A fuel tank cleaning apparatus configured to remove sludge and prevent sludge accumulation in a fuel tank. A sludge collecting pipe lays horizontally along most of a length of a floor of the fuel tank. A plurality of openings penetrate the sludge collecting pipe along its length. The plurality of openings gradually increase in diameter along the length of the sludge collecting pipe to allow for uniform suction along the entire floor of the tank. A connecting elbow fluidly connects the sludge collecting pipe to a suction pipe. A pump is attachable to the suction pipe to create a suction at the bottom of the tank. The fuel tank cleaning apparatus may be positioned during the construction of the fuel tank, may be retrofitted into existing fuel tanks, or may be integrated into the floor of the fuel tank itself.

A cleaning module, a sample analyzer with the cleaning module and a cleaning method. Wherein, the cleaning module may include a disk body assembly and a cleaning assembly. The disk body assembly may include a disk body, the cleaning assembly and the disk body may move relatively, and the disk body and the cleaning assembly complete extraction of waste fluid and cleaning on a path of moving relatively.

A scarifying rig may be mounted on the surface of a floating roof to move about the perimeter of the roof. The rig comprises a trolley, one or more support rails fixed on the trolley, and a horizontal arm mounted on the support rails for controlled movement along the support rails. A vertical rail is attached substantially to the end of the horizontal arm for reciprocating vertical movement (up and down) about the end of the horizontal arm. A nozzle assembly is mounted to the vertical rail.

Retrofit box systems to maximize operational capacity of inaccessible floors are described. The retrofit box system includes a gate complex that provides fluid communication between an inaccessible floor and a box, and a box to deliver a cleaner to the inaccessible floor and adapted for equalizing pressure when the inaccessible floor is under water while minimizing waste seepage from the retrofit box system. The retrofit box system further includes a power system and a control system to deliver the cleaner to the inaccessible floor and remove waste from the inaccessible floor and the box.

Retrofit box systems to maximize operational capacity of inaccessible floors are described. The retrofit box system includes a gate complex that provides fluid communication between an inaccessible floor and a box, and a box to deliver a cleaner to the inaccessible floor and adapted for equalizing pressure when the inaccessible floor is under water while minimizing waste seepage from the retrofit box system. The retrofit box system further includes a power system and a control system to deliver the cleaner to the inaccessible floor and remove waste from the inaccessible floor and the box.

A chamber cleaning method in accordance with an exemplary embodiment includes a chamber stabilizing process for transporting a substrate, on which a thin film deposition process has been completed, out of a chamber and processing an inside of the chamber, wherein the chamber stabilizing process includes: a cleaning process for injecting a cleaning gas into the chamber and etching and cleaning byproducts generated by the thin film deposition; and a coating process for injecting a gas including at least one among aluminum (Al), zirconium (Zr) or hafnium (Hf) into the chamber, and generating a protective film on an inner wall of the chamber and at least one surface of components installed inside the chamber.

A chamber cleaning method in accordance with an exemplary embodiment includes a chamber stabilizing process for transporting a substrate, on which a thin film deposition process has been completed, out of a chamber and processing an inside of the chamber, wherein the chamber stabilizing process includes: a cleaning process for injecting a cleaning gas into the chamber and etching and cleaning byproducts generated by the thin film deposition; and a coating process for injecting a gas including at least one among aluminum (Al), zirconium (Zr) or hafnium (Hf) into the chamber, and generating a protective film on an inner wall of the chamber and at least one surface of components installed inside the chamber.

A cleaning method according to an aspect of the present disclosure includes: supplying a halogen-containing gas that does not contain fluorine to an interior of a processing container that is capable of being exhausted via an exhaust pipe to perform a cleaning; and supplying a fluorine-containing gas to at least one of the interior of the processing container and an interior of the exhaust pipe to perform the cleaning after the supplying the halogen-containing gas to perform the cleaning.

A cleaning method according to an aspect of the present disclosure includes: supplying a halogen-containing gas that does not contain fluorine to an interior of a processing container that is capable of being exhausted via an exhaust pipe to perform a cleaning; and supplying a fluorine-containing gas to at least one of the interior of the processing container and an interior of the exhaust pipe to perform the cleaning after the supplying the halogen-containing gas to perform the cleaning.

An appliance and a method for removing deposits from interiors of receptacles or facilities by way of explosion technology. The appliance includes a supply device for providing an explosive mixture or its starting components, as well as a transport conduit that is connected to the supply device and serves for transporting explosive mixture to a cleaning location. The transport conduit is designed at least in sections as a transport hose.