An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.

A substrate support and method of forming a substrate support are described herein. In one example, a substrate support includes an aluminum body having an upper surface configured to support a large area substrate, a heater element, and a filler material. The aluminum body has a groove formed therein. The heater element is disposed in the groove. The filler material is in contact with the heater element and fills the groove. The contact between the filler material and the perimeter of the heater element is the only material interface within the groove, and the filler material has a larger grain size than a grain size of the aluminum body.

A substrate support and method of forming a substrate support are described herein. In one example, a substrate support includes an aluminum body having an upper surface configured to support a large area substrate, a heater element, and a filler material. The aluminum body has a groove formed therein. The heater element is disposed in the groove. The filler material is in contact with the heater element and fills the groove. The contact between the filler material and the perimeter of the heater element is the only material interface within the groove, and the filler material has a larger grain size than a grain size of the aluminum body.

Disclosed is an amorphous, ductile brazing foil with a composition consisting essentially of Ni.sub.restCr.sub.aB.sub.bP.sub.cSi.sub.d with 2 atomic percent≦a≦30 atomic percent; 0.5 atomic percent≦b≦14 atomic percent; 2 atomic percent≦c≦20 atomic percent; 0 atomic percent≦d≦14 atomic percent; incidental impurities≦0.5 atomic percent; rest Ni, where c>b>c/15 and 10 atomic percent≦b+c+d≦25 atomic percent. Also disclosed is amorphous, ductile Ni-based brazing foil having a composition consisting essentially of Ni.sub.restCr.sub.aB.sub.bP.sub.cSi.sub.dC.sub.eX.sub.fY.sub.g wherein a, b, c, d, e, f, and g are numbers such that 2 atomic percent≦a≦30 atomic percent; 0.5 atomic percent≦b≦14 atomic percent; 2 atomic percent≦c≦20 atomic percent; 0 atomic percent≦d≦14 atomic percent; 0 atomic percent≦e≦5 atomic percent; 0 atomic percent≦f≦5 atomic percent; 0 atomic percent≦g≦20 atomic percent; wherein incidental impurities are present, if at all, in amounts≦0.5 atomic percent; wherein rest indicates that the balance of the composition is Ni; wherein c>b>c/15; wherein 10 atomic percent≦b+c+d≦25 atomic percent, wherein X is one or more of the elements Mo, Nb, Ta, W and Cu; and wherein Y is one or both of the elements Fe and Co. Also disclosed are methods for making and using these brazing foils, and brazed objects produced therefrom.

Disclosed is an amorphous, ductile brazing foil with a composition consisting essentially of Ni.sub.restCr.sub.aB.sub.bP.sub.cSi.sub.d with 2 atomic percent≦a≦30 atomic percent; 0.5 atomic percent≦b≦14 atomic percent; 2 atomic percent≦c≦20 atomic percent; 0 atomic percent≦d≦14 atomic percent; incidental impurities≦0.5 atomic percent; rest Ni, where c>b>c/15 and 10 atomic percent≦b+c+d≦25 atomic percent. Also disclosed is amorphous, ductile Ni-based brazing foil having a composition consisting essentially of Ni.sub.restCr.sub.aB.sub.bP.sub.cSi.sub.dC.sub.eX.sub.fY.sub.g wherein a, b, c, d, e, f, and g are numbers such that 2 atomic percent≦a≦30 atomic percent; 0.5 atomic percent≦b≦14 atomic percent; 2 atomic percent≦c≦20 atomic percent; 0 atomic percent≦d≦14 atomic percent; 0 atomic percent≦e≦5 atomic percent; 0 atomic percent≦f≦5 atomic percent; 0 atomic percent≦g≦20 atomic percent; wherein incidental impurities are present, if at all, in amounts≦0.5 atomic percent; wherein rest indicates that the balance of the composition is Ni; wherein c>b>c/15; wherein 10 atomic percent≦b+c+d≦25 atomic percent, wherein X is one or more of the elements Mo, Nb, Ta, W and Cu; and wherein Y is one or both of the elements Fe and Co. Also disclosed are methods for making and using these brazing foils, and brazed objects produced therefrom.

A heat exchanger includes: a header that extends in a first direction; and a plurality of heat transfer tubes that extend in a second direction crossing the first direction, each of which has one end connected to the header, and that are arranged in the first direction at intervals. The header includes: a header body having a tubular shape, a first member through which the one end of each of the heat transfer tubes extends, and a second member positioned between the header body and the first member in the second direction. The second member includes: a base portion that extends in the first direction, and a plurality of protruding portions that extend from the base portion toward the first member in the second direction.

It is an object of the present invention to effectively suppress the overflow of brazing material from each joint of a sinter-brazed component, such as a planetary carrier, obtained by brazing a plurality of members together. According to the present invention, there is provided a sinter-brazed component obtained by mating and joining a first member having a first bonding surface and a second member having a second bonding surface to each other. Brazing material is provided between the first bonding surface and the second bonding surface. The first bonding surface has a first recess, the first recess having an inner peripheral wall and a bottom surface. The inner peripheral wall extends along and on an inner side of a profile line of the first bonding surface.

It is an object of the present invention to effectively suppress the overflow of brazing material from each joint of a sinter-brazed component, such as a planetary carrier, obtained by brazing a plurality of members together. According to the present invention, there is provided a sinter-brazed component obtained by mating and joining a first member having a first bonding surface and a second member having a second bonding surface to each other. Brazing material is provided between the first bonding surface and the second bonding surface. The first bonding surface has a first recess, the first recess having an inner peripheral wall and a bottom surface. The inner peripheral wall extends along and on an inner side of a profile line of the first bonding surface.

There is provided an inexpensive bonding material, which can be easily printed on articles to be bonded to each other and which can suppress the generation of voids in the bonded portions of the articles to be bonded to each other, and a bonding method using the same. In a bonding material of a copper paste which contains a copper powder containing 0.3% by weight or less of carbon and having an average particle diameter of 0.1 to 1 μm, and an alcohol solvent, such as a monoalcohol, a diol, a triol or a terpene alcohol, the content of the copper powder is in the range of from 80% by weight to 95% by weight, and the content of the alcohol solvent is in the range of from 5% by weight to 20% by weight.

A braze composition, brazing process, and brazed article are disclosed. The braze composition includes a MCrAlY alloy at a concentration, by weight, of between 50% and 70%, where M is selected from the group consisting of nickel, cobalt, iron, alloys thereof, and combinations thereof, and a nickel-based alloy at a concentration, by weight, of between 30% and 50%. The brazing process includes forming a braze paste, brazing the braze paste to a portion of a component, and shaping the braze paste to form a brazed article. The brazed article includes a component and a braze composition brazed to the component, the braze composition including a MCrAlY alloy at a concentration, by weight, of between 50% and 70%, where M is selected from the group consisting of nickel, cobalt, iron, alloys thereof, and combinations thereof, and a nickel-based alloy at a concentration, by weight, of between 30% and 50%.