A deposition system is provided capable of cleaning itself by removing a target material deposited on a surface of a collimator. The deposition system in accordance with the present disclosure includes a substrate process chamber. The deposition includes a substrate pedestal in the substrate process chamber, the substrate pedestal configured to support a substrate, a target enclosing the substrate process chamber, and a collimator having a plurality of hollow structures disposed between the target and the substrate, a vibration generating unit, and cleaning gas outlet.

An ultrasonic cleaner includes: a cleaning tank having a recess that enables insertion of a dispensing nozzle to be cleaned; and an ultrasonic transducer having a piezoelectric element and a front mass, in which a lateral surface portion of the cleaning tank is provided with a through-hole having an opening on an outer wall surface of the cleaning tank and an inner wall surface of the recess, the front mass is inserted into the through-hole, and a tip portion of the front mass is disposed so as to emit ultrasonic waves from the side of the dispensing nozzle. Thus, it is possible to provide an ultrasonic cleaner that has a configuration suitable for mounting in a narrow space such as a conveyance rack, that generates small liquid-surface fluctuations, and that is capable of using strong ultrasonic waves to irradiate an outer peripheral portion of a nozzle.

In a pipeline inspection system, a hollow spherical ball has an internal ultrasonic vibration module, an internal battery for powering the vibration module, and an internal, wirelessly operated, control for controlling the vibration module while the ball is moving, with liquid, along the pipeline. Liquid, having a reduced oxygen content, is pumped through the pipeline, and filtered before returning to the pipeline. Each of a plurality of holes, connecting the interior to the exterior of the ball, is tapered proceeding in the direction from the interior to the exterior, resulting in the formation of a blade structure where the interior of each hole meets the outer surface of the ball at an inclined angle. When the blade structure is in contact with the wall of the pipe, and caused to vibrate by the vibration module, it is able to cut off scale from the interior of the pipe.

An object of the present invention is to provide a cavitation processing method for performing the cavitation processing on a side surface of an target hole of an workpiece. The cavitation processing method, includes: immersing a workpiece and a nozzle in a processing liquid, the workpiece having a target hole having an axial line and a side surface, the nozzle having an ejection port; and ejecting a jet of the processing liquid containing a cavity along an ejection direction, the ejection direction being inclined with respect to the axial line as viewed from perpendicular to the axial line and being inclined with respect to a normal line from the ejection port to the side surface as viewed along the axial line.

A method and system for generating and spraying massive amounts of microscopic water droplets with moderate power consumption; according to said method and system a body of water is subjected to fast rotation, and to associated centrifugal acceleration, which gives rise to strong hydrostatic pressure forcing said water to pass through dense microscopic meshes, so that from each hole in said meshes emanates a micro-jets of water; said micro-jets of water keep accelerating in the direction of centrifugal force and break up into a cloud of said microscopic droplets; forced air flow applied to said droplets pushes them out to the free atmosphere; ultrasonic cleaning, integrated into the main operational cycle, removes deposition constituents from the surface of said meshes, preventing their clogging and possible disruption of generation of said water droplets.

In a pipeline inspection system, a hollow spherical ball has an internal ultrasonic vibration module, an internal battery for powering the vibration module, and an internal, wirelessly operated, control for controlling the vibration module while the ball is moving, with liquid, along the pipeline. Liquid, having a reduced oxygen content, is pumped through the pipeline, and filtered before returning to the pipeline. Each of a plurality of holes, connecting the interior to the exterior of the ball, is tapered proceeding in the direction from the interior to the exterior, resulting in the formation of a blade structure where the interior of each hole meets the outer surface of the ball at an inclined angle. When the blade structure is in contact with the wall of the pipe, and caused to vibrate by the vibration module, it is able to cut off scale from the interior of the pipe.

A cleaning system and method uses a tank holding a fluid detergent and an equipment assembly formed from a plurality of discrete components joined together. One or more ultrasound transducers remove one or more deposits on the equipment assembly by generating and propagating high frequency ultrasound waves into the fluid detergent while the equipment assembly is in contact with the fluid detergent.

A method includes placing an additively manufactured article having one or more internal channels in a non-reactive liquid to remove remainder powder from within the one or more internal channels, wherein the non-reactive liquid is a gas at room temperature and/or pressure. Placing the additively manufactured article in the non-reactive liquid includes can include placing the additively manufactured article in liquid nitrogen.

A method includes issuing a state change fluid into an internal passage of an additively manufactured article and causing the state change fluid to change from a first state having a first viscosity to a second state that is either solid or has a second viscosity that is higher than the first viscosity within the internal passage. The method can also include causing the state change fluid to change back from the second state to the first state and flushing the state change fluid from the internal passage to remove residual powder from the additively manufactured article.

An apparatus for underwater pipes comprising an ultrasound emitting system and at least one ultrasound receiving transducer is lowered into he marine environment. During an inspection phase, an ultrasound inspection source of the ultrasound emitting system and the receiving transducer are disposed on each side of the pipe. The inspection source is activated, and an ultrasound signal captured by the receiving transducer is recorded. In response to the observation of an anomaly in the ultrasound signal captured by the receiving transducer, a power source of the ultrasound emitting system is then coupled to the pipe at the aforementioned location, and the power source is activated in order to destroy the obstruction.