A substrate processing apparatus includes: a holder that holds a substrate; a liquid supply that sequentially supplies a first processing liquid and a second processing liquid to a main surface of the substrate held by the holder; a friction body that comes into contact with and rub the main surface of the substrate during the supply of the first processing liquid and the second processing liquid; a mover that moves a contact position of the friction body in a first axial direction and a second axial direction; and a controller that controls the liquid supply and the mover to move the contact position of the friction body in one-side direction of the first axial direction during the supply of the first processing liquid, and move the contact position of the friction body in the other-side direction of the first axial direction during the supply of the second processing liquid.

A substrate processing apparatus includes: a holder that holds a substrate; a liquid supply that sequentially supplies a first processing liquid and a second processing liquid to a main surface of the substrate held by the holder; a friction body that comes into contact with and rub the main surface of the substrate during the supply of the first processing liquid and the second processing liquid; a mover that moves a contact position of the friction body in a first axial direction and a second axial direction; and a controller that controls the liquid supply and the mover to move the contact position of the friction body in one-side direction of the first axial direction during the supply of the first processing liquid, and move the contact position of the friction body in the other-side direction of the first axial direction during the supply of the second processing liquid.

A fume extractor system and method for use with a 3D printer includes a system operable in three conditions including: continuously filtering particulates and fumes at high temperatures during a printing process without intentional removal of pressure from the print chamber; continuously filtering particulates at high temperatures during a print process with intentional removal of pressure from the print chamber, to keep noxious gases retained in the print chamber; and purging the print chamber of fumes and mixing in ambient air to cool the fumes to a temperature low enough to allow adsorption of the fumes created by the printer. The system has a first compartment holding a first filter assembly and a second compartment holding a second filter assembly.

According to an embodiment of the present invention, there are provided an exhaust assembly capable of uniformly forming an air flow in an exhaust step of discharging a gas to the outside, and a liquid processing apparatus and substrate processing equipment including the exhaust assembly. According to the present invention, the exhaust assembly that discharges a gas generated in a substrate processing process includes at least two or more intake ports into which the gas flows, a body portion that communicates with the intake ports and provides symmetrical paths for discharging the gas, a guide portion that is installed to guide a flow of the gas at the body portion, and an exhaust port from which the gas is discharged. The guide portion includes a flow guide that is installed to be adjacent to at least one of the intake ports and guides a direction of the gas to equally divide the flow of the gas, and a flow-rate guide that is installed around the intake port most adjacent to the exhaust port among the intake ports and is formed to reduce a cross-sectional area of a flow path of the gas.

According to an embodiment of the present invention, there are provided an exhaust assembly capable of uniformly forming an air flow in an exhaust step of discharging a gas to the outside, and a liquid processing apparatus and substrate processing equipment including the exhaust assembly. According to the present invention, the exhaust assembly that discharges a gas generated in a substrate processing process includes at least two or more intake ports into which the gas flows, a body portion that communicates with the intake ports and provides symmetrical paths for discharging the gas, a guide portion that is installed to guide a flow of the gas at the body portion, and an exhaust port from which the gas is discharged. The guide portion includes a flow guide that is installed to be adjacent to at least one of the intake ports and guides a direction of the gas to equally divide the flow of the gas, and a flow-rate guide that is installed around the intake port most adjacent to the exhaust port among the intake ports and is formed to reduce a cross-sectional area of a flow path of the gas.

A dedusting device, such as for a sander, for dedusting particles from a narrow edge of a workpiece has a nozzle device designed to remove the particles from the edge with a blasting fluid. The nozzle device has at least one nozzle outlet opening through which the blasting fluid emerges for dedusting in a blasting region. An exhaust air device designed to extract by suction the particles removed from the narrow edge of the workpiece (has at least one exhaust air inlet opening through which a blasting fluid containing particles enters. A supporting device which, in the operating state, is used for the workpiece to bear against. The supporting device is arranged between the nozzle device and the exhaust air device.

A laser apparatus including a stage. A target substrate is mounted on the stage. The laser apparatus further includes a coupling unit disposed below the stage and coupled with a conveying unit, the conveying unit conveying the stage. The laser apparatus additionally includes a discharge unit disposed at a predetermined position for laser machining, configured to communicate with the coupling unit when docked with the coupling unit, and configured to discharge foreign matter that is generated during laser machining.

A laser apparatus including a stage. A target substrate is mounted on the stage. The laser apparatus further includes a coupling unit disposed below the stage and coupled with a conveying unit, the conveying unit conveying the stage. The laser apparatus additionally includes a discharge unit disposed at a predetermined position for laser machining, configured to communicate with the coupling unit when docked with the coupling unit, and configured to discharge foreign matter that is generated during laser machining.

A system and method are disclosed for removal of unwanted material from additively manufactured parts by application of vibratory and/or acoustic energy. The system and method include a vibratory platform located in a chamber. Additively manufactured parts having unwanted material adhered thereto are placed on the vibratory platform. The platform is caused to vibrate thereby causing the unwanted material to detach from the parts. The system and method may also include the application of acoustic energy to cause unwanted material to detach from the parts. Advantageously, the unwanted material removed from the additively manufactured object can be recycled.

A system and method are disclosed for removal of unwanted material from additively manufactured parts by application of vibratory and/or acoustic energy. The system and method include a vibratory platform located in a chamber. Additively manufactured parts having unwanted material adhered thereto are placed on the vibratory platform. The platform is caused to vibrate thereby causing the unwanted material to detach from the parts. The system and method may also include the application of acoustic energy to cause unwanted material to detach from the parts. Advantageously, the unwanted material removed from the additively manufactured object can be recycled.