Patent classifications
B
B24
B24B
1/00
B24B1/005
B24B1/005
SUBSTRATE POLISHING HEAD, METHOD OF POLISHING SUBSTRATE AND MEMBRANE FOR SUBSTRATE POLISHING HEAD
Provided is a substrate polishing head including a head part configured to be rotatable, a membrane mounted on the head part and configured to grip a substrate; a retainer ring surrounding the membrane, and a plurality of first electromagnets disposed within the head part and configured to form a magnetic field; wherein the membrane includes a first material having a hardening degree that changes depending on a magnetic field applied to the membrane.