A carbon fiber reinforced plastic structure has a low surface roughness and has reduced deformation due to residual stress, changes in temperature, etc., and a processing apparatus that uses the structure, are disclosed. The carbon fiber reinforced plastic structure (CFRP structure) includes a carbon fiber reinforced plastic member (CFRP member), and a resin layer formed on a first surface of the carbon fiber reinforced plastic member, the resin layer including an opposite surface that is opposite to a surface facing the first surface, the opposite surface having a surface roughness that is less than a surface roughness of the first surface of the carbon fiber reinforced plastic member.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

A precision machine tool includes: a tool support for supporting a tool; a tool table serving as a moving mechanism capable of moving the tool support; and one or multiple imaging devices fixed to the tool support, the imaging devices each having an imaging unit configured to capture the image of a machining point on a workpiece machined by the tool.

A precision machine tool includes: a tool support for supporting a tool; a tool table serving as a moving mechanism capable of moving the tool support; and one or multiple imaging devices fixed to the tool support, the imaging devices each having an imaging unit configured to capture the image of a machining point on a workpiece machined by the tool.

Provided is a tool holder or workpiece holder (100, 200) for coupling a tool to a drive spindle of a machine tool, said holder comprising a tool holding or workpiece holding section (110, 210) on which a clamping means (111, 211) for holding the tool is arranged, and comprising a coupling section (120, 220) for coupling to a tool interface (150, 160, 250, 260) of the drive spindle of the machine tool, in which the coupling section (120, 220) is configured as suitable for coupling both to a tool interface (150, 250) for receiving tool holders or workpiece holders that comply with a first standard and to a tool interface (160, 260) for receiving tool holders or workpiece holders that comply with a second standard.

Provided is a tool holder or workpiece holder (100, 200) for coupling a tool to a drive spindle of a machine tool, said holder comprising a tool holding or workpiece holding section (110, 210) on which a clamping means (111, 211) for holding the tool is arranged, and comprising a coupling section (120, 220) for coupling to a tool interface (150, 160, 250, 260) of the drive spindle of the machine tool, in which the coupling section (120, 220) is configured as suitable for coupling both to a tool interface (150, 250) for receiving tool holders or workpiece holders that comply with a first standard and to a tool interface (160, 260) for receiving tool holders or workpiece holders that comply with a second standard.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

A balancer mechanism for a rotating shaft is configured to prevent deviation of the axis of the rotating shaft. The balancer mechanism (20) has an assistance torque generation device (21) for generating an assistance torque. The assistance torque generation device (21) includes a cam member (24) fixed to the rotating shaft (4), a cam follower member (25) and a gas spring (27). The balancer mechanism has a reaction force generation device (22) provided for generating, a balancing moment on the rotating shaft that cancels out a tilting moment that tilts the rotating shaft (4) around a bearing member (9) in a direction to separate it from the assistance torque generation device (21) and which is caused by the biasing force of the gas spring (27).

A balancer mechanism for a rotating shaft is configured to prevent deviation of the axis of the rotating shaft. The balancer mechanism (20) has an assistance torque generation device (21) for generating an assistance torque. The assistance torque generation device (21) includes a cam member (24) fixed to the rotating shaft (4), a cam follower member (25) and a gas spring (27). The balancer mechanism has a reaction force generation device (22) provided for generating, a balancing moment on the rotating shaft that cancels out a tilting moment that tilts the rotating shaft (4) around a bearing member (9) in a direction to separate it from the assistance torque generation device (21) and which is caused by the biasing force of the gas spring (27).