Provided is a coating die enabling coating of two layers of coating films stably. The coating die includes: a first block including a first manifold to receive a first coating liquid; a second block including a second manifold to receive a second coating liquid; and a shim sandwiched between the first block and the second block.

Provided is a coating die enabling coating of two layers of coating films stably. The coating die includes: a first block including a first manifold to receive a first coating liquid; a second block including a second manifold to receive a second coating liquid; and a shim sandwiched between the first block and the second block.

Coated articles and methods and systems for coating the articles are described herein. The methods and systems described herein include, but are not limited to, steps for actively or passively controlling the temperature during the coating process, steps for providing intimate contact between the substrate and the support holding the substrate in order to maximize energy transfer, and/or steps for preparing gradient coatings. Methods for depositing high molecular weight polymeric coatings, end-capped polymer coatings, coatings covalently bonded to the substrate or one another, metallic coatings, and/or multilayer coatings are also disclosed. Deposition of coatings can be accelerated and/or improved by applying an electrical potential and/or through the use of inert gases.

Coated articles and methods and systems for coating the articles are described herein. The methods and systems described herein include, but are not limited to, steps for actively or passively controlling the temperature during the coating process, steps for providing intimate contact between the substrate and the support holding the substrate in order to maximize energy transfer, and/or steps for preparing gradient coatings. Methods for depositing high molecular weight polymeric coatings, end-capped polymer coatings, coatings covalently bonded to the substrate or one another, metallic coatings, and/or multilayer coatings are also disclosed. Deposition of coatings can be accelerated and/or improved by applying an electrical potential and/or through the use of inert gases.

A mobile spray dispenser comprises a fluid circulation system and a heating unit. The fluid circulation system has a motorized pump capable of circulating fluid from a fluid reservoir in a high-pressure spray mode and a low-pressure recirculation mode, and of providing the fluid to a sprayer. The motorized pump draws lower power in the low-pressure recirculation mode than in the high-pressure spray mode. The heating unit is disposed within the fluid circulation system to heat the fluid to a target temperature, and comprises a primary heater and a boost heater. The primary heater is configured to be active during both the high-pressure spray mode and the low-pressure recirculation mode. The boost heater is in fluid series with the primary heater, and is configured to be active only during the low-pressure recirculation mode.

A coating apparatus includes a first vaporizer configured to vaporize a first precursor material, a second vaporizer configured to vaporize a second precursor material in series with the first vaporizer, at least one pyrolysis chamber configured to further process vaporized precursor material from one of the first vaporizer or second vaporizer, and a deposition chamber configured to receive the processed precursor materials.

A method of manufacturing self-healing polymer capable of controlling physical properties is provided. The method includes forming the self-healing polymer by adjusting a copolymer composition using monomers of glycidyl methacrylate (GMA) and 2-hydroxyethyl acrylate (HEA) and an initiator of tert-butyl peroxide (TBPO) based on an initiated chemical vapor deposition method (iCVD).

According to embodiments, a substrate treatment apparatus includes a housing, a heater and a pipe. The housing stores solution containing phosphoric acid and houses a substrate including a silicon substrate. The heater heats the solution over a normal boiling point of the solution. The pipe supplies heated solution heated by the heater into the housing while generating air bubbles.

A method of manufacturing a semiconductor includes adjusting a temperature of a substrate having a recess formed therein and accommodated in a container to a temperature within a range of 200 degrees C. or higher and 280 degrees or lower, and laminating a polyurea film in the recess in the substrate by supplying isocyanate gas and amine gas into the container.

A coating apparatus with a coating chamber configured for receiving a particulate, a horizontally-oriented rotor having a plurality of paddles mounted thereon, the rotor and the paddles defining a liquid injection path fluidly connected to a liquid injection system, the liquid injection system arranged to supply a liquid under conditions suitable to continuously coat the particulate in a manner that substantially reduces formation of caked solid-liquid mixture on inner walls of the coating chamber.