A substrate processing apparatus delivers a gas between a lower surface of a substrate and a base surface of a base part to form an airflow flowing radially outward and to cause a pressure drop in a space between the substrate and the base part by the Bernoulli effect. The base surface includes a second surface sloping upward in a radially outward direction. A third surface slopes downward in a radially outward direction from the outer peripheral edge of the second surface. A fourth surface is an annular surface contiguous to the lower edge of the third surface. The fourth surface expands radially outward outside the outer peripheral edge of the substrate in the radial direction. Accordingly, it is possible to suppress adhesion of a processing liquid to the lower surface of the substrate and to improve the stability of holding the substrate.

A substrate processing apparatus delivers a gas between a lower surface of a substrate and a base surface of a base part to form an airflow flowing radially outward and to cause a pressure drop in a space between the substrate and the base part by the Bernoulli effect. The base surface includes a second surface sloping upward in a radially outward direction. A third surface slopes downward in a radially outward direction from the outer peripheral edge of the second surface. A fourth surface is an annular surface contiguous to the lower edge of the third surface. The fourth surface expands radially outward outside the outer peripheral edge of the substrate in the radial direction. Accordingly, it is possible to suppress adhesion of a processing liquid to the lower surface of the substrate and to improve the stability of holding the substrate.

Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

A cleaning device for a pair of spectacles, comprising a housing defining a cleaning space, a mounting part for holding the pair of spectacles inside said space, sets of opposing cleaning elements for cleaning opposing faces of glasses of the pair of spectacles, and a drive unit for moving the pair of spectacles and the cleaning elements relative to each other during a cleaning operation. The sets of opposing cleaning elements are positionable relative to each other between an inactive position, that is configured to have at least one of the sets of the cleaning elements lie spaced from at least one of the opposing faces of the respective glasses, and a cleaning position, that is configured to have the sets of opposing cleaning elements lie against both opposing faces of the respective glasses. Each of the cleaning elements is bar-shaped, wherein, in the cleaning position, longitudinal axis of the bar-shaped cleaning elements extend in one or more directions that are substantially parallel to the opposing faces of the glasses, and wherein the drive unit is configured to translate the pair of spectacles and the bar-shaped cleaning elements relative to each other substantially parallel to the opposing faces of the glasses while rubbing or wiping them clean.

A cleaning device for a pair of spectacles, comprising a housing defining a cleaning space, a mounting part for holding the pair of spectacles inside said space, sets of opposing cleaning elements for cleaning opposing faces of glasses of the pair of spectacles, and a drive unit for moving the pair of spectacles and the cleaning elements relative to each other during a cleaning operation. The sets of opposing cleaning elements are positionable relative to each other between an inactive position, that is configured to have at least one of the sets of the cleaning elements lie spaced from at least one of the opposing faces of the respective glasses, and a cleaning position, that is configured to have the sets of opposing cleaning elements lie against both opposing faces of the respective glasses. Each of the cleaning elements is bar-shaped, wherein, in the cleaning position, longitudinal axis of the bar-shaped cleaning elements extend in one or more directions that are substantially parallel to the opposing faces of the glasses, and wherein the drive unit is configured to translate the pair of spectacles and the bar-shaped cleaning elements relative to each other substantially parallel to the opposing faces of the glasses while rubbing or wiping them clean.

Cleaning fixtures for a component(s) are disclosed. The cleaning fixtures may include a first and second component recess configured to receive a first and second component, respectively. Each component recess may be defined between a first and second member of the cleaning fixture. The cleaning fixture may also include a first solvent conduit in fluid communication with the first component recess, and a second solvent conduit in fluid communication with the second component recess. The first and second solvent conduit may include physical characteristic(s) configured to control delivery of solvent into the respective component recess at desired fluid parameter(s). The cleaning fixture may also include a first gas conduit in fluid communication with the first component recess, and a second gas conduit in fluid communication with the second component recess. Each of the first and second gas conduit may deliver a pressurized gas to the respective component recess.

Cleaning fixtures for a component(s) are disclosed. The cleaning fixtures may include a first and second component recess configured to receive a first and second component, respectively. Each component recess may be defined between a first and second member of the cleaning fixture. The cleaning fixture may also include a first solvent conduit in fluid communication with the first component recess, and a second solvent conduit in fluid communication with the second component recess. The first and second solvent conduit may include physical characteristic(s) configured to control delivery of solvent into the respective component recess at desired fluid parameter(s). The cleaning fixture may also include a first gas conduit in fluid communication with the first component recess, and a second gas conduit in fluid communication with the second component recess. Each of the first and second gas conduit may deliver a pressurized gas to the respective component recess.

A shoelace cleaning device for containing at least one shoelace during the washing thereof. The device includes at least one perforated containment shell and central hub. In some example embodiments, the shoelace cleaning device can function as a shoe tree or shoe shaping/structuring device. A shoe cleaning device is also disclosed.

Devices and methods for cleaning an exercise mat are disclosed herein. The device includes a housing and a first pair of rollers positioned within the housing. The first pair of rollers are configured to receive the exercise mat through an inlet slot of the housing and direct the exercise mat towards an outlet slot of the housing. The device also includes a first sprayer positioned downstream of the first pair of rollers. The first sprayer is configured to apply a first fluid to at least one of two opposed surfaces of the exercise mat. The device also includes a brush positioned downstream of the first sprayer. The brush impacts the exercise mat to remove contaminants from the exercise mat after the first sprayer has applied the first fluid. The device also includes an ultraviolet light source configured to direct ultraviolet light onto the two opposed surfaces to disinfect each.