A vibrating actuator adapted to be installed within a component of an ion implanter, the vibrating actuator including a housing defining an internal cavity, and a vibrating mechanism disposed within the internal cavity, the vibrating mechanism including an actuating element and a vibratory element coupled to the actuating element, wherein when an electrical signal is applied to the actuating element, the actuating element moves the vibratory element to vibrate the housing.

A vibration generation device includes: a base configured to transmit vibration to an object; a pendulum supported by the base swingably around a rotation axis; and a driving unit including a magnet, and a coil disposed to face the magnet in a non-contact manner, and configured to swing the pendulum. One member of the magnet and the coil is provided at a position on the pendulum away from the rotation axis. The base includes a support portion supporting the pendulum swingably around the rotation axis. A part of an extension surface of a facing surface of the support portion facing the pendulum is included in a swingable range of the pendulum. The support portion is provided outside the swingable range of the pendulum when viewed along the rotation axis.

An ultrasonic sensor is provided in which, after output of an excitation signal from a transmission circuit to a drive electrode is stopped, when a suppression control signal subjected to signal amplification by a band variable calculation amplifier is supplied from a reverberant vibration suppression circuit to the drive electrode, reverberant vibration of a piezoelectric body is reduced or prevented in a reverberation suppression time period. In a reception time period after output of the suppression control signal to the drive electrode is stopped, a signal amplification frequency band of the band variable calculation amplifier is varied by a control circuit, and a signal amplification factor of the band variable calculation amplifier in a frequency band of high-frequency noise that occurs within the band variable calculation amplifier is reduced.

A harmonic disruptor including a housing having an exterior; an attachment device attached to the housing exterior; a display attached to the housing exterior; and electronics withing the housing, the electronics configured to generate a vibration configured to dampen a component vibration.

Disclosed is a multi-modal and multi-degree-of-freedom piezoelectric active vibration isolation platform and a working method therefor. The piezoelectric active vibration isolation platform includes an upper platform, a lower platform, a control module, and four vibration isolation modules, where the vibration isolation module includes a passive vibration isolation unit and an active vibration isolation unit; the passive vibration isolation unit includes an upper connector, a lower connector, a cross Hooke hinge, and a first acceleration sensor; the active vibration isolation unit includes a fixed beam, a pre-tightening bolt, a second acceleration sensor, and a driving component; the platform can provide active vibration isolation for the longitudinal (axial) vibration and the bending vibration in any radial direction of a vibration isolation object, and has the advantages of fast response, resistance to electromagnetic interference, and light weight.