A machining power supply device for an electric discharge machine performs control to turn on a first semiconductor switching element, which is arranged in series between a DC power supply and a capacitor connected in parallel with a machining gap between an electrode and a workpiece, to charge the capacitor, and turn on a second semiconductor switching element, which is arranged in parallel with the capacitor and connected to a rectifier element, within a period in which the first semiconductor switching element is off.

A machining liquid is supplied to a predetermined level when a workpiece is on a table. A volume of the workpiece is obtained from a difference between the machining liquid amount at the predetermined level when a previous workpiece is not on the table, and the machining liquid amount when the workpiece is on the table. A weight of the workpiece is obtained from the obtained volume and a previously stored density of the workpiece. A weight of a mounting jig is obtained in the same procedure. A total volume of the jig and workpiece is obtained when the jig is on the table and the workpiece is fixed to the jig. The volume of the workpiece is obtained by a difference with respect to the volume of the jig. The weight of the workpiece fixed to the jig is obtained from the obtained volume and the previously stored density.

A machining liquid is supplied to a predetermined level when a workpiece is on a table. A volume of the workpiece is obtained from a difference between the machining liquid amount at the predetermined level when a previous workpiece is not on the table, and the machining liquid amount when the workpiece is on the table. A weight of the workpiece is obtained from the obtained volume and a previously stored density of the workpiece. A weight of a mounting jig is obtained in the same procedure. A total volume of the jig and workpiece is obtained when the jig is on the table and the workpiece is fixed to the jig. The volume of the workpiece is obtained by a difference with respect to the volume of the jig. The weight of the workpiece fixed to the jig is obtained from the obtained volume and the previously stored density.

A simulated current generation unit is connected in series to a power supply device for an electric discharge machine in a state in which a contact and a contact are in contact with each other and generates a simulated current (I.sub.sim) for simulating current caused by dielectric breakdown of a discharge gap constituted by a workpiece and a pipe electrode, which face each other with a predetermined gap in order to perform electrical discharge machining of the workpiece by a narrow-hole electric discharge machine, based on an applied voltage of the power supply device for an electric discharge machine. An NC device judges the presence or absence of an abnormality of the power supply device for an electric discharge machine based on the simulated current (I.sub.sim) detected by a current detection unit.

A chemical mechanical planarization (CMP) apparatus is provided. The CMP apparatus includes at least one platen; and a polishing pad disposed on the platen. The CMP apparatus also includes a polishing head disposed above the platen and configured to clamp a to-be-polished wafer; and a basic solution supply port disposed above the platen and configured to supply a basic solution onto a surface of the polishing pad. Further, the CMP apparatus includes a slurry arm disposed above the platen and configured to supply a polish slurry on the surface of the polishing pad; and a deionized water supply port configured to supply deionized water onto the surface of the polishing pad. Further, the CMP apparatus also includes a negative power source configured to apply a negative voltage onto the surface of the polishing pad.

An electrical discharge machine includes: a machining power supply having a plurality of different circuit states, and configured to be capable of being set to one circuit state of the plurality of circuit states by switching at least one of electrical connection and electrical setting; a state determining unit configured to, when each of the plurality of circuit states is set as the circuit state of the machining power supply, determine whether or not the set circuit state is normal; a failure portion specifying unit configured to specify a failure portion of the machining power supply based on a determination result with respect to each of the plurality of circuit states obtained by the state determining unit; and a reporting unit (a display unit or the like) configured to report the failure portion specified by the failure portion specifying unit to an operator.

An electrical discharge machine includes: a machining power supply having a plurality of different circuit states, and configured to be capable of being set to one circuit state of the plurality of circuit states by switching at least one of electrical connection and electrical setting; a state determining unit configured to, when each of the plurality of circuit states is set as the circuit state of the machining power supply, determine whether or not the set circuit state is normal; a failure portion specifying unit configured to specify a failure portion of the machining power supply based on a determination result with respect to each of the plurality of circuit states obtained by the state determining unit; and a reporting unit (a display unit or the like) configured to report the failure portion specified by the failure portion specifying unit to an operator.

An electrical discharge machining device for processing a workpiece by electrical discharges generated between a tool and the workpiece is provided. The electrical discharge machining device includes an electric discharger applying electric power to the tool and the workpiece to process the workpiece, and a vibration generator applying a vibration to the tool or the workpiece using a first voltage generated between the tool and the workpiece during a time when the workpiece is processed

Systems and methods for sterilization using nonthermal plasma (NTP) ionization are disclosed. An example method for inactivation of viable microorganisms includes: inactivating viable microorganisms in a predetermined volume by: installing a plurality of ceiling mounted direct current (DC) or alternating current (AC), bipolar or steady-state, ion emitter modules based on a geometry of the predetermined volume; and producing, using the plurality of ceiling mounted ion emitter modules, a DC or AC, bipolar or steady-state, nonthermal plasma (NTP), each of the ceiling mounted ion emitter modules comprising a high voltage power supply (HVPS).

A machining liquid is supplied to a predetermined level when a workpiece is on a table. A volume of the workpiece is obtained from a difference between the machining liquid amount at the predetermined level when a previous workpiece is not on the table, and the machining liquid amount when the workpiece is on the table. A weight of the workpiece is obtained from the obtained volume and a previously stored density of the workpiece. A weight of a mounting jig is obtained in the same procedure. A total volume of the jig and workpiece is obtained when the jig is on the table and the workpiece is fixed to the jig. The volume of the workpiece is obtained by a difference with respect to the volume of the jig. The weight of the workpiece fixed to the jig is obtained from the obtained volume and the previously stored density.