Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

A method for producing a coated cutting tool for metal machining having a substrate and coating is provided. The coating includes at least one layer of (Ti,Al)N having a cubic crystal phase. The method includes the deposition of a layer of Ti.sub.1-xAl.sub.xN, 0.70≤x≤0.98, the Ti.sub.1-xAl.sub.xN having cubic crystal phase. The layer of Ti.sub.1-xAl.sub.xN is deposited by cathodic arc evaporation at a vacuum chamber pressure of from 7 to 15 Pa of N.sub.2 gas, using a DC bias voltage of from −200 to −400 V and using an arc discharge current of from 75 to 250 A. A coated cutting tool for metal machining having a coating including a (Ti,Al)N multi-layer of alternating sub-layers of at least Ti.sub.1-yAl.sub.yN and Ti.sub.1-zAl.sub.zN, 0.35≤y≤0.65 and 0.80≤z≤0.98, with only cubic phase present is also provided.

In one aspect, cutting tools are provided comprising radiation ablation regions defining at least one of refractory surface microstructures and/or nanostructures. For example, a cutting tool described herein comprises at least one cutting edge formed by intersection of a flank face and a rake face, the flank face formed of a refractory material comprising radiation ablation regions defining at least one of surface microstructures and surface nanostructures, wherein surface pore structure of the refractory material is not occluded by the surface microstructures and surface nanostructures.

Provided is a ceramic sintered body having high wear resistance and chipping resistance. Also provided are an insert, a cutting tool and a friction stir welding tool, each of which uses such a high-performance ceramic sintered body. The ceramic sintered body includes Al.sub.2O.sub.3 (alumina), WC (tungsten carbide) and ZrO.sub.2 (zirconia), wherein Zr (zirconium) element is present at either one or both of: (1) a grain boundary between crystal grains of the Al.sub.2O.sub.3; and (2) a grain boundary of crystal grains of the Al.sub.2O and crystal grains of the WC, wherein the ceramic sintered body contains 55.0 to 97.5 vol % of the WC, 0.1 to 18.0 vol % of the ZrO.sub.2, and the balance being the Al.sub.2O.sub.3, and wherein the ZrO.sub.2 is in a phase of tetragonal structure (T) or a mixed phase of tetragonal structure (T) and monoclinic structure (M).

An insert may include a sintered silicon nitride including β-Si.sub.3N.sub.4 as a main component. The area up to 0.5 mm deep from a surface of the sintered silicon nitride is a first region. The first region may include an oxygen content of less than 0.8% by mass. The first region may include ReMgSi.sub.2O.sub.5N (Re is at least one of Yb and Y). A cutting tool may include a holder that extends from a first end toward a second end and includes a pocket on a side of the first end, and the insert located at the pocket.

A cubic boron nitride (cBN)-based composite including about 30-65 vol. % cBN, about 3-30 vol. % zirconium (Zr)-containing compounds, about 0-10 vol. % cobalt-tungsten-borides (Co.sub.xW.sub.yB.sub.z), about 2-30 vol. % aluminum oxide (Al.sub.2O.sub.3), about 0.5-10 vol. % tungsten borides, and less than or equal to about 5 vol. % aluminum nitride (AlN).

An insert based on an aspect includes a first face, a second face located opposite to the first face, a third face located between the first face and the second face, and a cutting edge located on an intersection of the first face and the third face. The first face includes a first region inclined so as be close to the second face as being separated away from the cutting edge. A virtual straight line orthogonal to the cutting edge is set as a first virtual straight line in a front view of the first face. A ten-point average of roughness the first region in a direction along the first virtual straight line is expressed by Rz1a and a ten-point average of roughness of the first region in a direction along the cutting edge is expressed by Rz1b, and Rz1a is larger than Rz1b.

A coated cutting tool according to the present invention is a coated cutting tool comprising a substrate and a coating layer formed on a surface of the substrate, wherein: the coating layer comprises a lower layer, an intermediate layer formed on a surface of the lower layer, and an upper layer formed on a surface of the intermediate layer; the lower layer is a predetermined Ti compound layer with a predetermined average thickness; the intermediate layer is an α-type aluminum oxide layer with a predetermined average thickness; the upper layer is a Ti carbonitride layer with a predetermined average thickness; and a texture coefficient of a predetermined plane of each of the α-type aluminum oxide layer and the Ti carbonitride layer falls within a predetermined range.

Tool holder has a first section adapted to be connected to a machining center and a tool holding section comprising a bore with a surface defining an inner diameter of the bore. Dispersed around the surface of the bore and at least partially embedded in the surface of the bore is a joining compound having a Young's modulus greater than a Young's modulus of the surface of the bore.

A coated cutting tool includes a body and a hard and wear resistant coating on the body. The coating has at least one NbN layer with a thickness between 0.2 m and 15 m, wherein the NbN layer includes a phase mixture of a cubic phase, c-NbN, and a hexagonal phase, h-NbN.