A processing machine line including multiple processing modules arranged in a width direction and loaded on a base where a machine body is movable in a front-rear direction; an automatic workpiece transfer machine to perform transferring of a workpiece by moving a conveyance robot in front of the base; an external cover to cover the processing module; a front cover to form a conveyance space of the conveyance robot, the front cover being provided with, for each processing module, an upper section cover that is open-and-closable in a lifting up manner, and a lower section cover configuring a cover front surface with the upper section cover; and a chip receiving box to be removable and attachable by being attached between the lower section cover and the base via an installation bracket that is attachable and removable with respect to a top section of the lower section cover.

A machine tool includes a base, a table, a main spindle, and a trunnion unit. The table is installed on the base. A tool is mounted to the main spindle. The main spindle is caused to approach a workpiece on the table along an up-down direction. The trunnion unit is configured to rotatably hold the table on which the workpiece is placed using a rotation axis along a front-rear direction as a center. The trunnion unit is disposed movable in a right-left direction.

A machine tool includes a base, a table, a main spindle, and a trunnion unit. The table is installed on the base. A tool is mounted to the main spindle. The main spindle is caused to approach a workpiece on the table along an up-down direction. The trunnion unit is configured to rotatably hold the table on which the workpiece is placed using a rotation axis along a front-rear direction as a center. The trunnion unit is disposed movable in a right-left direction.

An apparatus for chemical-mechanical polishing is provided, including: a plurality of polishing sections spaced apart from one another, each polishing section including: a bracket, a carrier head and a platen, the carrier head being disposed on the bracket and configured to move between a polishing position and a conveying position, in which when the carrier head is located at the polishing position, the carrier head is located above the platen; and a conveying assembly, the conveying assembly including: a rotating plate and a plurality of loading and unloading tables, the plurality of loading and unloading tables being spaced apart from one another, disposed on the rotating plate and configured to rotate along with the rotating plate, in which when the carrier head is located at the conveying position, the carrier head is corresponding to one of the plurality of loading and unloading tables.

An apparatus for chemical-mechanical polishing is provided, including: a plurality of polishing sections spaced apart from one another, each polishing section including: a bracket, a carrier head and a platen, the carrier head being disposed on the bracket and configured to move between a polishing position and a conveying position, in which when the carrier head is located at the polishing position, the carrier head is located above the platen; and a conveying assembly, the conveying assembly including: a rotating plate and a plurality of loading and unloading tables, the plurality of loading and unloading tables being spaced apart from one another, disposed on the rotating plate and configured to rotate along with the rotating plate, in which when the carrier head is located at the conveying position, the carrier head is corresponding to one of the plurality of loading and unloading tables.

A manufacturing system includes a base and multiple work machine modules that are attachable and detachable to and from the base arranged in the arrangement direction on the base or on the side of the base, in which the plurality of work machine modules include one or more processing work modules that perform machine processing work on a workpiece using a tool, and one or more supplementary work modules that perform supplementary work that is work supplementarily performed to the machine processing work. Since it is possible to easily increase and decrease the number of processing work modules and supplementary work modules or sort the modules, it is possible to easily recombine the modules with respect to modification of the manufacturing process.

A manufacturing system includes a base and multiple work machine modules that are attachable and detachable to and from the base arranged in the arrangement direction on the base or on the side of the base, in which the plurality of work machine modules include one or more processing work modules that perform machine processing work on a workpiece using a tool, and one or more supplementary work modules that perform supplementary work that is work supplementarily performed to the machine processing work. Since it is possible to easily increase and decrease the number of processing work modules and supplementary work modules or sort the modules, it is possible to easily recombine the modules with respect to modification of the manufacturing process.

A base configuration of a processing machine line including a machine tool loaded on a base provided with a processing module that performs specified processing on a work, and an auto loader that transfers the work between processing modules, the base being configured such that a rail member of the auto loader that has a length to match the width of the base is assembled on a front section of the base, and, when multiple bases are arranged next to each other in an adjacent position at which rail members can be connected, an additional rail member is able to be attached to and removed from an additional base.

A base configuration of a processing machine line including a machine tool loaded on a base provided with a processing module that performs specified processing on a work, and an auto loader that transfers the work between processing modules, the base being configured such that a rail member of the auto loader that has a length to match the width of the base is assembled on a front section of the base, and, when multiple bases are arranged next to each other in an adjacent position at which rail members can be connected, an additional rail member is able to be attached to and removed from an additional base.

The present invention is provided with: a first processing position (A1) and a second processing position (A2) at which rough processing is performed on a workpiece (W); a third processing position (B1) at which final finishing processing is performed on the workpiece (W) that was processed at the second processing position (A2); flexible vices (7) provided to the first processing position (A1) and the second processing position (A2), the flexible vices (7) securing the workpiece (W) by clamping the same; and a quick clamping device (20) provided to the third processing position (B1), the quick clamping device (20) securing the workpiece (W) by means of a pin. The present invention is also provided with a control unit that controls a rough processing tool for performing rough processing and a final finishing processing tool for performing final finishing processing.