A vibrating body unit includes a vibration generator, a vibration transmitter and first amplitude enlarger. The vibration generator generates ultrasonic vibration whose amplitude has a predetermined correlation with a frequency. The vibration transmitter has a proximal end and a distal end while the vibration generator is attached from a proximal side, and transmits the ultrasonic vibration to a distal side in a longitudinal axis direction. At least one first amplitude enlarger is provided in the vibration transmitter, and enlarges the amplitude of the ultrasonic vibration at a first amplitude enlargement rate in a direction of transmission of the ultrasonic vibration, the first amplitude enlargement rate having a correlation with the frequency opposite to the predetermined correlation.

A vibrating body unit includes a vibration generator, a vibration transmitter and first amplitude enlarger. The vibration generator generates ultrasonic vibration whose amplitude has a predetermined correlation with a frequency. The vibration transmitter has a proximal end and a distal end while the vibration generator is attached from a proximal side, and transmits the ultrasonic vibration to a distal side in a longitudinal axis direction. At least one first amplitude enlarger is provided in the vibration transmitter, and enlarges the amplitude of the ultrasonic vibration at a first amplitude enlargement rate in a direction of transmission of the ultrasonic vibration, the first amplitude enlargement rate having a correlation with the frequency opposite to the predetermined correlation.

The invention relates to an ultrasonic oscillating unit that comprises a cylindrical base body having a center axis and a jacket surface into which a plurality of slits are introduced that extend obliquely to the center axis in a side view of the jacket surface.

An undulatory structure and methods for the fabrication and use thereof. The undulatory structure includes a buckled sheet and one or more work input elements for deforming the buckled sheet in an undulating manner wherein each point in a series of points on a sinuously-shaped profile of the buckled sheet travels at least partially along a figure eight-shaped path. The undulatory structure can be adapted for use as a solid-state transducer wherein the buckled sheet provides mechanical advantage without appreciable opposition from elastic restoring forces, thereby achieving improved force, displacement and efficiency characteristics.

An undulatory structure and methods for the fabrication and use thereof. The undulatory structure includes a buckled sheet and one or more work input elements for deforming the buckled sheet in an undulating manner wherein each point in a series of points on a sinuously-shaped profile of the buckled sheet travels at least partially along a figure eight-shaped path. The undulatory structure can be adapted for use as a solid-state transducer wherein the buckled sheet provides mechanical advantage without appreciable opposition from elastic restoring forces, thereby achieving improved force, displacement and efficiency characteristics.

The invention relates to a sonotrode (1) for an apparatus (40) for generating low-frequency high-power ultrasound. To be able to manufacture and permanently operate the sonotrode even with elements (2, 3) made of brittle materials, the sonotrode (1) is constructed with at least two materially interconnected elements (2, 3).

The invention relates to a sonotrode (1) for an apparatus (40) for generating low-frequency high-power ultrasound. To be able to manufacture and permanently operate the sonotrode even with elements (2, 3) made of brittle materials, the sonotrode (1) is constructed with at least two materially interconnected elements (2, 3).

Disclosed is an ultrasonic wave transmission structure which is provided on a path of ultrasonic waves to amplify incident ultrasonic waves. The ultrasonic wave transmission structure includes: multiple rings each provided with a body portion having a different radius from other body portions and spaced apart from another body portion adjacent thereto and a slit disposed between adjacent body portions; and a membrane disposed in the multiple rings, wherein the mass of the membrane is adjusted to vary a resonant frequency in multiple sub-membrane regions.

Disclosed is an ultrasonic wave transmission structure which is provided on a path of ultrasonic waves to amplify incident ultrasonic waves. The ultrasonic wave transmission structure includes: multiple rings each provided with a body portion having a different radius from other body portions and spaced apart from another body portion adjacent thereto and a slit disposed between adjacent body portions; and a membrane disposed in the multiple rings, wherein the mass of the membrane is adjusted to vary a resonant frequency in multiple sub-membrane regions.

A system for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the system comprising: a wafer holder for temporary restraining a semiconductor wafer during a cleaning process; an inlet for delivering a cleaning liquid over a surface of the semiconductor wafer; a sonic generator configured to alternately operate at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, to impart sonic energy to the cleaning liquid, the first predetermined period of time and the second predetermined period of time consecutively following one another; and a controller programmed to provide the cleaning parameters, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.