Example electrochemical machining systems and methods for machining a surface of a sample. In particular, the system includes a nozzle configured to dispense a jet of an electrolyte solution towards the surface of the sample. A position or orientation of the nozzle can be controlled to direct the jet of the electrolyte solution from the nozzle towards an area of the surface of the sample (e.g., an area for electrochemical etching or other surface treatment). The electrochemical machining is performed by application of a charge to the nozzle and apply a charge to the sample (e.g., grounding or other charge return path), such that the nozzle and the sample define first and second electrodes of an electrolytic cell, electrically connected by the jet of electrolyte solution.

A device for the electrochemical processing of a metal workpiece, including a plurality of electrodes that by way of respective linear drive units are movable in a linear manner relative to the workpiece from an initial position to a terminal position, the electrodes having a reproduction face that is directed toward the workpiece, wherein at least three electrodes are provided, the electrodes being disposed so as to be offset around the circumference of the workpiece and by way of the reproduction faces of the electrodes during the entire readjustment movement from the initial position to the terminal position engaging across one another in portions so as to be in contact, and by way of the reproduction faces of the electrodes delimiting a fluid duct that in a closed manner encircles the circumference of the workpiece.

A device for the electrochemical processing of a metal workpiece, including a plurality of electrodes that by way of respective linear drive units are movable in a linear manner relative to the workpiece from an initial position to a terminal position, the electrodes having a reproduction face that is directed toward the workpiece, wherein at least three electrodes are provided, the electrodes being disposed so as to be offset around the circumference of the workpiece and by way of the reproduction faces of the electrodes during the entire readjustment movement from the initial position to the terminal position engaging across one another in portions so as to be in contact, and by way of the reproduction faces of the electrodes delimiting a fluid duct that in a closed manner encircles the circumference of the workpiece.

A drilling tool for use in machining a conductive work piece is provided. The tool includes a forward electrode tip that includes an outer radial portion and an inner radial portion that extends from a forward face of the outer radial portion. The tool also includes a dielectric sheath that extends circumferentially about the outer radial portion, and at least one side electrode coupled to the dielectric sheath. When electric current is supplied to the forward electrode tip and the at least one side electrode, material adjacent to the forward electrode tip and the at least one side electrode is removed from the conductive work piece. The forward electrode tip and the at least one side electrode are selectively operable to form a bore hole having a variable geometry that extends through the conductive work piece when the material is removed therefrom.

An electrode device for electrochemical workpiece machining, for example an electropolishing or electroplating process, comprises an electrode and a power supply cable that is connected to the electrode and has an electrical conductor and a multilayer cladding structure around the electrical conductor. In one embodiment, the cladding structure comprises a helical wire for transmitting shear forces via the power supply cable and a fabric hose fitted closely around the helical wire. The helical wire prevents any narrowing of the diameter of the fabric hose and consequently any longitudinal extension of the fabric hose, for which reason the latter can be used to transmit tensile forces via the power supply cable. Around the outside of the fabric hose, the power supply cable has an electrically insulating plastics sheath.

An electrode device for electrochemical workpiece machining, for example an electropolishing or electroplating process, comprises an electrode and a power supply cable that is connected to the electrode and has an electrical conductor and a multilayer cladding structure around the electrical conductor. In one embodiment, the cladding structure comprises a helical wire for transmitting shear forces via the power supply cable and a fabric hose fitted closely around the helical wire. The helical wire prevents any narrowing of the diameter of the fabric hose and consequently any longitudinal extension of the fabric hose, for which reason the latter can be used to transmit tensile forces via the power supply cable. Around the outside of the fabric hose, the power supply cable has an electrically insulating plastics sheath.

Provided is an electrode capable of increasing a degree of freedom in machining shape with a simple structure, an electrochemical machining apparatus using the electrode, an electrochemical machining method, and a product machined by the method. An electrode 4 has a core tube 41 formed of a material by which a second hole 101b having a direction or a curvature different from that of a first hole 101a having a predetermined curvature can be formed continuously from the first hole 101a and a coating 42 fixed to an outer periphery of the core tube 41.

Provided is an electrode capable of increasing a degree of freedom in machining shape with a simple structure, an electrochemical machining apparatus using the electrode, an electrochemical machining method, and a product machined by the method. An electrode 4 has a core tube 41 formed of a material by which a second hole 101b having a direction or a curvature different from that of a first hole 101a having a predetermined curvature can be formed continuously from the first hole 101a and a coating 42 fixed to an outer periphery of the core tube 41.

A chemical mechanical planarization (CMP) apparatus is provided. The CMP apparatus includes at least one platen; and a polishing pad disposed on the platen. The CMP apparatus also includes a polishing head disposed above the platen and configured to clamp a to-be-polished wafer; and a basic solution supply port disposed above the platen and configured to supply a basic solution onto a surface of the polishing pad. Further, the CMP apparatus includes a slurry arm disposed above the platen and configured to supply a polish slurry on the surface of the polishing pad; and a deionized water supply port configured to supply deionized water onto the surface of the polishing pad. Further, the CMP apparatus also includes a negative power source configured to apply a negative voltage onto the surface of the polishing pad.

Provided is an electrochemical machining apparatus, which includes an electrode (3) that form of a shape which a tube shape is extended, including a flexible conductive material, and is which an electrolyte (W) circulates from a base end side (3b) thereof toward a distal end side (3a) thereof, a current supply unit (6) that causes electric current to flow with respect to the electrode (3) in an extending direction (direction running the Y direction) in which the electrode (3) extends, and a magnetic field generation unit (7) that includes at least one pair of magnets (9) which are disposed to face the electrodes (3) a direction and apply a magnetic field in a direction (X direction) intersecting the extending direction with respect to the electrodes (3).