An imaging unit of a processing apparatus includes a microscope, and an imaging element connected to the microscope and including a plurality of pixels that capture an image. A control unit has a target pattern storage section that stores a target pattern for performing pattern matching, and a rectilinear region detection section that detects a rectilinear region on the basis of an image from the imaging element, calculates a deviation angle between a direction of the rectilinear region detected by the rectilinear region detection section and a processing feeding direction, and adjusts a relative angle between the target pattern stored in the target pattern storage section and a characteristic pattern on a wafer, to perform the pattern matching.

An imaging unit of a processing apparatus includes a microscope, and an imaging element connected to the microscope and including a plurality of pixels that capture an image. A control unit has a target pattern storage section that stores a target pattern for performing pattern matching, and a rectilinear region detection section that detects a rectilinear region on the basis of an image from the imaging element, calculates a deviation angle between a direction of the rectilinear region detected by the rectilinear region detection section and a processing feeding direction, and adjusts a relative angle between the target pattern stored in the target pattern storage section and a characteristic pattern on a wafer, to perform the pattern matching.

The present invention concerns a method and a system for detecting malfunctions in an apparatus and/or defects in a workpiece processed by said apparatus. The method provides for acquiring a sound signal emitted by an apparatus during an operation cycle of the same, then comparing the sound signal with a plurality of audio tracks stored in a memory area for determining a malfunction of the apparatus and/or a defectiveness of the workpiece processed by the apparatus based on the result of said comparison. The operation cycle is subdivided into a plurality of work phases and during the acquisition of the sound signal a work phase of said plurality of work phases is identified. Each audio track of the plurality of stored audio tracks comprises an audio component relating to acquired sound signals, and additional information data comprising at least one identifier of the work phase executed by the apparatus during the acquisition of the sound signals of the audio component. The plurality of audio tracks used for the comparison with the sound signal is a group of audio tracks of the plurality of audio tracks whose identifier of the work phase of the apparatus corresponds to the identified work phase. The identification data of the audio tracks additionally comprise at least one identifier of a plurality of components activated during the phase to which the audio component refers, and it is further provided for a) identifying a plurality of components activated during the identified work phase, b) on the basis of the plurality of activated components, identifying a set of comparison phases among the plurality of phases of the operation cycle, and c) identifying as defective at least one component between the plurality of components activated during the work phase and/or the workpiece, on the basis of the audio tracks relating to the set of comparison phases identified and/or on the basis of sound signals acquired during the identified comparison phases.

The present invention concerns a method and a system for detecting malfunctions in an apparatus and/or defects in a workpiece processed by said apparatus. The method provides for acquiring a sound signal emitted by an apparatus during an operation cycle of the same, then comparing the sound signal with a plurality of audio tracks stored in a memory area for determining a malfunction of the apparatus and/or a defectiveness of the workpiece processed by the apparatus based on the result of said comparison. The operation cycle is subdivided into a plurality of work phases and during the acquisition of the sound signal a work phase of said plurality of work phases is identified. Each audio track of the plurality of stored audio tracks comprises an audio component relating to acquired sound signals, and additional information data comprising at least one identifier of the work phase executed by the apparatus during the acquisition of the sound signals of the audio component. The plurality of audio tracks used for the comparison with the sound signal is a group of audio tracks of the plurality of audio tracks whose identifier of the work phase of the apparatus corresponds to the identified work phase. The identification data of the audio tracks additionally comprise at least one identifier of a plurality of components activated during the phase to which the audio component refers, and it is further provided for a) identifying a plurality of components activated during the identified work phase, b) on the basis of the plurality of activated components, identifying a set of comparison phases among the plurality of phases of the operation cycle, and c) identifying as defective at least one component between the plurality of components activated during the work phase and/or the workpiece, on the basis of the audio tracks relating to the set of comparison phases identified and/or on the basis of sound signals acquired during the identified comparison phases.

An automated mechanical machining system for machining a metal panel comprising a first face and a second face which is on the opposite side from the first face, the automated mechanical machining system comprising at least one machining tool, at least one holding tool, a control module configured to control the machining tool and the holding tool in a coordinated manner, a matching module configured to determine simple actual machining paths TRAJr1 from, on the one hand, predetermined simple theoretical machining paths TRAJt1 and, on the other hand, measurement of the actual surface SURFr of the second face and a slope management module configured to determine sloping actual machining paths TRAJr2 from sloping theoretical machining paths TRAJt2, the simple theoretical machining paths TRAJt1 and the simple actual machining paths TRAJr1.

An automated mechanical machining system for machining a metal panel comprising a first face and a second face which is on the opposite side from the first face, the automated mechanical machining system comprising at least one machining tool, at least one holding tool, a control module configured to control the machining tool and the holding tool in a coordinated manner, a matching module configured to determine simple actual machining paths TRAJr1 from, on the one hand, predetermined simple theoretical machining paths TRAJt1 and, on the other hand, measurement of the actual surface SURFr of the second face and a slope management module configured to determine sloping actual machining paths TRAJr2 from sloping theoretical machining paths TRAJt2, the simple theoretical machining paths TRAJt1 and the simple actual machining paths TRAJr1.

A system to control a workpiece during its manufacturing in a machining system. The control being performed in the same manufacturing phase following machining operation. The workpiece being set in the work volume of the machining system. The check operation includes the acquisition of points on the surface of the part. The robot is moved by a cart so the robot can reach the protected working area. The measuring device is positioned relative to the workpiece by the robot. Acquisition of a plurality of points on the surface of the workpiece is performed. The position of the plurality points acquired is compared with the three-dimensional model stored in the memory of the computer.

A system to control a workpiece during its manufacturing in a machining system. The control being performed in the same manufacturing phase following machining operation. The workpiece being set in the work volume of the machining system. The check operation includes the acquisition of points on the surface of the part. The robot is moved by a cart so the robot can reach the protected working area. The measuring device is positioned relative to the workpiece by the robot. Acquisition of a plurality of points on the surface of the workpiece is performed. The position of the plurality points acquired is compared with the three-dimensional model stored in the memory of the computer.

A machine tool improving measurement accuracy of a machined workpiece diameter. A machine tool comprises a displacement sensor mounted on at least one of a guide bush and a spindle supporting unit. The machine tool further comprises a calculating unit which calculates a diameter of the machined workpiece based on a measurement value of the machined workpiece by the displacement sensor. The spindle is movable back and forth in an axial direction. The spindle is retracted after machining to bring a machined portion of the workpiece to a predetermined measurement position in the axial direction to allow the displacement sensor to measure the machined portion.

A machine tool improving measurement accuracy of a machined workpiece diameter. A machine tool comprises a displacement sensor mounted on at least one of a guide bush and a spindle supporting unit. The machine tool further comprises a calculating unit which calculates a diameter of the machined workpiece based on a measurement value of the machined workpiece by the displacement sensor. The spindle is movable back and forth in an axial direction. The spindle is retracted after machining to bring a machined portion of the workpiece to a predetermined measurement position in the axial direction to allow the displacement sensor to measure the machined portion.