A cleaning apparatus may include a cleaning chamber, a vacuum generator and an air injection module. The cleaning chamber may be configured to receive a tray, the tray may be configured to receive a plurality of objects. The vacuum generator may be configured to apply vacuum into the cleaning chamber and fix a lower surface of the tray. The air injection module may be configured to inject air to an upper surface of the tray to remove a contaminant from the objects. Thus, the cleaning apparatus may have improved cleaning efficiency without a damage of the object.

Disclosed is a substrate processing apparatus and a substrate processing method that are capable of appropriately exhausting impurities, such as fumes, generated during substrate treatment. A housing providing an inner space; a cup body that is provided in the inner space and has a treatment space with an open top; a support unit for supporting a substrate in the treatment space; an airflow supply unit installed on an upper wall of the housing and supplying descending airflow to the inner space and the treatment space; a lifting unit for changing a relative height between the substrate supported by the support unit and the cup body; a liquid supply unit for supplying a treatment liquid to the substrate supported by the support unit; an exhaust member for exhausting the inner space and the treatment space; and a partition plate that divides the inner space into an upper space and a lower space and may be provided to be movable in an up and down direction.

A method for cleaning a coupling unit for coupling a component to an article and a machine for coupling the component to the article including the coupling unit and a cleaning system of the coupling unit. The coupling unit includes a housing body having at least one seat shaped for accommodating the article, a coupling device for retaining the component, the cleaning system has a suction head and an emission mouth for emitting pressurized air connected to a compressed air circuit, and the method includes, with the housing body in a first configuration in which the housing body and the coupling device are mutually spaced apart, realizing a reciprocal operational configuration between the cleaning system and the coupling unit in which the suction head and the emission mouth are in mutual proximity with the housing body and at an inlet of the seat, activating the suction head, activating the emission mouth.

Embodiments of improved gas cabinets and associated methods are provided herein to reduce diffusion of process gas outside of a gas cabinet. In the disclosed embodiments, a gas cabinet is provided with: (a) an exhausted enclosure for housing at least one gas vessel (containing a process gas) and associated gas distribution components within an interior of the enclosure, (b) an air intake vent for drawing ambient air from outside of the exhausted enclosure into an interior of the exhausted enclosure, and (c) an air plenum that is mounted within the interior of the exhausted enclosure directly behind the air intake vent for increasing the airflow path length from the outside of the exhausted enclosure into the interior of the enclosure. By increasing the airflow path length, the air plenum provided within the gas cabinet reduces the diffusion of process gas outside of the exhausted enclosure.