A method of fabricating an object by additive manufacturing is provided. The method includes irradiating a portion of powder in a powder bed, the irradiation creating an ion channel extending to the powder. The method also includes applying electrical energy to the ion channel, wherein the electrical energy is transmitted through the ion channel to the powder in the powder bed, and energy from the irradiation and the electrical energy each contribute to melting or sintering the portion of the powder in the powder bed.

A semiconductor fabrication apparatus includes a source chamber being operable to generate charged particles; and a processing chamber integrated with the source chamber and configured to receive the charged particles from the source chamber. The processing chamber includes a wafer stage being operable to secure and move a wafer, and a laser-charged particles interaction module that further includes a laser source to generate a first laser beam; a beam splitter configured to split the first laser beam into a second laser beam and a third laser beam; and a mirror configured to reflect the third laser beam such that the third laser beam is redirected to intersect with the second laser beam to form a laser interference pattern at a path of the charged particles, and wherein the laser interference pattern modulates the charged particles by in a micron-zone mode for processing the wafer using the modulated charged particles.

A method for manufacturing at least a metallic portion of a component: a) depositing metallic material layer by layer onto at least one building platform; b) locally fusing and/or sintering the material layer by layer by supplying energy by at least one high-energy beam in the region of a buildup and joining zone to form at least a portion of at least one component layer of the component portion and/or of the component; c) lowering the building platform layer by layer by a predefined layer thickness; and d) repeating the steps a) through c) until completion of the component portion and/or of the component. Before, during and/or after process step b), at least one further portion of the component layer is formed by locally fusing and/or sintering the material by inductive heating at a temperature or in a temperature range above the solidus temperature of the metallic material used. A system for manufacturing at least a portion of a component is also provided.

A method for manufacturing at least a metallic portion of a component: a) depositing metallic material layer by layer onto at least one building platform; b) locally fusing and/or sintering the material layer by layer by supplying energy by at least one high-energy beam in the region of a buildup and joining zone to form at least a portion of at least one component layer of the component portion and/or of the component; c) lowering the building platform layer by layer by a predefined layer thickness; and d) repeating the steps a) through c) until completion of the component portion and/or of the component. Before, during and/or after process step b), at least one further portion of the component layer is formed by locally fusing and/or sintering the material by inductive heating at a temperature or in a temperature range above the solidus temperature of the metallic material used. A system for manufacturing at least a portion of a component is also provided.

An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.

An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.

An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.

An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.

An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.

An induction heating coil includes a coil section configured to heat a treatment target by induction, a power supply section configured to supply power to the coil section, and a cooling medium passage that is arranged in the power supply section and the coil section, and is configured to supply a cooling medium to the coil section. The coil section, the power supply section, and the cooling medium passage are formed using a metal additive fabrication method.