system has a hermetically sealed internal chamber which encloses all of the internal water flow, valves, mechanical and rotational components and a plurality of magnetic coupling arrangements which allow external motors to control operation of the internal mechanical components without requiring any hydraulic seals.

A material applicator for controlling application of at least one material on a substrate includes a housing and an array plate with an applicator array positioned within the housing. The applicator array has a plurality of micro-applicators and each of the plurality of micro-applicators has an ultrasonic transducer, a material inlet, a reservoir, and a micro-applicator plate with a plurality of apertures. The applicator plate is in mechanical communication with the ultrasonic transducer such that at least one material is ejected through the plurality of apertures as atomized droplets when the ultrasonic transducer vibrates the micro-applicator plate.

A material applicator for controlling application of at least one material on a substrate includes a housing and an array plate with an applicator array positioned within the housing. The applicator array has a plurality of micro-applicators and each of the plurality of micro-applicators has an ultrasonic transducer, a material inlet, a reservoir, and a micro-applicator plate with a plurality of apertures. The applicator plate is in mechanical communication with the ultrasonic transducer such that at least one material is ejected through the plurality of apertures as atomized droplets when the ultrasonic transducer vibrates the micro-applicator plate.

A product system for an agricultural sprayer includes a product tank configured to store an agricultural product. A reclaim system can be configured to provide the agricultural product within a flow assembly to a product tank. A computing system can be communicatively coupled to the reclaim system. The computing system can be configured to receive information indicative of one or more characteristics of the agricultural product inputted into the fill station during a fill mode; detect termination of the fill mode; and activate a reclaim mode to move the agricultural product from the flow assembly to the product tank through activation of the reclaim system, wherein one or more operating conditions of the reclaim mode are based on the one or more characteristics of the agricultural product.

An agricultural method for preventing roll-back of an agricultural vehicle may include receiving a roll-back prevention input from a speed setting device indicative of a command to increase the transmission speed of the hydrostatic transmission while a service brake of the agricultural vehicle is engaged. Further, the method may include adjusting a speed mapping for the speed setting device from a predetermined speed mapping to a roll-back speed mapping in response to the roll-back prevention input, with the roll-back speed mapping being associated with a reduced speed range. Additionally, the method may include determining a transmission control command associated with a current position of the speed setting device based on the roll-back speed mapping and controlling an operation of the hydrostatic transmission to adjust the transmission speed based at least in part on the transmission control command.